Wir erforschen die Mikro- und Nanowelten

Unser Team
Mikrosysteme spielen eine entscheidende Rolle in Bereichen wie Elektronik, Medizintechnik und Biotechnologie, indem sie effizientere und miniaturisierte Lösungen bieten. Im alltäglichen Leben begegnen uns zum Beispiel Tintendruckköpfe und Sensoren zur Airbag-Auslösung oder zur automatischen Bilddrehung im Smartphone. In der Medizintechnik können Blinde wieder sehen, Taube wieder hören und es gibt intelligente Pillen, die im Magen-Darmtrakt Blutungen nach außen melden.
Seit vielen Jahren forscht das Institut für Mikrosystemtechnik (iMST) an neuen Mikrosystemen, zugehörigen Modellierungs- und Herstellungsverfahren sowie Methoden zur Charakterisierung.
Das iMST ist eines der größten Forschungsinstitute der HFU, seine Forschungsergebnisse werden international wahrgenommen.
Das hochmotivierte, multidisziplinäre Team forscht in zahlreichen Kooperationsprojekten mit Unternehmen, wissenschaftlichen Einrichtungen und Universitäten an anwendungsorientierten Fragestellungen der Mikrosystemtechnik. Auch eine direkte Auftragsforschung ist möglich.
Praktika, Thesen und Promotionen
Studierende können für Praxis- oder Thesis-Arbeiten spannende Themen im Kontext von aktuellen Forschungsprojekten finden. Das iMST bietet in diesen Projekten auch regelmäßig Promotionsstellen an. Die HFU kann im Promotionsverband der Hochschulen Baden-Württemberg (Promotionszentrum BW-CAR https://www.hs-furtwangen.de/zukunft-forschen/promotion) diese Promotionen direkt betreuen.
Labore und Ausstattung
Zum iMST gehören das Link öffnet sich im gleichen Fenster:Nano- und Mikrotechnologie-Labor in Furtwangen sowie das Link öffnet sich im gleichen Fenster:Forschungszentrum Rottweil. Es besteht im Reinraum eine umfangreiche Ausstattung mit innovativen Beschichtungsanlagen (PVD, PECVD, ALD, Parylen-Beschichtung) und Strukturierungsmethoden (Foto-Lithographie und Maskenloser Laser- Lithographie, FIB-Strukturierung). Für die Oberflächen- und Grenzflächenanalytik sind modernste Geräte wie zum Beispiel FIB-SEM, RAMAN-Spektroskopie oder Laserscan-Mikroskope vorhanden.
Mikrosysteme können in speziellen Auslagerungstests auf ihre Eignung und Langzeitstabilität in harscher Umgebung (zum Beispiel für aktive Implantate: simulierte physiologische Körperumgebung) getestet werden.
Unsere Forschungsgebiete
Mikro- und Nanosystemtechnik
- Flexible Sensorik
- Mikro-Aktoren
- Optische Systeme
- Innovative Sensoren
Mikromedizintechnik
- Flexible Sensorik
- Aktive Implantate (Bsp. Distraktor, Biosignal-gesteuerte Mikro-Linse…)
- Funktionale Beschichtungen (z.B. biokompatibel, biostabil und bioaktiv)
- Schutz von miniaturisierter Elektronik in physiologischer Umgebung
Oberflächentechnologie
- Funktionale Beschichtungen wie ALD (optional Flächen-selektiv), PVD, PECVD z.B. für Antireflexschichten, korrosionsfeste Beschichtungen, quasihermetische flexible Diffusionsbarrieren
- Mikro- und Nanostrukturierung (mit Ga+-Ionenstrahl, Laser- und Fotolithography)
- Schutz von miniaturisierter Elektronik in harscher Umgebung
- Innovative Oberflächen-Reinigung und Aktivierung (z.B. CO2-Reinigung, Plasmareinigung)
- Ultra-homogene dekorative Schichten auf komplexen Oberflächen
Analytik
- Auslagerungs-, Lebensdauertests
- 3D Mikrotomographie (am FIB-SEM)
- Oberflächen- und Grenzflächenanalytik (SEM, TEM, ToF-SIMS, EDX, EBSD, FT-IR, konfokale Lasermikroskopie, Ellipsometrie, XRD, RFA)
- Materialprüfung (Haftungstests, Zugprüfung, Härtemessung, DSC, Elektrochemische Impedanzspektroskopie, Zyklische Voltametrie, Quadrupol-Massenspektrometrie)
Forschungsprojekte
Jahresrückblick des IMST für 2024
Neues aus der Forschung an der HFU
Ich informiere gerne zur Forschung unseres Instituts
Institutsleitung
Publikationen
Institut für Mikrosystemtechnik
2025 | |||
Nicolai Simon, Thomas Stieglitz, Volker Bucher | Area Selective Atomic Layer Deposition for the Use on Active Implants : An Overview of Available Process Technology | Advanced Healthcare Materials, 14.2025(4), 2025 | BibTeX | RIS | DOI | URN |
2024 | |||
Leonie Gottschalk, Sonja Müller, Volker Bucher | Analysis of wireless data transfer methods for subcutaneous medical implants | AUTOMED 2024 : Automatisierungstechnische Verfahren für die Medizin, 11. - 13. September 2024, Villingen-Schwenningen, Germany - Proceedings, pp. 33-34, 2024 | BibTeX | RIS | DOI | URN |
Nicolai Simon, Thomas Stieglitz, Volker Bucher | Area Selective Catalytic Etching for Opening Electrodes in Neural Implants | 2024 MRS Fall Meeting & Exhibit, December 1-6, 2024, Boston, Massachusetts, 2024 | BibTeX | RIS |
Nicolai Simon, Thomas Stieglitz, Volker Bucher | Area-Selective Etching of Parylene-C on Platinum Surfaces | BMT 2024 : 58th Annual Conference of the German Society for Biomedical Engineering, 18.-20. September 2024, Suttgart, Germany, 2024 | BibTeX | RIS |
Benjamin Sittkus, Julien Petit, Gerald Urban, Ulrich Mescheder | Crack preserving effect in ultrathin metal films on elastomer membranes induced by e-beam irradiation | FLEPS2024 : IEEE International Conference on Flexible and Printable Sensors and Systems, June 30 - July 3, 2024,Tampere, Finland ; Conference Proceedings, 2024 | BibTeX | RIS | DOI |
Sonja Müller, Stefan J. Rupitsch, Ulrich Mescheder | Integration Aspects of Smart Actuators in Active Medical Implants for Personalized Medicine | IFAC-PapersOnLine, 58.2024(24), pp. 568-572, 2024 | BibTeX | RIS | DOI | URN |
Benjamin Sittkus, Ashish Bhave, Claudia Kühlbach, Margareta Müller, Ulrich Mescheder, Knut Möller | Intraluminal sensor-actor-system for tactile vessel diagnosis and model based individualized vessel reconstruction | CoHMed Final Symposium Proceedings, 12th September 2024, Villingen-Schwenningen, Germany - Abstract Proceedings, pp. 23-24, 2024 | BibTeX | RIS | DOI | URN |
Sebastian Kaltenstadler, Sven Schumayer, Bishesh Sigdel, Eberhart Zrenner, Volker Bucher, Albrecht Rothermel, Torsten Strasser | Intraocular sensor for wireless in vivo real time recording of ciliary muscle potentials during accommodation | Investigative Ophthalmology & Visual Science, 65.2024(7), 2024 | BibTeX | RIS |
Sven Schumayer, Bishesh Sigdel, Torsten Strasser, Eberhart Zrenner, Volker Bucher, Mohamed A. Jarboui, Sandra Wagner | Non-invasive recording of ciliary muscle biopotentials during accommodation using novel scleral contact lens electrode | Investigative Ophthalmology & Visual Science, 65.2024(7), 2024 | BibTeX | RIS |
Marvin Schmid, Wolfram Kintzel, Volker Bucher | Plasma Etching with Solid Precursors : Feasibility of an effective Closed-Loop Control System with Optical Emission Spectrometry (OES) | WOMag, 13.2024(6), pp. 20-22, 2024 | BibTeX | RIS | DOI |
Andras Kovacs, Julien Petit, Volker Bucher, Ulrich Mescheder | Porous Silicon-Based Absorber Using Integration of Light Trapping and Anti-Reflective Layer | 2024 IEEE Sensors, October 20 - 23, 2024, Kobe, Japan, 2024 | BibTeX | RIS | DOI |
Friederike C. Kortuem, Sebastian Kaltenstadler, Sven Schumayer, Bishesh Sigdel, Immanuel P. Seitz, Tobias Peters, Albrecht Rothermel, Volker Bucher, Eberhart Zrenner, Karl-Ulrich Bartz-Schmidt, Torsten Strasser | Surgical approach for the implantation of a capsular ring electrode into the posterior chamber | Investigative Ophthalmology & Visual Science, 65.2024(7), 2024 | BibTeX | RIS |
2023 | |||
Sonja Müller, Ulrich Mescheder | Energy requirement and energy management for an active implant | MikroSystemTechnik Kongress 2023, Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität, 23. - 25. Oktober 2023, Dresden, Germany - Proceedings, 2023 | BibTeX | RIS |
Alina Kohler, Felix Blendinger, Sonja Müller, Ulrich Mescheder, Volker Bucher | Feasibility of Parylene C for encapsulating piezoelectric actuators in active medical implants | Frontiers in Medical Technology, Vol.5.2023, 2023 | BibTeX | RIS | DOI | URN |
Hakan Alaboz, Benjamin Sittkus, Divya D. Muley, Ulrich Mescheder | Finger position sensing on curved surfaces in braille displays | MikroSystemTechnik Kongress 2023, Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität, 23. - 25. Oktober 2023, Dresden, Germany - Proceedings, 2023 | BibTeX | RIS |
Ashish Bhave, Benjamin Sittkus, Gerald Urban, Ulrich Mescheder, Knut Möller | Finite element analysis of the interaction between high-compliant balloon catheters and non-cylindrical vessel structures: towards tactile sensing balloon catheters | Biomechanics and Modeling in Mechanobiology, 22.2023(6), pp. 2033-2061, 2023 | BibTeX | RIS | DOI | URN |
Ulrike Passlack, Nicolai Simon, Volker Bucher, Christine Harendt, Thomas Stieglitz, Joachim N. Burghartz | Flexible Ultrathin Chip-Film Patch for Electronic Component Integration and Encapsulation using Atomic Layer-Deposited Al2O3–TiO2 Nanolaminates | ACS Applied Materials & Interfaces, 15.2023(12), pp. 16221-16231, 2023 | BibTeX | RIS | DOI |
Isman M. Khazi, Jürgen Wilde, Gregor Neusser, Christine Kranz, Ulrich Mescheder | In situ analysis of electrochemical deposition kinetics for nanocrystalline nickel-cobalt alloys with varying bath hydrodynamics | Surface and Coatings Technology, 464.2023(July), 2023 | BibTeX | RIS | DOI |
Benjamin Sittkus, Ulrich Mescheder | In-situ SEM analysis tool for stretchable metal-elastomer-laminate-membranes for flexible sensors | MikroSystemTechnik Kongress 2023, Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität, 23. - 25. Oktober 2023, Dresden, Germany - Proceedings, 2023 | BibTeX | RIS |
Almothana Albukhari, Ulrich Mescheder | Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems | Actuators, 12.2023(4), p. 38, 2023 | BibTeX | RIS | DOI | URN |
Przemyslaw Lopato, Michal Herbko, Ulrich Mescheder, Andras Kovacs | Influence of a thin dielectric layer on resonance frequencies of square SRR metasurface operating in THz band | Open Engineering, 13.2023(1), 2023 | BibTeX | RIS | DOI | URN |
Wolfram Kintzel, Marvin Schmid, Achim Rentschler, Jörg Eisenlohr, Volker Bucher | Novel method for plasma etching of printed circuit boards as alternative for fluorocarbon gases | International Journal of Plasma Environmental Science and Technology : ISNTPT, 17.2023(2), 2023 | BibTeX | RIS | DOI |
