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Nano and Microsystems Technology Lab

The Nano and Microsystems Technology Lab is used for student practicals, for PhD work and for research on application-oriented topics. The lab has sophisticated systems technology for the processing of structures in the nanometer range using low-particulate cleanrooms with an area of 300 m².


B 1.19, B 0.97 Furtwangen Campus

Through practicals and student assistant work, or in thesis work – for students of Smart Systems and Micromedical Engineering there are many opportunities to learn practical skills and deepen theoretical knowledge of microsystems technology in the lab.

Many former students work on third party funded research projects. After graduating it is also possible start an academic career by doing a doctorate.

We work closely with companies and other research institutions on joint projects. Our research work is clustered in the Institute for Microsystems Technology. Here is a list of our publications and current research projects.

Services for joint research

  • Technology consulting
  • Project planning and applications
  • Multiphysics - Simulation
  • System analysis / concept validation
  • Process development and execution in micro- and nanotechnology
  • Production of prototypes (sensors and actuators)
  • Characterization

Our specializations

  • Micro- and nanotechnology
  • Sensors and actuators (Micro-Electro-Mechanical-Systems, MEMS)
  • Optical systems (Micro-Opto-Electro-Mechanical Systems, MOEMS)
  • Electro-chemical etching / anodizing
  • Flexible electronics
  • Micromedicine
  • Intelligent implants
  • Embedded systems
  • 3D microstructuring
  • Self-organizing systems in micro- and nanotechnology