Institute for Microsystems Technology (iMST)

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Research accurate to the micrometer

The IMST team

Our team

The Institute of Microsystems Technology (iMST) has been researching new microsystems, associated modelling and manufacturing processes and characterisation methods for many years. The iMST is one of the largest research institutes at HFU and its research results are also recognised internationally.

Today, millions of microsystems are used in automobiles (sensors), in communication technology (microphones and high-frequency components, smart phones, micromirrors in projectors, print heads in inkjet printers) and in medical technology (retina implants, cochlear implants). This requires structures in the micrometer range, which are produced using microtechnical processes and combine electronic and non-electronic functions in the smallest of spaces in a single system.

The highly motivated, multidisciplinary team conducts research in numerous cooperation projects with companies, scientific institutions and universities on application-oriented issues in microsystems technology.

Internships, theses and doctorates

Students can find exciting topics for practical work or theses in the context of current research projects. The iMST also regularly offers doctoral positions in these projects. HFU can directly supervise these doctoral theses as part of the doctoral association of Baden-Württemberg universities (Promotionszentrum BW-CAR www.hs-furtwangen.de/zukunft-forschen/promotion).

Laboratories and equipment

The iMST includes the Internal link opens in the same window:Nano- and Microtechnology Laboratory in Furtwangen and the Internal link opens in the same window:Rottweil Research Center. There is extensive equipment in the clean room with innovative coating systems (PVD, PECVD, ALD, parylene coating) and structuring methods (photo-lithography and mask-less laser lithography, FIB structuring). State-of-the-art equipment such as FIB-SEM, RAMAN spectroscopy or laser scanning microscopes are available for surface and interface analysis.

Microsystems can be tested for their suitability and long-term stability in harsh environments (e.g. for active implants: simulated physiological body environment) in special aging tests. 

Research areas

Research projects

DiaKat+

Functionalised tactile sensor catheter for model-based diagnostics of pathological vascular changes in arteries.

Internal link opens in the same window:To Diakat+

 

HelpMeWalk

The project addresses the lack of affordable and simple technology for orthopaedic practices for 3D imaging of the human body.

Internal link opens in the same window:To  HelpMeWalk

 

Filterhub

The aim of this project is to develop the first high-quality and continuously tunable optical bandpass filter for the THz range (e.g. 0.3-1.6 THz) and the far IR range.

Internal link opens in the same window:To Filterhub

F-safe

The project aims to develop a new type of plasma system for fluorine-processed etching and coating processes.

Internal link opens in the same window:To F-safe

 

Maintaining sharp vision even in old age

The interdisciplinary cooperation project is developing both a smart contact lens and an intraocular implant.

Internal link opens in the same window:To Maintaining sharp vision even in old age

 

MUST ACT

Multi-stage, multi-stable actuator system with adjustable stroke, reach and force based on cooperative electrostatic actuators.
Internal link opens in the same window:to MUST ACT

 

Neuroflexarray

The aim of the project is to develop a large-area, high-resolution electrode array for neuronal applications.
Internal link opens in the same window:to Neuroflexarray

 

PlasmaKlient

Novel plasma technology for the elimination of climate-damaging fluorocarbon emissions in industrial dry etching processes.
Internal link opens in the same window:to PlasmaKlient

 

CoHMed

Connected Health in Medical Mountains - an innovation and transfer partnership of Furtwangen University. Sub-projects for the development of intelligent medical instruments and functional surfaces.
Internal link opens in the same window:to CoHMed​​​​​​​

 

Smart Optics

R&D project for the development of MOEMS-based, smart optical systems.
Internal link opens in the same window:to Smart Optics

 

SensoGrind

In situ quality assessment of grinding processes using MST-based sensor fusion.
Internal link opens in the same window:to SensoGrind​​​​​​​

 

News from research at HFU

Publications

Institut für Mikrosystemtechnik