Przemyslaw Lopato, Michal Herbko, Paulina Gora, Ulrich Mescheder, Andras Kovacs, Alexander Filbert | Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality | Electronics, 12.2023(10), 2023 | BibTeX | RIS | DOI | URN |
Mathias Schulz, Stefan Keil, Simon Löhlein, Sourish Banerjee, Nicolai Simon, Catherine Dubourdieu, Volker Bucher, Roland Thewes | On the Noise Contribution of Dielectric Interfaces in Biochemical CMOS Sensor Chips | IEEE 49th European Solid State Circuits Conference (ESSCIRC), 11-14 September 2023, Lisbon, Portugal, 2023 | BibTeX | RIS | DOI |
Sonja Müller, Stefan J. Rupitsch, Ulrich Mescheder | Study on Sensitivity and Accuracy of Piezoelectric Stack Actuators for Charge Self-Sensing | SMSI 2023 : Sensor and Measurement Science International, 8-11 May 2023, Nürnberg, Germany : Proceedings, pp. 372-373, 2023 | BibTeX | RIS | DOI |
Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder | Surface Passivated Porous Silicon-Based Antireflective Coating | MikroSystemTechnik Kongress 2023, Mikroelektronik/Mikrosystemtechnik und ihre Anwendungen – Nachhaltigkeit und Technologiesouveränität, 23. - 25. Oktober 2023, Dresden, Germany - Proceedings, 2023 | BibTeX | RIS |
2022 | |||
Christian Krause, Simone Schrempp, Hans-Georg Enkler, Martin Untenberger, Volker Bucher, Nicolai Simon, Maximilian Schaudig, Malvine N. Strakova, Mihails Scepanskis | An approach to improve the efficiency of flux concentrator materials, pt. 2 | heat processing, 20.2022(3), pp. 41-46, 2022 | BibTeX | RIS |
Nicolai Simon, Aaron Urschel, Thomas Stieglitz, Volker Bucher | Area Selectiv Atomic Layer Deposition on Noble Metals | BMT 2022, Abstracts of the 2022 Joint Annual Conference of the Austrian (ÖGBMT), German (VDE DGBMT) and Swiss (SSBE) Societies for Biomedical Engineering, 28.-30.09.2022, Innsbruck, Österreich, p. 471, 2022 | BibTeX | RIS | DOI |
Elisa-Marie Lux, Dirk Herrmann, Thomas Gratzl, Volker Bucher | Comparability of the cooling effect of Peltier thermoelectric elements in a chemiluminescence analyzer under extreme climatic conditions | HFU Master research projects, 2.2022(1/2), p. 4, 2022 | BibTeX | RIS | URN |
Christoph Reiser, Nicolai Simon, Volker Bucher | Determination of the Water Vapour Transmission Rate of Polymer-Metal Oxide Layer Composites | HFU Master research projects, 2.2022(1/2), 2022 | BibTeX | RIS | URN |
Sonja Müller, Stefan J. Rupitsch, Ulrich Mescheder | Experimental characterisation of a piezoelectrically actuated force amplifier using optical and self-sensing methods | ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications, June 29-30, 2022, Mannheim, Germany, pp. 274-277, 2022 | BibTeX | RIS |
Nicolai Simon, Marvin Schmid, Felix Blendinger, Volker Bucher | Long Term Evaluation of the Barrier Properties of Polymer/Metal Oxide Hybrid Layers for Use in Medical Implants | BMT 2022, Abstracts of the 2022 Joint Annual Conference of the Austrian (ÖGBMT), German (VDE DGBMT) and Swiss (SSBE) Societies for Biomedical Engineering, 28.-30.09.2022, Innsbruck, Österreich, p. 426, 2022 | BibTeX | RIS | DOI |
Nicolai Simon, Marvin Schmid, Felix Blendinger, Volker Bucher | Long Term Evaluation of the Barrier Properties of Polymer/Metal Oxide Hybrid Layers for Use in Medical Implants | Current Directions in Biomedical Engineering, 8.2022(2), pp. 435-438, 2022 | BibTeX | RIS | DOI | URN |
Sven Schumayer, Nicolai Simon, Benjamin Sittkus, Sandra Wagner, Volker Bucher, Torsten Strasser | Novel Three-Dimensional and Biocompatible Lift-Off Method for Selective Metallization of a Scleral Contact Lens Electrode for Biopotential Detection | Frontiers in Medical Technology, 4.2022(June), 2022 | BibTeX | RIS | DOI | URN |
Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder | Porous Silicon Based Ultra-Band infrared Antireflective and Light absorbing Coating | Porous Semiconductors - Science and Technology 2022, PSST2022, March 27th - April 1st, 2022, Lido di Camaire (Lucca), Italy, 2022 | BibTeX | RIS | DOI |
Max Borgolte, Oliver Riester, Isabel Quint, Felix Blendinger, Volker Bucher, Stefan Laufer, René Csuk, Luca Scotti, Hans-Peter Deigner | Synthesis of a biocompatible benzophenone-substituted chitosan hydrogel as novel coating for PEEK with extraordinary strong antibacterial and anti-biofilm properties | MaterialsToday Chemistry, Vol.26.2022, 2022 | BibTeX | RIS | DOI | URN |
The Upper-Rhine Artificial Intelligence Symposium UR-AI 2022 : AI Applications in Medicine and Manufacturing, 19 October 2022, Villingen-Schwenningen, Germany | Christoph Reich, Ulrich Mescheder (Eds.)2022 | BibTeX | RIS | URN | |
2021 | |||
Felix Blendinger, Daniel Seitz, Andreas Ottenschläger, Monika Fleischer, Volker Bucher | Atomic Layer Deposition of Bioactive TiO2 Thin Films on Polyetheretherketone for Orthopedic Implants | ACS Applied Materials & Interfaces, 13.2021(3), pp. 3536-3546, 2021 | BibTeX | RIS | DOI |
Benjamin Gohminger, Falk Stukowski, Volker Bucher | Bestimmung der Oxidschichtdicke am Stent-Werkstoff L605 | WOMag, 10.2021(9), pp. 16-18, 2021 | BibTeX | RIS |
Ulrich Kallmann, Michael Lootze, Ulrich Mescheder | Charakterisierung und erste Anwendung eines MEMS-basierten adaptiven Zylinderspiegels | DGaO-Proceedings 2021 : 122. Jahrestagung der DGaO, 21. - 23. September 2021, Bremen, Germany, 2021 | BibTeX | RIS |
Hakan Alaboz, Andras Kovacs, Yasser Safa, Ulrich Mescheder | Development of Cost-Effective Automated Test System for Determining Lifetime of Gold Contacts Under Mechanical Load | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 738-741, 2021 | BibTeX | RIS |
Ulrich Mescheder, Michael Lootze, Khaled Aljasem | Evaluation and Optimization of a MOEMS Active Focusing Device | Micromachines, 12.2021(2), 2021 | BibTeX | RIS | DOI |
Ulrike Passlack, Nicolai Simon, Volker Bucher, Christine Harendt, Joachim N. Burghartz | Flexible Ultra-Thin Chip-Film Patch for Integration of Electronic Components for Biomedical Applications | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 602-605, 2021 | BibTeX | RIS |
Isman M. Khazi, Andras Kovacs, Ulrich Mescheder, Ali Zahedi, Bahman Azarhoushang | Fusion of Optical and Microfabricated Eddy-Current Sensors for the Non-Destructive Detection of Grinding Burn | Advances in Science, Technology and Engineering Systems Journal, 6.2021(1), pp. 1414-1421, 2021 | BibTeX | RIS | DOI | URN |
Isman M. Khazi, Ulrich Mescheder, Jürgen Wilde | In situ Electroanalytical Modelling of the Influence of Bath Hydrodynamics on Nucleation Kinetics for Electrodeposition of Nickel-Cobalt Alloy System | SICT 2021, 7 - 9 April, 2021, Paris, France, Virtual Joint Conference, 2021 | BibTeX | RIS | DOI |
Rui Zhu, Ulrike Wallrabe, Peter Woias, Matthias C. Wapler, Ulrich Mescheder | Influence of electrode design on actuation characteristics of cooperative DEAP actuators | ACTUATOR 21 : International Conference and Exhibition on New Actuator Systems and Applications, 17-19 February 2021, Online Conference, Germany, pp. 357-360, 2021 | BibTeX | RIS |
Almothana Albukhari, Ulrich Mescheder | Investigation of the Dynamics of a 2-DoF Actuation Unit Cell for a Cooperative Electrostatic Actuation System | Actuators, 10.2021(10), 2021 | BibTeX | RIS | DOI | URN |
Nicolai Simon, Maria Asplund, Thomas Stieglitz, Volker Bucher | Plasma Enhanced Atomic Layer Deposition of Iridium Oxide for Application in Miniaturized Neural Implants | Current Directions in Biomedical Engineering, 7.2021(2), pp. 539-542, 2021 | BibTeX | RIS | DOI | URN |
Benjamin Sittkus, Ulrich Mescheder, Gerald Urban | Processing method of thin metal-polymer laminate membranes and transfer to cylindrically shaped substrates for flexible sensors | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 430-433, 2021 | BibTeX | RIS |
Nicolai Simon, Ulrike Passlack, Thomas Stieglitz, Felix Blendinger, Volker Bucher | Qualification of the Barrier Properties of ALD-coated Polymer Films with Humidity Sensors | MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 380-383, 2021 | BibTeX | RIS |
Ulrich Kallmann, Michael Lootze, Ulrich Mescheder | Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror | Micromachines, 12.2021(2), 2021 | BibTeX | RIS | DOI | URN |
2020 | |||
Florian Sicklinger, Yunhang Zhang, Kory Lavine, Nicolai Simon, Volker Bucher, Manfred Jugold, Lorenz Lehmann, Mathias H. Konstandin, Hugo A. Katus, Florian Leuschner | A Minimal-Invasive Approach for Standardized Induction of Myocardial Infarction in Mice | Circulation Research, 127.2020(9), pp. 1214-1216, 2020 | BibTeX | RIS | DOI |
Aakash Shah, Florian Höschen, Volker Bucher | Biocompatible Polymer Encapsulation for Active Bone Distractors | WOMag, 9.2020(7-8), 2020 | BibTeX | RIS |
Andras Kovacs, Isman M. Khazi, Ali Zahedi, Ulrich Mescheder, Bahman Azarhoushang | Development of an Optical Sensor for the Non-Destructive Testing of Grinding Burn | IEEE Sensors 2020, October 25-28, 2020, Rotterdam, Netherlands, 2020 | BibTeX | RIS |
Isman M. Khazi, Andras Kovacs, Ali Zahedi, Christian Reser, Ulrich Mescheder, Bahman Azarhoushang, Christoph Reich | In situ Qualitätsbeurteilung von Schleifprozessen mittels Mikrosystemtechnik basierter Sensorfusion | ZfP heute : Wissenschaftliche Beiträge zur zerstörungsfreien Prüfung heute; Sonderband 2020, pp. 99-101, 2020 | BibTeX | RIS |
Ulrike Passlack, Nicolai Simon, Volker Bucher, Christine Harendt, Thomas Stieglitz, Joachim N. Burghartz | Investigation of Long-Term Stability of Hybrid Systems-in-Foil (HySiF) for Biomedical Applications | 2020 IEEE 8th Electronics System-Integration Technology Conference (ESTC), 15-18 September 2020, Tonsberg, Vestfold Norway, 2020 | BibTeX | RIS | DOI |
Michele Dollt, Miriam Reh, Michael Metzger, Gerhard Heusel, Martin Kriebel, Volker Bucher, Günther Zeck | Low-temperature atomic-layer deposited oxide on titanium nitride electrodes enables culture and physiological recording of electrogenic cells | Frontiers in Neuroscience, 14.2020(September Artikel 552876), 2020 | BibTeX | RIS | DOI | URN |
Isman M. Khazi, Andras Kovacs, Ali Zahedi, Ulrich Mescheder, Bahman Azarhoushang | Microfabricated Eddy-Current Sensors for Non-Destructive Testing of the Micro Grinding Burn | IEEE Sensors 2020, October 25-28, 2020, Rotterdam, Netherlands, 2020 | BibTeX | RIS |
Isman M. Khazi, Andras Kovacs, Ulrich Mescheder | Microfabrication of 3D Free-Forms with Textured Surface Morphology in Monocrystalline Silicon using Grayscale Technology | Journal of Applied Material Science & Engineering Research, 4.2020(4), pp. 150-154, 2020 | BibTeX | RIS | DOI |
Isman M. Khazi, Andras Kovacs, Rui Zhu, Ulrich Mescheder | Optimization of Microfabricated 2D Planar Spiral Microcoils for the Micro NDT of Grinding Burn | Comsol Conference 2020 Europe, October 14–15, 2020 | BibTeX | RIS |
Markus Westerhausen, Tanja Martin, Michael Metzger, Felix Blendinger, Monika Fleischer, Boris Hofmann, Volker Bucher | Passivated electrode side walls by atomic layer deposition on flexible polyimide based samples | Microelectronic Engineering, 227.2020(April Artikel 111315), 2020 | BibTeX | RIS | DOI |
Isman M. Khazi, Andras Kovacs, Ali Zahedi, Christian Reser, Ulrich Mescheder, Bahman Azarhoushang, Christoph Reich | Real time In-Situ Quality Monitoring of Grinding Process using Microtechnology based Sensor Fusion | 2020 IEEE International Conference on Semiconductor Electronics (ICSE), Kuala Lumpur, Malaysia, 2020, pp. 180-184, 2020 | BibTeX | RIS | DOI |
Andras Kovacs, Dagmar Martin, Alexander Filbert, Volker Bucher, Ulrich Mescheder | Single and Multilayer Atomic Layer Deposition on and into Mesoporous Silicon Layers | ECS Transactions, 98.2020(2), pp. 121-130, 2020 | BibTeX | RIS | DOI |
2019 | |||
Almothana Albukhari, Frederico Lima, Ulrich Mescheder | Bed-Embedded Heart and Respiration Rates Detection by Longitudinal Ballistocardiography and Pattern Recognition | Sensors, 19.2019(6), 2019 | BibTeX | RIS | DOI | URN |
Markus Westerhausen, Michael Metzger, Felix Blendinger, Anja Levermann, Monika Fleischer, Boris Hofmann, Volker Bucher | Characterization of Biostable Atomic Layer Deposited (ALD) Multilayer Passivation Coatings for Active Implants | EMBC 19 : 41st Annual International Conference of the IEEE Engineering in Medicine & Biology Society (EMBC), July 23-27, 2019, Berlin, Germany, pp. 3927-3930, 2019 | BibTeX | RIS |
Rui Zhu, Ulrich Mescheder | Deap Based Actuator for Tactile and Microfluidics Applications | 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 23-27 June 2019, Berlin, Germany, pp. 2432-2435, 2019 | BibTeX | RIS | DOI |
Alexander Bejan, Frederico Lima, Ulrike Lindwedel, Almothana Albukhari, Rui Zhu, Maab Inayah, Christophe Kunze, Ulrich Mescheder | Design und Evaluation eines low-cost Ambient-Assisted-Living-Sensorsystems zur ballistokardiografischen Messung der Vitalfunktionen und Aktivitäten älterer Bewohner | 6. Ambient Medicine® Forum „Assistive Technik für selbstbestimmtes Wohnen", 19.-20. Februar 2019, pp. 15-22, 2019 | BibTeX | RIS |
Rui Zhu, Lennart Rubbert, Pierre Renaud, Ulrich Mescheder | Determination of a tactile feedback strategy for use in robotized percutaneous procedures | 41st Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), July 23 - 27, 2019, Berlin, Germany, pp. 5846-5850, 2019 | BibTeX | RIS | DOI |
Frederico Lima, Isman M. Khazi, Ulrich Mescheder, Alok C. Tungal, Uma Muthiah | Fabrication of 3D microstructures using grayscale lithography | Advanced Optical Technologies, 8.2019(3-4), pp. 181-193, 2019 | BibTeX | RIS | DOI |
Benjamin Sittkus, Andras Kovacs, Ulrich Mescheder | Fabrication of a microfluidic system with columnar structures using DRIE for blood brain barrier applications | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 750-753, 2019 | BibTeX | RIS |
Benjamin Sittkus, Rui Zhu, Ulrich Mescheder | Flexible piezoresistive PDMS metal-thin-film sensor-concept for stiffness evaluation of soft tissues | IEEE International Conference on Flexible and Printable Sensors and Systems : FLEPS 2019, July 7 - 10, 2019, Glasgow, United Kindom, 2019 | BibTeX | RIS | DOI |
Frederico Lima, Ulrich Mescheder, Harald Leiste, Müller Claas | Influence of current density on the adhesion of seedless electrodeposited copper layers on silicon | Surface and Coatings Technology, 375.2019(October), pp. 554-564, 2019 | BibTeX | RIS | DOI |
Isman M. Khazi, Ulrich Mescheder | Influence of electrochemical operating conditions on the microme-chanical properties of electrodeposited Nickel-Cobalt alloys for fabrication of microtools | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 599-602, 2019 | BibTeX | RIS |
Volker Bucher | Lasermarkierbare matte kratzfeste Oberflächen | iNNOVATION FORUM Medizintechnik, TechnologyMountains, 24.Oktober 2019, Tuttlingen, Germany, p. 46, 2019 | BibTeX | RIS |
Frederico Lima, Almothana Albukhari, Ulrich Mescheder | Machine Learning for Contactless Low-Cost Vital Signs Monitoring Systems | Artificial Intelligence: From Research to Application: The Upper-Rhine Artificial Intelligence Symposium UR-AI 2019, March 13th, 2019, Offenburg, Germany, pp. 95-99, 2019 | BibTeX | RIS |
Isman M. Khazi, Andras Kovacs, Vaibhav Kumar, Pranav Dhumal, Ulrich Mescheder | Microfabricated 2D planar eddy-current microcoils for the non-destructive testing of grinding burn marks | Non-destructive Testing and Diagnostics, pp. 29-35, 2019 | BibTeX | RIS | DOI |
Shervin Keshavarzi, Andras Kovacs, Mohammad Abdo, Vlad Badilita, Jan G. Korvink, Ulrich Mescheder | Miniaturized porous silicon rugate filter wheel for multispectral imaging applications | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 464-467, 2019 | BibTeX | RIS |
Shervin Keshavarzi, Andras Kovacs, Mohammad Abdo, Vlad Badilita, Rui Zhu, Jan G. Korvink, Ulrich Mescheder | Porous Silicon Based Rugate Filter Wheel for Multispectral Imaging Applications | ECS Journal of Solid State Science and Technology, 8.2019(3), pp. Q43-Q49, 2019 | BibTeX | RIS | DOI | URN |
Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder | Porous silicon based antireflection coating for the MWIR range | MikroSystemTechnik Kongress 2019 : Mikroelektronik | MEMS-MOEMS | Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 487-490, 2019 | BibTeX | RIS |
Rui Zhu, Ulrike Wallrabe, Peter Woias, Matthias C. Wapler, Ulrich Mescheder | Semi-rigid ring-shaped electrode dielectric electroactive polymer membrane as buckling actuator | Journal of Micromechanics and Microengineering, 29.2019(5 Aufsatz 055001), 2019 | BibTeX | RIS | DOI |
Shervin Keshavarzi | Silicon Needle-like Surfaces for Room Temperature Silicon-Silicon Bonding Applications | Doctoral thesis, 2019 | BibTeX | RIS | URN |
Andreas Heid, Marcio Camoleze de Andrade, Lena Bleck, Rene P. von Metzen, Dieter Kern, Jürgen Giehl, Volker Bucher | Transfer, Assembly and Embedding of Small CMOS-Die Arrays for the Build-up of Flexible Smart Implants | IEEE Transactions on Components, Packaging and Manufacturing Technology, 9.2019(7), pp. 1415-1425, 2019 | BibTeX | RIS | DOI |
2018 | |||
Isman M. Khazi, Ulrich Mescheder, Uma Muthiah | 3D free forms in c-Si via grayscale lithography and RIE | Microelectronic Engineering, 193.2018(June), pp. 34-40, 2018 | BibTeX | RIS | DOI |
Andreas Heid, Lena Bleck, Rene von Metzen, Volker Bucher | A demonstrator for a flexible active microelectrode array with high electrode number | Current Directions in Biomedical Engineering, 4.2018(1), pp. 279-282, 2018 | BibTeX | RIS | DOI | URN |
Felix Blendinger | Bioaktive Beschichtung für orthopädische Implantate im ALD | iNNOVATION FORUM Medizintechnik, TechnologyMountains, 11. Oktober 2018, Tuttlingen, Germany, p. 45, 2018 | BibTeX | RIS |
Frederico Lima, Almothana Albukhari, Rui Zhu, Ulrich Mescheder | Contactless Sleep Monitoring Measurement Setup | Eurosensors 2018: Graz, Austria, 9-12 September 2018, Proceedings, Volume 2, 2018 | BibTeX | RIS | DOI |
Frederico Lima, Almothana Albukhari, Rui Zhu, Ulrich Mescheder | Contactless Sleep Monitoring Measurement Setup | XXXII Eurosensors 2018, September 9-12, 2018, Graz, Austria, 2018 | BibTeX | RIS |
Frederico Lima, Ulrich Mescheder, C. Müller, Holger Reinecke | Copper electrodeposition on silicon electrodes | International Journal of Surface Science and Engineering, 12.2018(2), pp. 99-118, 2018 | BibTeX | RIS | DOI |
Andreas Heid, Marcio C. de Andrade, Rene von Metzen, Jürgen Giehl, Volker Bucher | Fabrication of a large area flexible active microelectrode array with more than 1000 recording electrodes | MEA Meeting 2018: 11th International Meeting on Substrate Integrated Microelectrode Arrays, Reutlingen, Germany, 4 Jul - 6 Jul, 2018, 2018 | BibTeX | RIS | DOI |
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Formation Mechanisms of Self-Organized Needles in Porous Silicon Based Needle-Like Surfaces | Journal of The Electrochemical Society, 165.2018(3), pp. E108-E114, 2018 | BibTeX | RIS | DOI | URN |
Felix Blendinger, Michael Metzger, Daniel Hähnel, Monika Fleischer, Volker Bucher | In situ Prozess-Visualisierung/Optimierung und Anwendung der Atomlagenabscheidung | WOMag, 7.2018(1-2), pp. 16-21, 2018 | BibTeX | RIS |
Frederico Lima, Ulrich Mescheder, Gabor L. Katona, Harald Leiste, Emre Özel, Claas Müller, Holger Reinecke | Influence of silicon doping type on the adhesion of seedless electrodeposited copper layers | Surface and Coatings Technology, 349.2018(September), pp. 208-216, 2018 | BibTeX | RIS | DOI |
Michael Metzger, Alexander Konrad, Felix Blendinger, Andreas Modler, Alfred J. Meixner, Volker Bucher, Marc Brecht | Low-Cost GRIN-Lens-Based Nephelometric Turbidity Sensing in the Range of 0.1–1000 NTU | Sensors, 18.2018(4), 2018 | BibTeX | RIS | DOI | URN |
Andreas Heid | Neuroflexarray - ein neues flexibles Mikroelektrodenarray durch Chip-in-Foil Technolgie | iNNOVATION FORUM Medizintechnik, TechnologyMountains, 11. Oktober 2018, Tuttlingen, Germany, p. 38, 2018 | BibTeX | RIS |
Ulrich Mescheder, Shervin Keshavarzi, Surjitsinh Chauhan | New concepts for miniaturized MEMS based power systems | IEEE CANDO-EPE 2018 proceedings : IEEE International Conference and Workshop in Óbuda on Electrical and Power Engineering : November 20-21, 2018, Budapest, Hungary, pp. 000033-000038, 2018 | BibTeX | RIS | DOI |
Annabelle Schofer, Markus Niemann, Volker Bucher | Reibung von Führungsdrähten und Kathederschläuchen - Recherche zur Technologie - Teil 2 | WOMag, 7.2018(5), 2018 | BibTeX | RIS |
Annabelle Schofer, Markus Niemann, Volker Bucher | Reibung von Führungsdrähten und Kathederschläuchen - Recherche zur Technologie - Teil 3 | WOMag, 7.2018(6), 2018 | BibTeX | RIS |
Annabelle Schofer, Markus Niemann, Volker Bucher | Reibung von Führungsdrähten und Kathederschläuchen - Recherche zur Technologie - Teil 4 | WOMag, 7.2018(7-8), 2018 | BibTeX | RIS |
Annabelle Schofer, Markus Niemann, Volker Bucher | Reibung von Führungsdrähten und Kathederschläuchen - Teil 1 | WOMag, 7.2018(4), 2018 | BibTeX | RIS |
Shervin Keshavarzi, Frederico Lima, Wolfgang Kronast, Ulrich Mescheder | Sequential Nano-Explosion Using Patterned Porous Silicon | Journal of Microelectromechanical Systems, 27.2018(2), pp. 250-258, 2018 | BibTeX | RIS | DOI |
Andras Kovacs, Ulrich Mescheder | Thin Photonic Crystals for Optical Characterization of Ultrathin Hafnium Dioxide in Mesoporous Layers | IEEE Sensors 2018, October 28 - 31, 2018, New Dehli, India, Conference Proceedings, 2018 | BibTeX | RIS | DOI |
Andras Kovacs, Shervin Keshavarzi, A. O. Perez, Stefan Palzer, Ulrich Mescheder | Tunable Light Source for Photoacoustic Sensing Applications | IEEE Sensors 2018, October 28 - 31, 2018, New Dehli, India, Conference Proceedings, 2018 | BibTeX | RIS | DOI |
Michael Engel, Denis Horn, Felix Blendinger, Michael Metzger, Markus Westerhausen, Volker Bucher | Wirtschaftliches Testverfahren zur Bestimmung der Wasserdampf-Durchlässigkeit von Kunststoff-Folien | Industrielle Automation, pp. 40-41, 2018 | BibTeX | RIS |
2017 | |||
Uma Muthiah, Isman M. Khazi, Ulrich Mescheder | 3D Strukturierung von Silizium mittels Grauwert-Technologie | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München, pp. 692-695, 2017 | BibTeX | RIS |
Shervin Keshavarzi, Wolfgang Kronast, Frederico Lima, Ulrich Mescheder | Controlled energy release based on explosive porous silicon | MEMS 2017: The 30th IEEE International Conference on Micro Electro Mechanical Systems, January 22 - 26, 2017, Las Vegas, USA, pp. 712-715, 2017 | BibTeX | RIS | DOI |
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Effect of Capillary Forces in Room Temperature Si-Si Direct Bonding Technique Using Velcrolike Surfaces | Journal of Microelectromechanical Systems, 26.2017(2), pp. 385-395, 2017 | BibTeX | RIS | DOI |
Frederico Lima, Alok Tungal, Isman M. Khazi, Ulrich Mescheder | Galvanisch aus 3D-Fotolack-Strukturen abgeformte metallische 3D-Freiformen | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München, pp. 375-378, 2017 | BibTeX | RIS |
Dirk Benyoucef, Vera Kallfaß, Andras Kovacs, Ulrich Mescheder, Stefan Palzer | Mikrosystemtechnische Geruchssensorik und ihre Anwendungen in AAL | Assistive Systeme und Technologien zur Förderung der Teilhabe für Menschen mit Hilfebedarf : Ergebnisse aus dem Projektverbund ZAFH-AAL, Pabst Science Publisher: Lengerich, pp. 51-66, 2017 | BibTeX | RIS |
Andreas Heid, Lukas Scheuble, Rene von Metzen, Volker Bucher | Prozess zum Transfer und zur Einbettung von kleinen Dies in ein flexibles Foliensystem bei niedrigen Temperaturen | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme; 23. – 25. Oktober 2017 in München, pp. 628-631, 2017 | BibTeX | RIS |
Andras Kovacs, Alexey Ivanov, Ulrich Mescheder | Schmalbandige photonische Kristalle für Multispektral-Analyse | MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München, pp. 836-839, 2017 | BibTeX | RIS |
2016 | |||
Andreas Heid, Marcio C. de Andrade, Rene P. von Metzen, Volker Bucher, Jürgen Giehl | A New Active Flexible High Resolution Micro Electrode Array | MEA Meeting 2016 | 10th International Meeting on Substrate-Integrated Electrode Arrays, Reutlingen, Germany, 28 Jun - 1 Jul, 2016, 2016 | BibTeX | RIS | DOI | URN |
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder | Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments | Procedia Engineering, Vol.168.2016, pp. 1180-1183, 2016 | BibTeX | RIS | DOI |
Rui Zhu, Ulrike Wallrabe, Matthias C. Wapler, Peter Woias, Ulrich Mescheder | Dielectric electroactive polymer membrane actuator with ring-type electrode as driving component of a tactile actuator | Procedia Engineering, pp. 1537-1540, 2016 | BibTeX | RIS | DOI |
Ulrich Mescheder, Alok Tungal, Frederico Lima | Electroplated 3D metal free forms casted from 3D photoresist molds | 42nd International Conference on Micro and Nano Engineering, September 19-23, 2016, Vienna, Austria, 2016 | BibTeX | RIS | DOI |
Andreas Heid, Rene P. von Metzen, Alfred Stett, Volker Bucher | Examination of dielectric strength of thin Parylene C films under various conditions | Current Directions in Biomedical Engineering, 2.2016(1), pp. 39-41, 2016 | BibTeX | RIS | DOI | URN |
Michael Banghard, Romy Hartmann, Kamel Silmy, Wilfried Nisch, Rene P. von Metzen, Alfred Stett, Volker Bucher | High voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments | Microelectronic Engineering, Vol.153.2016, pp. 126-131, 2016 | BibTeX | RIS | DOI |
Victor V. Lyubimov, Vladimir M. Volgin, Ulrich Mescheder, Inna V. Gnidina, Alexey Ivanov | Investigation of plastic electrode tools for electrochemical machining of silicon | Precision Engineering, Vol.47.2016, pp. 546-556, 2016 | BibTeX | RIS | DOI |
Michael Metzger, Vanessa Schenk, Alexander Konrad, Jan Brunner, Victoria Radun, Sabrina Hajek, Alfred J. Meixner, Andreas Modler, Dieter Stoll, Volker Bucher, Marc Brecht | Kompakter optischer Hybridsensor für Brechungsindexmessungen | WOMag, 5.2016(4), 2016 | BibTeX | RIS |
Vera Rech, Ramona Draxler, Volker Bucher, Boris Hofmann | Neurotransmitterdetektion in vivo – Anwendung elektrochemischer Messverfahren | WOMag, 5.2016(1-2), p. 19, 2016 | BibTeX | RIS |
Vera Rech, Ramona Draxler, Volker Bucher, Boris Hofmann | Neurotransmitterdetektion in vivo – Anwendung elektrochemischer Messverfahren: Teil 2 | WOMag, 5.2016(3), p. 11, 2016 | BibTeX | RIS |
Vera Rech, Ramona Draxler, Volker Bucher, Boris Hofmann | Neurotransmitterdetektion in vivo – Anwendung elektrochemischer Messverfahren: Teil 3 | WOMag, 5.2016(4), p. 15, 2016 | BibTeX | RIS |
Vera Rech, Ramona Draxler, Volker Bucher, Boris Hofmann | Neurotransmitterdetektion in vivo – Anwendung elektrochemischer Messverfahren: Teil 4 | WOMag, 5.2016(6), p. 13, 2016 | BibTeX | RIS |
Alvaro O. Pérez, Vera Kallfaß-de Frenes, Alexander Filbert, Janosch Kneer, Benedikt Bierer, Pirmin Held, Philipp Klein, Jürgen Wöllenstein, Dirk Benyoucef, Sigrid Kallfaß, Ulrich Mescheder, Stefan Palzer | Odor-Sensing System to Support Social Participation of People Suffering from Incontinence | Sensors, 17.2017(1), 2016 | BibTeX | RIS | DOI | URN |
Johannes Maisch, Farhad Jafarli, Thomas Chassé, Felix Blendinger, Alexander Konrad, Michael Metzger, Alfred J. Meixner, Marc Brecht, L. Dähne, Hermann A. Mayer | One-pot synthesis of micron partly hollow anisotropic dumbbell shaped silica core–shell particles | Chemical Communications: ChemComm, 52.2016(100), pp. 14392-14395, 2016 | BibTeX | RIS |
Andras Kovacs, Ulrich Mescheder | PSi-based Diffusion Membranes | Porous Silicon: Biomedical and Sensor Applications, Volume Two, Ghenadii Korotcenkov (Ed.)CRC Press: Boca Raton, pp. 279-298, 2016 | BibTeX | RIS |
Michael Banghard, Christian Freudigmann, Kamel Silmy, Alfred Stett, Volker Bucher | Plasma treatment on novel carbon fiber reinforced PEEK cages to enhance bioactivity | Current Directions in Biomedical Engineering, 2.2016(1), pp. 569-572, 2016 | BibTeX | RIS | DOI | URN |
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Room Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces | Journal of Microelectromechanical Systems, 25.2016(2), pp. 371-379, 2016 | BibTeX | RIS | DOI |
Alexey Ivanov, Ulrich Mescheder | Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices | Porous Silicon: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three, Ghenadii Korotcenkov (Ed.)CRC Press: Boca Raton, pp. 129-141, 2016 | BibTeX | RIS |
2015 | |||
Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Bernhard Müller, Alexey Ivanov | Adaptiver optischer Filter bzw. spektral einstellbare Lichtquelle | 2015 | BibTeX | RIS |
Frederico Lima, Holger Reinecke, Ulrich Mescheder | Adhesion of Continuous and Homogeneous Electrodeposited Copper Layers on Silicon | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 409-412, 2015 | BibTeX | RIS |
Christine Härtel, Dorothee Maier, Astrid Wagner, Volker Bucher | Atmosphärendruckplasma in der Medizintechnik Teil 2 | WOMag, 4.2015(1-2), p. 26, 2015 | BibTeX | RIS |
Christine Härtel, Dorothee Maier, Astrid Wagner, Volker Bucher | Atmosphärendruckplasma in der Medizintechnik Teil 3 | WOMag, 4.2015(3), p. 18, 2015 | BibTeX | RIS |
Christine Härtel, Dorothee Maier, Astrid Wagner, Volker Bucher | Atmosphärendruckplasma in der Medizintechnik Teil 4 | WOMag, 4.2015(4), p. 21, 2015 | BibTeX | RIS |
Christine Härtel, Dorothee Maier, Astrid Wagner, Volker Bucher | Atmosphärendruckplasma in der Medizintechnik Teil 5 | WOMag, 4.2015(5), p. 18, 2015 | BibTeX | RIS |
Christine Härtel, Dorothee Maier, Astrid Wagner, Volker Bucher | Atmosphärendruckplasma in der Medizintechnik Teil 6 | WOMag, 4.2015(6), p. 12, 2015 | BibTeX | RIS |
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Bonding Mechanism in the Velcro Concept Si-Si Low Temperature Direct Bonding Technique | 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, 2015, pp. 413-416, 2015 | BibTeX | RIS | DOI |
Isman M. Khazi, Ulrich Mescheder, Zohaib Siddiqui | Characterization of the influence of Sodium-Lauryl-Sulfate on the surface quality of electrodeposited Nickel-Cobalt alloys | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 436-439, 2015 | BibTeX | RIS |
Ulrich Mescheder, Isman M. Khazi | Corner rounding of sharp silicon punching tool edges by local oxidation of silicon | Microelectronic Engineering, 141.2015(2), pp. 178-183, 2015 | BibTeX | RIS | DOI |
Victoria Radun, Rene P. von Metzen, T. Stieglitz, Volker Bucher, Alfred Stett | Evaluation of adhesion promoters for Parylene C on gold metallization | Current Directions in Biomedical Engineering, 01.2015(1), pp. 493-497, 2015 | BibTeX | RIS | DOI | URN |
Michael Banghard, Kamel Silmy, Rene P. von Metzen, Volker Bucher | Korrosionsschutz von Edelstahl mit neuartigem Schichtdesign | WOMag, 4.2015(12), pp. 19-19, 2015 | BibTeX | RIS |
Paul Walden, Janosch Kneer, Stefan Knobelspies, Wolfgang Kronast, Ulrich Mescheder, Stefan Palzer | Micromachined Hotplate Platform for the Investigation of Ink-Jet Printed, Functionalized Metal Oxide Nanoparticles | Journal of Microelectromechanical Systems, 24.2015(5), pp. 1384-1390, 2015 | BibTeX | RIS | DOI |
Wolfgang Kronast, Volker Lange, Rolf Huster, Ulrich Mescheder | Optische Charakterisierung von Stress-relaxierten aktiven MOEMS-Membranspiegeln mit großer Apertur | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 523-526, 2015 | BibTeX | RIS |
Alexey Ivanov, Ulrich Mescheder | Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening | Proceedings of the 2015 COMSOL Conference, Grenoble, 2015 | BibTeX | RIS |
Andras Kovacs, Alexey Ivanov, Ulrich Mescheder | Refractometer Using Photonic Crystals for Fermentation Process Characterization | IEEE SENSORS, Busan, 2015, pp. 1363-1366, 2015 | BibTeX | RIS | DOI |
Isman M. Khazi, Ulrich Mescheder | Self-aligning micro punch-die tool-system for high precision blanking of thin metal foils | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 429-432, 2015 | BibTeX | RIS |
Surjitsinh Chauhan, Bernhard Müller, Ulrich Mescheder | Simulation, Fabrication and Characterization of Robust Vibrational Energy Harvester | Procedia Engineering, pp. 349-354, 2015 | BibTeX | RIS | DOI |
Isman M. Khazi, Ulrich Mescheder | Surface polishing of rough (110) silicon plane by HNA etching resulting from wet anisotropic KOH etching | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 417-420, 2015 | BibTeX | RIS |
Andras Kovacs, Philipp Maurer, Ulrich Mescheder | Temperatureinfluss auf die Peakposition bei verschiedenen Umgebungsmedien in Porösen Silizium Multilayerschichten | MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 547-550, 2015 | BibTeX | RIS |
Andras Kovacs, Alexey Ivanov, Ulrich Mescheder | Tunable Narrow Band Porous Photonic Crystals for MOEMS Based Scanning Systems | Procedia Engineering, pp. 811-815, 2015 | BibTeX | RIS | DOI |
Astrid Wagner, Dagmar Martin, Volker Bucher | Untersuchung des Einflusses der Reinigung und Oberflächenvorbehandlung von Edelstahloberflächen auf die Haftung von Silikonspritzgussmassen | WOMag, 4.2015(6), p. 16, 2015 | BibTeX | RIS |
2014 | |||
Rene P. von Metzen, Wilfried Nisch, Michael Weinmann, Volker Bucher, Alireza Gharabaghi, Saravanan Subramaniam, Thilo Krueger, Rainer Mohrlock, Karl-Heinz Boven, Alfred Stett | A Flexible, Wireless Intracranial ECoG Recording System - Incrimp | Biomedizinische Technik / Biomedical Engineering, 59.2014(S1 Track P), pp. 1057-1059, 2014 | BibTeX | RIS | DOI |
Rui Zhu, Ulrich Mescheder, Frederico Lima | Actuation concept for miniaturized tactile systems | 1. Baden-Württemberg Center of Applied Research Symposium on Information and Communication Systems: SInCom 2014; 12. December 2014 in Furtwangen, pp. 44-49, 2014 | BibTeX | RIS |
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Characterisation and simulation of low temperature Si-Si direct bonding through velcro-like surfaces based on porous silicon | MEMS 2014: The 27th IEEE International Conference on Micro Electro Mechanical Systems, January 26-30, 2014, San Francisco, pp. 1119-1122, 2014 | BibTeX | RIS | DOI |
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster | Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology | Journal of Micro/Nanolithography, MEMS, and MOEMS, 13.2014(1), 2014 | BibTeX | RIS | DOI |
Frederico Lima, Ulrich Mescheder, Holger Reinecke | Electrochemical Impedance Spectroscopy of n-Si(100) Pre-etched by KOH or BHF | 10th International Symposium on Electrochemical Impedance Analysis, June 1-5, 2014, Borovets, Bulgaria, 2014 | BibTeX | RIS |
Alexey Ivanov, Ulrich Mescheder, Peter Woias | Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process | ECS Transactions, 58.2014(46), pp. 15-24, 2014 | BibTeX | RIS |
Ulrich Mescheder | Forschungsgebiet Mikrosystemtechnik im Forschungsschwerpunkt Smart Systems | Forschungsreport ... für die Elektrotechnik in Baden-Württemberg, pp. 48-51, 2014 | BibTeX | RIS |
Alfred Stett, Gordon Link, Rene P. von Metzen, Volker Bucher, Martin Stelzle, Andreas Pojtinger, Katharina Schneider, Dieter Mintenbeck, Daniel Rossbach, Harald Richter, Moustafa Nawito, Karl-Heinz Boven, Andreas Möller, Christoph Jeschke, Jens Pätzold, Thorsten Göttsche, Oliver Bludau, Nora Haas, Dana Tompkins, Timo Lebold, Martin Kokelmann | Implantable Electrochemical Biosensor Capsule | Biomedizinische Technik / Biomedical Engineering, 59.2014(S1 Track P), p. 1051, 2014 | BibTeX | RIS | DOI |
Ulrich Mescheder, Isman M. Khazi, Andras Kovacs, Alexey Ivanov | MOEMS based concept for miniaturized monochromators, spectrometers and tunable light sources | 1. Baden-Württemberg Center of Applied Research Symposium on Information and Communication Systems: SInCom 2014; 12. December 2014 in Furtwangen, pp. 38-43, 2014 | BibTeX | RIS |
Frederico Lima, Ulrich Mescheder, Holger Reinecke | Maskless Selective Electrodeposition on Silicon | The 65th Annual Meeting of the International Society of Electrochemistry: Ubiquitous Electrochemistry; 31 August-5 September 2014, Lausanne, Switzerland, 2014 | BibTeX | RIS |
Laszlo Becsi, Thomas Bier, Wolfgang Kronast, Ulrich Mescheder, Dirk Benyoucef | Miniaturisiertes Impulslärm-Dosimeter zur Untersuchung und Vermeidung von Gehörschädigungen bei Menschen | SENSOREN UND MESSSYSTEME: 17. ITG/GMA-Fachtagung, 3.-4. Juni 2014, Nürnberg, Convention Center, 2014 | BibTeX | RIS |
Nigol Kaste, Alexander Filbert, Ulrich Mescheder, Toomas Rang, Galina Rang | Process Development For 3D Laser Lithography | WIT Transactions on The Built Environment, Vol.137.2014, pp. 139-150, 2014 | BibTeX | RIS | DOI | URN |
Ulrich Mescheder, Isman M. Khazi, Andras Kovacs, Alexey Ivanov | Tunable optical filters with wide wavelength range based on porous multilayers | Nanoscale Research Letters, p. 427, 2014 | BibTeX | RIS | DOI | URN |
Volker Bucher | Wohin geht für die Medizintechnik die Reise? | WOMag, 3.2014(5), pp. 10-12, 2014 | BibTeX | RIS |
2013 | |||
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller | Developement of stress relief suspensions for micro-machined silicon membranes | COMSOL Conference 2013, 23–25 October 2013, Rotterdam, Netherlands, 2013 | BibTeX | RIS |
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster | Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology | Proceedings of SPIE: Volume 8616; MOEMS and Miniaturized Systems XII, 2-6 Februar 2013, San Francisco, California, United States, 2013 | BibTeX | RIS | DOI |
Andras Kovacs, Aina Malisauskaite, Ulrich Mescheder | Einfluss der Morphologie auf die Sensitivität eines photonischen Biosensors | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 818-821, 2013 | BibTeX | RIS |
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster | Entwicklung einer Stressausgleichsstruktur für spannungsarme aktive Membranspiegel in SOI Technologie | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 432-435, 2013 | BibTeX | RIS |
Laszlo Becsi, Dirk Benyoucef, Thomas Bier, Wolfgang Kronast, Ulrich Mescheder | Entwicklung eines Impulslärm-Dosimeters zur Untersuchung von Gehörschädigungen bei Menschen | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 578-581, 2013 | BibTeX | RIS |
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke | Modeling the adhesion between nanoneedle surfaces bonded based on Velcro or Gecko principle | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 864-867, 2013 | BibTeX | RIS |
Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder, Rainer Wittig | Optical sensing and analysis system based on porous layers | 17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS), 27-31 October 2013, Freiburg, Germany, pp. 275-277, 2013 | BibTeX | RIS |
Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder | Portable Optical Sensor Using Tunable Optical Multilayers | Sensors 2013, November 4-6, 2013, Baltimore, Maryland, USA: IEEE; Proceedings, pp. 1691-1694, 2013 | BibTeX | RIS | DOI |
Ulrich Mescheder, Qingyun Gu, Bernhard Müller | Preiswerter und robuster Harvester für Vibrationsenergie | Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 107-110, 2013 | BibTeX | RIS |
Rui Zhu, Aina Malisauskaite, Ulrich Mescheder, Ulrike Wallrabe | Proof of Concept and Properties of Micro Hydraulic Displacement Amplifier | COMSOL Conference 2013, 23–25 October 2013, Rotterdam, Netherlands, 2013 | BibTeX | RIS |
Andras Kovacs, Wolfgang Kronast, Alexander Filbert, Ulrich Mescheder | Transport in Surface Passivated Porous Silicon Membranes | ECS Transactions, 50.2013(37), pp. 207-216, 2013 | BibTeX | RIS |
2012 | |||
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke, Andras Kovacs | Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration | 23rd Micromechanics and Microsystems Europe Workshop: MME 2012, September 9 - 12, Ilmenau, Germany, 2012 | BibTeX | RIS |
Alexey Ivanov, Ulrich Mescheder | Dynamic Simulation of Electrochemical Etching of Silicon with COMSOL | Proceedings COMSOL Conference, Milan, Italy, 10.-12.10.2012, 2012 | BibTeX | RIS |
S. Hildering, Laszlo Becsi, U. Engel, M. Merklein, Ulrich Mescheder | Experimental investigations on high-precision microcutting of copper foils with microfabricated silicon punches | Proceedings of the 12th international conference of the european society for precision engineering and nanotechnology, June 4th - 7th 2012, Stockholm, Sweden, Volume II, pp. 177-180, 2012 | BibTeX | RIS |
Michael Weinmann, Wilfried Nisch, Alfred Stett, Volker Bucher | Flexible Verkapselungsschichten für elektrisch aktive Mikroimplantate | Jahrbuch der Oberflächentechnik, pp. 317-325, 2012 | BibTeX | RIS |
Michael Weinmann, Wilfried Nisch, Alfred Stett, Volker Bucher | Langzeitstabile Verkapselungsschichten mit integriertem Feuchtesensor für aktive Mikroimplantate | WOMag, 1.2012(12), pp. 22-23, 2012 | BibTeX | RIS |
Volker Bucher | Mechatronik: Medizintechnik an den Grenzen des Möglichen; Blinde sehen, Lahme gehen | Medizin & Technik, p. 54, 2012 | BibTeX | RIS |
Ulrich Mescheder, Antwi Nimo, Bernhard Müller, Awad S. Abou Elkeir | Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy | Microsystem Technologies, 18.2012(7-8), pp. 931-943, 2012 | BibTeX | RIS | DOI |
Thomas Bruns, Laszlo Becsi, Ulrich Mescheder, Herbert Schneckenburger | Microfluidic system for single cell sorting based on deflection by optical tweezers | Focus on Microscopy 2012, Singapore, April 1 - April 4, 2012, 2012 | BibTeX | RIS |
Volker Bucher | NMI Reutlingen - anwendungsoptimierte Oberflächen für die Medizintechnik | Galvanotechnik, 103.2012(2), pp. 316-319, 2012 | BibTeX | RIS |
Andras Kovacs, Alexey Ivanov, Aina Malisauskaite, Ulrich Mescheder | Oberflächenstabilisierung nanostrukturierter poröser Siliziumschichten für sensorische Anwendungen | 74. Mikro-Nano-Integration : Beiträge des 4. GMM-Workshops, 12. - 13. November 2012 in Berlin, 2012 | BibTeX | RIS |
Frederico Lima, Ulrich Mescheder, Holger Reinecke | Simulation of Current Density for Electroplating on Silicon Using a Hull Cell | Proceedings COMSOL Conference, Milan, Italy, 10.-12.10.2012, 2012 | BibTeX | RIS |
S. Hildering, Laszlo Becsi, M. Merklein, Ulrich Mescheder | Tranciatura ad alta precisione con punzoni in silicio | Lamiera, pp. 44-48, 2012 | BibTeX | RIS |
Andras Kovacs, Ulrich Mescheder | Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications | Sensors and Actuators B: Chemical, 175.2012(December), pp. 179-185, 2012 | BibTeX | RIS | DOI |
2011 | |||
Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad S. Abou Elkeir | 3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls | Proceedings of SPIE: Volume 8066; Smart Sensors, Actuators, and MEMS V, 18-20 April 2011, Prague, Czech Republic, 2011 | BibTeX | RIS | DOI |
Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad S. Abou Elkeir | A device for 3D energy harvesting | SPIE Newsroom, 2011 | BibTeX | RIS | DOI |
Andras Kovacs, Ulrich Mescheder | Herstellung und Charakterisierung perforierter und poröser Membranmodulen für Mikro- und Nanofiltration | MikroSystemTechnik - Kongress 2011: 10. - 12. Oktober 2011, Darmstadt, 2011 | BibTeX | RIS |
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder | High quality 3D shapes by silicon anodization | physica status solidi (a), 208.2011(6), pp. 1383-1388, 2011 | BibTeX | RIS | DOI |
Volker Lange, Frederico Lima, Dietrich Kühlke | Multicolour LED in luminescence sensing application | Sensors and Actuators A: Physical, 169.2011(1), pp. 43-48, 2011 | BibTeX | RIS | DOI |
Prasad Jonnalagadda, Ulrich Mescheder, Andras Kovacs, Antwi Nimo | Nanoneedles based on porous silicon for chip bonding with self assembly capability | physica status solidi (c), 8.2011(6: Special Issue: 7th International Conference on Porous Semiconductors – Science and Technology (PSST 2010) • EnFI 2010 Conference – Engineering of Functional Interfaces), pp. 1841-1846, 2011 | BibTeX | RIS | DOI |
Ting Yuan, Ulrich Mescheder, Wolfgang Kronast, Changlong Wang | Optimization of Deformation Shape of an Active Electro-Optical Focusing Device | Advanced Materials Research, pp. 3116-3120, 2011 | BibTeX | RIS | DOI |
Andras Kovacs, Prasad Jonnalagadda, Ulrich Mescheder | Optoelectrical detection system using porous silicon-based optical multilayers | IEEE Sensors Journal, 11.2011(10), pp. 2413-2420, 2011 | BibTeX | RIS | DOI |
Alexey Ivanov, Ulrich Mescheder | Silicon Electrochemical Etching for 3D Microforms with High Quality Surfaces | Advanced Materials Research, Vol.325.2011, pp. 666-671, 2011 | BibTeX | RIS | DOI |
2010 | |||
Antwi Nimo, Ulrich Mescheder | 3-D capacitive vibrational harvester for autonomous low power sensors | Proceedings of PowerMEMS 2010, Nov 30-Dec 3, Leuven, Belgium, pp. 49-52, 2010 | BibTeX | RIS |
Volker Bucher, Wilfried Nisch | Beschichtungen für Life Science: Vakuumbeschichtungstechnik und Plasmabehandlung von Mikrosystemen in Medizintechnik, Pharmaforschung und Biologie | Vakuum in Forschung und Praxis, 22.2010(1), pp. 14-24, 2010 | BibTeX | RIS | DOI |
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Antwi Nimo, Claus Braxmaier, Thilo Schuldt | Development of a tilt actuated micromirror for applications in laser interferometry | Proceedings of SPIE: Volume 7594; SPIE MOEMS-MEMS, 2010, San Francisco, California, United States, 2010 | BibTeX | RIS | DOI |
Awad Saad, Ulrich Mescheder, Bernhard Müller, Antwi Nimo | High eficient, low cost electret charging set-up for mems based energy harvesting systems | Proceedings of PowerMEMS 2010, Nov 30-Dec 3, Leuven, Belgium, pp. 61-64, 2010 | BibTeX | RIS |
Thomas Bruns, Laszlo Becsi, Marc Talkenberg, Michael Wagner, Petra Weber, Ulrich Mescheder, Herbert Schneckenburger | Microfluidic system for single cell sorting with optical tweezers | Proceedings of SPIE: Volume 7376; Laser Applications in Life Sciences 2010, Oulu, Finland, 2010 | BibTeX | RIS | DOI |
Frederico Lima, Volker Lange, Sergey Borisov, Dietrich Kühlke | Multicolor LED-based temperature and O2-pressure sensor | Proceedings of SPIE: Volume 7726; Optical Sensing and Detection, 12–15 April 2010, Brussels, Belgium, 2010 | BibTeX | RIS | DOI |
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder | Nasschemisches Ätzen von nahezu beliebigen 3D-Strukturen in Silizium | 63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany, 2010 | BibTeX | RIS |
Ulrich Mescheder, Prasad Jonnalagadda, Andras Kovacs, X. Meng | Optischer Biosensor mittels selbstorganisierter nanostrukturierte Multilayerschichten | 63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany, pp. 105-110, 2010 | BibTeX | RIS |
Andras Kovacs, Ulrich Mescheder, Prasad Jonnalagadda, X. Meng | Optisches Messsystem für biosensorische Anwendungen | Sensoren und Messsysteme 2010 : Vorträge der 15. ITG-GMA-Fachtagung vom 18. bis 19. Mai 2010 in Nürnberg, 2010 | BibTeX | RIS |
Volker Bucher | Plasmaunterstützte chemische Dampfphasenabscheidung | Vakuum, Plasma, Technologien Teil I, Gerhard Blasek, Günter Bräuer (Eds.)Leuze: Bad Saulgau, pp. 322-355, 2010 | BibTeX | RIS |
Volker Bucher | Substratwerkstoffe für die dekorative vakuumtechnische Beschichtung | Vakuum, Plasma, Technologien Teil II, Gerhard Blasek, Günter Bräuer (Eds.)Leuze: Bad Saulgau, pp. 1041-1043, 2010 | BibTeX | RIS |
Simon Ressel, Martin Gohlke, Dominik Rauen, Thilo Schuldt, Wolfgang Kronast, Ulrich Mescheder, Ulrich Johann, Dennis Weise, Claus Braxmaier | Ultrastable assembly and integration technology for ground- and space-based optical systems | Applied Optics, 49.2010(22), pp. 4296-4303, 2010 | BibTeX | RIS |
2009 | |||
Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich Mescheder | Characterization of porous silicon based optical sensor system for biosensor applications | IEEE Sensors 2009 Conference, New Zealand, 25-28 October, 2009, Christchurch, New Zealand, pp. 21-26, 2009 | BibTeX | RIS | DOI |
Herbert Schneckenburger, Rainer Börret, Claus Braxmaier, Rudolf Kessler, Petra Kioschis, Dietrich Kühlke, Ulrich Mescheder, Werner Schröder, Christoph Nachtigall | Dem Energiestoffwechsel von Tumorzellen und Bioreagenzien auf der Spur | BioPhotonik, pp. 26-28, 2009 | BibTeX | RIS |
Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich Mescheder | Entwicklung und Charakterisierung von photonischen Multischichten aus porösem Silizium für biosensorische Anwendungen | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
Andras Kovacs, Dirk Meister, Ulrich Mescheder | Investigation of humidity adsorption in porous silicon layers | physica status solidi (a), 206.2009(6), pp. 1343-1347, 2009 | BibTeX | RIS | DOI |
Ulrich Mescheder, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Christoph Ament, Andreas Peter | Mikrostrukturierter Sensorarray zur Luftqualitätsmessung (MOSEL) | Dokumentation zum Forschungstag 2009 "Hochtechnologieforschung": 7. Juli 2009, Kultur- und Kongresszentrum, Liederhalle Stuttgart, p. 169, 2009 | BibTeX | RIS |
Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo | Nanostrukturierte Siliziumoberflächen für Mikro-Nano-Integration | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder, S. Kuhn, M. Kübler, A. Burr | Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
Ulrich Mescheder, Bernhard Müller, Safi Baborie, P. Urbanovic | Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems | Journal of Micromechanics and Microengineering, 19.2009(9), 2009 | BibTeX | RIS | DOI |
Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo | Selbstjustierendes Bondverfahren unter Verwendung nanostrukturierter Oberflächen | 2009 | BibTeX | RIS |
Wolfgang Kronast, Ulrich Mescheder, Rolf Huster | Stressuntersuchung und Optimierung von SOI basierten Membranen | MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009 | BibTeX | RIS |
2008 | |||
Ulrich Mescheder, P. Urbanovic, Bernhard Müller, Safi Baborie | Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems | Proceedings of PowerMEMS 2008 + microEMS2008, Sendai, Japan, November 9-12, (2008), pp. 501-504, 2008 | BibTeX | RIS |
Adam Kovacs, Andras Kovacs, Ulrich Mescheder | Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations | Computational Materials Science, 43.2008(1), pp. 59-64, 2008 | BibTeX | RIS | DOI |
Alexey Ivanov, Ulrich Mescheder, M. Kröner, Peter Woias | Formation of Arbitrarily Shaped 3D-Forms in Silicon by 315 Electrochemical Wet-Etching | Technical digest / MME 2008, 19th MicroMechanics Europe Workshop, September 28 - 30, 2008, Aachen, Germany, pp. 315-318, 2008 | BibTeX | RIS |
HFU Forscher top | VS Campus: Magazin der Hochschule Furtwangen für Villingen-Schwenningen und Furtwangen, pp. 7-18, 2008 | BibTeX | RIS | |
Volker Bucher, Diethard Kapp-Schwoerer | Mikrostrukturierte Diamond-Like-Carbon-Schichten (DLC) in Kombination mit Galvanikschichten | Galvanotechnik, 99.2008(10), pp. 2566-2570, 2008 | BibTeX | RIS |
T. Hellmuth, Konstantin Khrennikov, Wolfgang Kronast, Rolf Huster, Ulrich Mescheder | Optimisation and characterisation of parabolic membrane mirrors | Proceeedings of SPIE: Volume 6993; MEMS, MOEMS, and Micromachining III, 9–10 April 2008, Strasbourg, France, 2008 | BibTeX | RIS | DOI |
Volker Bucher | Plasma-Beschichtungen für die Medizin-Technik und den Life-Science-Bereich | Jahrbuch der Oberflächentechnik, Leuze: Bad Saulgau, 2008 | BibTeX | RIS |
Volker Bucher, Diethard Kapp-Schwoerer | Plasmabeschichtung in der Mikrotechnik | Mikroproduktion, pp. 24-27, 2008 | BibTeX | RIS |
2007 | |||
Daniela Kögler, Rolf Huster, Wolfgang Kronast, Ulrich Mescheder | Aufbau- und Verbindungstechnik für ein mikrooptisches System | Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007 | BibTeX | RIS |
Alexey Ivanov, Ulrich Mescheder, Andras Kovacs, Rolf Huster | Einfluss unterschiedlicher Passivierungsschichten auf die Bildungsrate von porösem Silizium an Strukturkanten bei der 3DFormherstellung | Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007 | BibTeX | RIS |
Ulrich Mescheder, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Andreas Peter, Christoph Ament, Sven Rademacher, Jürgen Wöllenstein | MEMS-Based Air Quality Sensor | Transducers '07 Eurosensors XXI : digest of technical papers ; the 14th International Conference on Solid-State Sensors, Actuators and Microsystems, June 10-14, 2007, Lyon, France, pp. 1417-1420, 2007 | BibTeX | RIS | DOI |
Andras Kovacs, Adam Kovacs, M. Pogany, Ulrich Mescheder | Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications | Sensors and Actuators B: Chemical, 127.2007(1), pp. 120-125, 2007 | BibTeX | RIS | DOI |
Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Jutaphorn Kritwattanakhorn, Andras Kovacs, Bernhard Müller, Ulrich Mescheder | Modellbasierte Verfahren zur Bestimmung der Luftgüte | Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007 | BibTeX | RIS |
Volker Bucher | Novel Decorative Color Coatings Using Plasma Deposition | Vakuum in Forschung und Praxis, 19.2007(Supplement S1), pp. 7-11, 2007 | BibTeX | RIS | DOI |
Ulrich Mescheder, Rolf Huster, Wolfgang Kronast, Thomas Hellmuth, Konstantin Khrennikov | Optimierung und Charakterisierung eines Membranspiegels zur dynamischen Fokussierung | Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007 | BibTeX | RIS |
Jutaphorn Kritwattanakhorn, Marie-Luise Bauersfeld, Andras Kovacs, Bernhard Müller, Ulrich Mescheder, Sven Rademacher, Jürgen Wöllenstein | Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems | Sensors and Actuators B: Chemical, 127.2007(1), pp. 126-131, 2007 | BibTeX | RIS | DOI |
Andras Kovacs, Bernhard Müller, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Andreas Peter, Christoph Ament, Jürgen Wöllenstein, Marie-Luise Bauersfeld, Sven Rademacher | Sensor system for air quality measurement | Smart system integration 2007 : Paris, France 27. - 28.03.2007, pp. 519-522, 2007 | BibTeX | RIS |
2006 | |||
Rolf Huster, Andras Kovacs, Ulrich Mescheder | 3-D Micro Free-Form Manufacturing in Silicon: Micro Free- Form Production for Plastics Moulding Technology | Galvanotechnik, 97.2006(2), pp. 442-447, 2006 | BibTeX | RIS |
Ulrich Mescheder, Zoltan Torok, Wolfgang Kronast | Active focusing device based on MOEMS technology | Proceedings of SPIE: Volume 8168; MEMS, MOEMS, and Micromachining II, 2006, Strasbourg, France, 2006 | BibTeX | RIS |
Volker Bucher | DLC-Schichten als Ersatz für Chromschichten | Galvanotechnik, 97.2006(4), p. 814, 2006 | BibTeX | RIS |
Ulrich Mescheder, Carlos Estan, Gergoe Somogyi, Markus Freudenreich | Distortion optimized focusing mirror device with large aperture | Sensors and Actuators A: Physical, 130-131/2006(August), pp. 20-27, 2006 | BibTeX | RIS | DOI |
Adam Kovacs, Zsolt Vizvary, Andras Kovacs, Ulrich Mescheder | Large Defection Analysis of Perforated Silicon Nitride Membranes | 6th European Solid Mechanics Conference: ESMC 2006; 28 August – 1 September, 2006 Budapest, Hungary, 2006 | BibTeX | RIS |
Volker Bucher | Neuartige dekorative Farbschichten durch Plasma-Beschichtung | Vakuum in Forschung und Praxis, 18.2006(2), pp. 27-31, 2006 | BibTeX | RIS | DOI |
Jutaphorn Kritwattanakhorn, Andras Kovacs, Ulrich Mescheder, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein | Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems | XX Eurosensors: 20th Anniversary; Göteborg, Sweden, 17-20 September 2006, pp. 376-377, 2006 | BibTeX | RIS |
Andras Kovacs, M. Pogany, Ulrich Mescheder, Adam Kovacs | Realization and mechanical investigation of perforated and porous membranes for filter applications | XX Eurosensors: 20th Anniversary; Göteborg, Sweden, 17-20 September 2006, pp. 392-393, 2006 | BibTeX | RIS |
2005 | |||
Christoph Ament, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Bernhard Müller | "Single chip"-Sensorarray zu Luftqualitätsmessung | Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg, 2005 | BibTeX | RIS |
Rolf Huster, Andras Kovacs, Ulrich Mescheder | 3-D Micro Free-Form Manufacturing in Silicon Micro-Free- Form Production for Plastics Moulding Technology | Micro system technologies 2005 : International Conference & Exhibition on Micro-, Electro-Mechanical, Opto & Nano Systems, München, October 5 - 6, 2005, 2005 | BibTeX | RIS |
Ulrich Mescheder, Andras Kovacs | 3D-Mikrostrukturierungsverfahren: von kristallinem Silizium mit lokal einstellbarem Anisotropiefaktor | MikroSystemTechnik, pp. 7-9, 2005 | BibTeX | RIS |
Ulrich Mescheder, Markus Freudenreich | Charakterisierung eines bi-stabilen Schalters mit großem Schaltweg und einstellbaren Haltekräften | Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg, 2005 | BibTeX | RIS |
Ulrich Mescheder, Carlos Estan, Gergoe Somogyi, Markus Freudenreich | MOEMS focusing device with ideal parabolic deflection shape | Transducers '05 : Seoul, Korea, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, pp. 1000-1005, 2005 | BibTeX | RIS | DOI |
Ulrich Mescheder, Gergoe Somogyi, Markus Freudenreich, Carlos Estan | Mikrotechnisch hergestellter Membranspiegel für aktive Fokussierung | Horizonte, pp. 16-20, 2005 | BibTeX | RIS |
Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Ulrich Mescheder | Neuartiger Mikrosensor zur Luftgütemessung mit kombiniertem Feuchte- und Gassensor | 50. Internationales Wissenschaftliches Kolloquium, Technische Universität Ilmenau, 19.-23. September 2005, pp. 273-274, 2005 | BibTeX | RIS |
Ulrich Mescheder, Andras Kovacs, Roland Schneider | Optische Penmaus mit Bluetooth | Horizonte, pp. 8-11, 2005 | BibTeX | RIS |
2004 | |||
Mark Herding, Gergoe Somogyi, Ulrich Mescheder, Peter Woias | A new micromachined optical fiber switch for instrumentation purposes | Proceedings of SPIE: Volume 5455; MEMS, MOEMS, and Micromachining, Photonics Europe, 26-30 April 2004, Strasbourg, France, 2004 | BibTeX | RIS |
Wolfgang Kronast, Aritz J. Laskurain, Ulrich Mescheder | Das Rasterkraftmikroskop (AFM) zur Charakterisierung und Strukturierung im Nanometerbereich | Horizonte, pp. 3-8, 2004 | BibTeX | RIS |
Ulrich Mescheder | Mikrosystemtechnik : Konzepte und Anwendungen | Vieweg + Teubner: Stuttgart, 978-3-519-16256-8, 2004 | BibTeX | RIS |
Christoph Nachtigall, Ulrich Mescheder | Movement giver having body with after-glowing surface | 2004 | BibTeX | RIS |
Ulrich Mescheder | Nanoporous Silicon: Multifunctional Material for Microsystems | Novel vehicle concepts and emerging vehicle technologies : papers presented at the RTO Applied Vehicle Technology Panel (AVT) symposium held in Brussels, Belgium, 7 - 10 April 2003, 2004 | BibTeX | RIS |
Ulrich Mescheder, Wolfgang Kronast, N. Naychuk | Reliability investigations in micromechanical devices | Sensors and Actuators A: Physical, 110.2004(1-3), pp. 150-156, 2004 | BibTeX | RIS | DOI |
Markus Freudenreich, Ulrich Mescheder, Gergoe Somogyi | Simulation and realization of a novel micromechanical bi-stable switch | Sensors and Actuators A: Physical, 114.2004(2-3), pp. 451-459, 2004 | BibTeX | RIS | DOI |
2003 | |||
Markus Freudenreich, Ulrich Mescheder, Gergoe Somogyi | Design Consideration and Realization of a Novel Micromechanical Bi-Stable Switch | Transducers '03: The 12th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, Volume 2, pp. 1096-1099, 2003 | BibTeX | RIS |
S. Bauerdick, Claus J. Burkhardt, R. Rudorf, W. Barth, Volker Bucher, Wilfried Nisch | In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope | Microelectronic Engineering, 67/68.2003(June), pp. 963-969, 2003 | BibTeX | RIS | DOI |
Ulrich Mescheder | Modern Silicon-based MEMS Technology | Smart Sensors and MEMS, Kluwer Academic Publishers: Dordrecht, pp. 255-272, 2003 | BibTeX | RIS |
Alfred Stett, Volker Bucher, Claus J. Burkhardt, U. Weber, Wilfried Nisch | Patch-clamping of primary cardiac cells with micro-openings in polyimide films | Medical and Biological Engineering and Computing, 41.2003(2), pp. 233-240, 2003 | BibTeX | RIS | DOI |
Ulrich Mescheder | Porous Silicon: Technology and Applications for Micromachining and MEMS | Smart Sensors and MEMS, Kluwer Academic Publishers: Dordrecht, pp. 273-288, 2003 | BibTeX | RIS |
P. Fürjes, Andras Kovacs, Cs. Dücsö, Maria Adam, Bernhard Müller, Ulrich Mescheder | Porous silicon-based humidity sensor with interdigital electrodes and internal heaters | Sensors and Actuators B: Chemical, 95.2003(1-3), pp. 140-144, 2003 | BibTeX | RIS | DOI |
2002 | |||
Ulrich Mescheder, Andras Kovacs, A. Fahad, Rolf Huster | 3D structuring of c-Si using porous silicon as sacrificial material | Proceedings of the 2002 2nd IEEE Conference on Nanotechnology: IEEE-NAN0 2002; August 26-28, Washington D.C., pp. 33-36, 2002 | BibTeX | RIS | DOI |
Volker Bucher, Jürgen Brugger, Dieter Kern, Gyu M. Kim, Markus Schubert, Wilfried Nisch | Electrical properties of light-addressed sub-μm electrodes fabricated by use of nanostencil technology | Microelectronic Engineering, 61/62.2002(July), pp. 971-980, 2002 | BibTeX | RIS | DOI |
Ulrich Mescheder, M. Alavi, K. Hiltmann, Ch. Lietzau, Christoph Nachtigall, H. Sandmaier | Local laser bonding for low temperature budget | Sensors and Actuators A: Physical, 97-98.2002(April), pp. 422-427, 2002 | BibTeX | RIS | DOI |
Ulrich Mescheder, Wolfgang Kronast, N. Naychuk | Reliability Investigations in Micromechanical Devices | Eurosensors XVI, The 16th European Conference on Solid-State Transducers, September 15-18, 2002 Prague, Czech Republic, pp. 145-146, 2002 | BibTeX | RIS |
Volker Bucher | Untersuchungen zur Realisierung einer lichtadressierten elektrischen Kontaktierung elektrogener Zellen mit in sub-μm-Dimension frei wählbarem Ort | Doctoral thesis, 2002 | BibTeX | RIS |
2001 | |||
Volker Bucher, Bernhard Brunner, Cornelia Leibrock, Markus Schubert, Wilfried Nisch | Electrical properties of a light addressable microelectrode chip with high electrode density for extracellular stimulation and recording of excitable cells | Biosensors and Bioelectronics, 16.2001(3), pp. 205-210, 2001 | BibTeX | RIS | DOI |
Volker Bucher, Markus Schubert, Dieter Kern, Wilfried Nisch | Light-addressed sub-μm electrodes for extracellular recording and stimulation of excitable cells | Microelectronic Engineering, 57/58.2001(September), pp. 705-712, 2001 | BibTeX | RIS | DOI |
Ulrich Mescheder, M. Alavi, K. Hiltmann, Ch. Lizeau, Christoph Nachtigall, H. Sandmaier | Local Laser Bonding for Low Temperature Budget | Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany, pp. 218-221, 2001 | BibTeX | RIS |
Christoph Nachtigall, Ulrich Mescheder | Movement giver | 2001 | BibTeX | RIS |
Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Istvan Barsony, Maria Adam, Cs. Dücsö | Porous silicon as multifunctional material in MEMS | Proceedings of the 2001 1st IEEE Conference on Nanotechnology : IEEE-NANO 2001 : October 28-30, 2001, Maui, Hawaii, pp. 483-488, 2001 | BibTeX | RIS | DOI |
Andras Kovacs, Ulrich Mescheder | Surface Micromachining Process for C-Si as Active Material | Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany, pp. 620-623, 2001 | BibTeX | RIS |
2000 | |||
Christoph Nachtigall, Ulrich Mescheder | Bewegungsgeber | 2000 | BibTeX | RIS |
Ulrich Mescheder | Mikrosystemtechnik : Konzepte und Anwendungen | Teubner: Stuttgart, 3-519-06256-9, 2000 | BibTeX | RIS |
M. Reichardt, Ulrich Mescheder, Nagy Nosseir | Simulation of a Micro-Fabricated Inclinometer | Proceedings of the International Conference on Mathematics and Engineering Techniques in Medicine and Biological Sciences, METMBS '00; Las Vegas, Nevada, June 26 - 29, 2000, pp. 309-314, 2000 | BibTeX | RIS |
1999 | |||
Volker Bucher, Michael Graf, Martin Stelzle, Wilfried Nisch | Low-impedance thin-film polycrystalline silicon microelectrodes for extracellular stimulation and recording | Biosensors and Bioelectronics, 14.1999(7), pp. 639-649, 1999 | BibTeX | RIS | DOI |
Ulrich Mescheder, Christiane Kötter | Optical monitoring and control of Si wet etching | Sensors and Actuators A: Physical, 76.1999(1-3), pp. 425-430, 1999 | BibTeX | RIS | DOI |
1998 | |||
Ulrich Mescheder, Christiane Kötter | Optical monitoring and control of Si wet etching | Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998, pp. 51-54, 1998 | BibTeX | RIS |
Ulrich Mescheder, C. Kötter, E. Kolguin, A. Oukhov | Optische Insitu-Prozesskontrolle beim anisotropen Ätzen von Si-Membranen | Sensoren und Meßtechnik: Vorträge der ITG-Fachtagung vom 9. bis 11. März 1998 in Bad Nauheim, pp. 365-372, 1998 | BibTeX | RIS |
Ulrich Mescheder, Christiane Kötter, B. Katzenstein | Piezoelectric Inch Worm Motor with Monolithically Integrated Driving Block | Actuator 98, 6th International Conference on New Actuators with accompanying exhibition : 17 - 19 June, 1998, Bremen, Germany, pp. 327-331, 1998 | BibTeX | RIS |
1997 | |||
Volker Bucher | Herstellung und Charakterisierung von Dünnschicht-Mikroelektroden mit herkömmlichem und porösem Polysilizium | 1997 | BibTeX | RIS |
Ulrich Mescheder, S. Majer | Micromechanical inclinometer | Sensors and Actuators A: Physical, 60.1997(1-3), pp. 134-138, 1997 | BibTeX | RIS | DOI |
1996 | |||
Ulrich Mescheder, S. Majer, R. Keller | 2-Achsen Si-Neigungssensor: Simulation und Realisierung | Sensoren und Messysteme : Tagung Bad Nauheim, 11. bis 13. März 1996 / VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik, pp. 83-93, 1996 | BibTeX | RIS |
Ulrich Mescheder, S. Majer | Mikromechanischer Neigungssensor für industrielle Anwendungen | 41. Internationales Wissenschaftliches Kolloquium 23. - 26.09.1996, Technische Universität Ilmenau, Thüringen, Band 1 Vortragsreihen, pp. 507-514, 1996 | BibTeX | RIS |
E. A. Kolgin, I. A. Tumanov, A. A. Ukhov, Ulrich Mescheder | Photometric device for control of micromechanical elements manufacturing | Proceedings of third international scientific technical Conference of Actual Problems of electronic instrument engineering, APEIE-96, Vol. 2, pp. 75-76, 1996 | BibTeX | RIS |
1995 | |||
S. Majer, Ulrich Mescheder | Konzept eines planaren 2-Achsen Silizium Neigungssensors | Mikro-System-Technik : Mikromechanik & Mikroelektronik ; Chemnitz '95 ; 16. - 17. Oktober 1995, Chemnitz, pp. 112-120, 1995 | BibTeX | RIS |
S. Majer, Ulrich Mescheder | Simulation supported design of micromechanical sensors | Transactions on the Built Environment, Vol.12.1995, 1995 | BibTeX | RIS |
S. Majer, Ulrich Mescheder | Simulation supported design of micromechanical sensors | Simulation and design of microsystems and microstructures : [papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, which was held in Southampton, UK, in September 1995, pp. 329-337, 1995 | BibTeX | RIS |
1991 | |||
L.-M. Buchmann, Ulrich Mescheder, M. Torkler | Characterization of silicon open stencil masks in an ion projection lithography machine | Microelectronic Engineering, 13.1991(1-4), pp. 353-356, 1991 | BibTeX | RIS | DOI |
M. Zander, Ulrich Mescheder | Maskenmetrologie: Anforderungen und Trends | Maskentechnik für Mikroelektronik-Bausteine : Tagungsbericht ; Tagung München, 14. November 1991, pp. 7-40, 1991 | BibTeX | RIS |
1990 | |||
Ulrich Mescheder, U. Mackens, H. Lifka, R. Dammel, G. Pawloski, J. Theis | Application of positive and negative tone x-ray resist for 0.5μm CMOS device fabrication | Microelectronic Engineering, 11.1990(1-4), pp. 481-485, 1990 | BibTeX | RIS | DOI |
H. Schaffer, Ulrich Mescheder, U. Weigmann, H.-C. Petzold | Influence of X-ray mask repair on pattern placement accuracy | Microelectronic Engineering, 11.1990(1-4), pp. 251-254, 1990 | BibTeX | RIS | DOI |
H. Lüthje, A. Bruns, H. Harms, I. Köhler, Ulrich Mescheder, U. Mackens, T. Stuck | X-ray mask technology: Precise etching of sub-half-micron tungsten absorber features | Microelectronic Engineering, 11.1990(1-4), pp. 255-258, 1990 | BibTeX | RIS | DOI |
1989 | |||
U. Mackens, Ulrich Mescheder, F. Mund, H. Lüthje, H. Lifka, C.A.H. Juffermans, P.H. Woerlee, A.J. Walker | Fabrication of 0.5 μm NMOS-devices by all level X-ray lithography | Microelectronic Engineering, 09.1989(1-4), pp. 89-92, 1989 | BibTeX | RIS | DOI |
Ulrich Mescheder, U. Mackens, F. Mund | Investigation Of Linewidth Uniformity In X-Ray Lithography | Proceedings of SPIE: Volume 1087; Integrated Circuit Metrology, Inspection, and Process Control III, Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States, pp. 396-406, 1989 | BibTeX | RIS |
U. Mackens, Ulrich Mescheder, H. Lüthje | Röntgenstrahllithographie: Herstellung einer 0.5 μm Schaltung und Overlayuntersuchungen | Mikroelektronik: Vorträge der GME-Fachtagung vom 13. bis 15. März 1989 in Baden-Baden, pp. 115-126, 1989 | BibTeX | RIS |
S. Pongratz, Ulrich Mescheder, Ch. Ehrlich, H.-L. Huber, K. Kohlmann, W. Windbracke | State of the art of pattern placement accuracy of silicon X-ray master masks | Microelectronic Engineering, 09.1989(1-4), pp. 117-120, 1989 | BibTeX | RIS | DOI |
Ulrich Mescheder, K. Werner | Submikrometer Linienbreitenmetrologie hoher Genauigkeit | Maskentechnik für Mikroelektronik-Bausteine: Tagungsbericht, München, 09. November 1989; VDI-Berichte, 795, pp. 155-190, 1989 | BibTeX | RIS |
1988 | |||
U. Mackens, H. Lüthje, Ulrich Mescheder, F. Mund, S. Pongratz | Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices | Proceedings of SPIE: Volume 0923; Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII, 1988 | BibTeX | RIS |
H.-L. Huber, S. Pongratz, J. Trube, W. Windbracke, Ulrich Mescheder, F. Mund | Sub‐half‐micron critical dimension control in x‐ray lithography mask technology | Journal of Vacuum Science & Technology B: Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 06.1988(6), pp. 2184-2189, 1988 | BibTeX | RIS |
1987 | |||
Ulrich Mescheder, F. Mund, H.-L. Huber | Linewidth metrology for x-ray masks with subhalfmicron feature size | Microelectronic Engineering, 06.1987(1-4), pp. 653-659, 1987 | BibTeX | RIS | DOI |
1986 | |||
H. Betz, H.-L. Huber, S. Pongratz, W. Rohrmoser, W. Windbracke, Ulrich Mescheder | Silicon X-ray masks: Pattern placement and overlay accuracy | Microelectronic Engineering, 05.1986(1-4), pp. 41-49, 1986 | BibTeX | RIS | DOI |
H. Lüthje, U. Mackens, Ulrich Mescheder, B. Matthießen | Stability of SiC-masks for high resolution synchrotron X-ray lithography | Microelectronic Engineering, 05.1986(1-4), p. 39, 1986 | BibTeX | RIS | DOI |
1985 | |||
Ulrich Mescheder, G. Weiser | Optical study of space charge injection in plasma deposited a-Si:H | Journal of Non-Crystalline Solids, Vol.77-78.1985 Part 1, pp. 571-574, 1985 | BibTeX | RIS | DOI |
1984 | |||
Ulrich Mescheder, G. Weiser | Electro‐optical effects on the absorption edge of a‐Si:H | AIP Conference Proceedings, pp. 356-363, 1984 | BibTeX | RIS |