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Publikationen

Institut für Mikrosystemtechnik

2020 | 2019 | 2018 | 2017 | 2016 | 2015 | 2014 | 2013 | 2012 | 2011 | 2010 | 2009 | 2008 | 2007 | 2006 | 2005 | 2004 | 2003 | 2002 | 2001 | 2000 | 1999 | 1998 | 1997 | 1996 | 1995 | 1991 | 1990 | 1989 | 1988 | 1987 | 1986 | 1985 | 1984

2020

Florian Sicklinger, Yunhang Zhang, Kory Lavine, Nicolai Simon, Volker Bucher, Manfred Jugold, Lorenz Lehmann, Mathias H. Konstandin, Hugo A. Katus, Florian LeuschnerA Minimal-Invasive Approach for Standardized Induction of Myocardial Infarction in Mice
Aakash Shah, Florian Höschen, Volker BucherBiocompatible Polymer Encapsulation for Active Bone Distractors
Mohammed I. Khazi, Andras Kovacs, Ali Zahedi, Christian Reser, Ulrich Mescheder, Bahman Azarhoushang, Christoph ReichIn situ Qualitätsbeurteilung von Schleifprozessen mittels Mikrosystemtechnik basierter Sensorfusion
Michele Dollt, Miriam Reh, Michael Metzger, Gerhard Heusel, Martin Kriebel, Volker Bucher, Günther ZeckLow-temperature atomic-layer deposited oxide on titanium nitride electrodes enables culture and physiological recording of electrogenic cells
Markus Westerhausen, Tanja Martin, Michael Metzger, Felix Blendinger, Monika Fleischer, Boris Hofmann, Volker BucherPassivated electrode side walls by atomic layer deposition on flexible polyimide based samples
Mohammed I. Khazi, Andras Kovacs, Ali Zahedi, Christian Reser, Ulrich Mescheder, Bahman Azarhoushang, Christoph ReichReal time In-Situ Quality Monitoring of Grinding Process using Microtechnology based Sensor Fusion

2019

Almothana Albukhari, Frederico Lima, Ulrich MeschederBed-Embedded Heart and Respiration Rates Detection by Longitudinal Ballistocardiography and Pattern Recognition
Markus Westerhausen, Michael Metzger, Felix Blendinger, Anja Levermann, Monika Fleischer, Boris Hofmann, Volker BucherCharacterization of Biostable Atomic Layer Deposited (ALD) Multilayer Passivation Coatings for Active Implants
Rui Zhu, Ulrich MeschederDeap Based Actuator for Tactile and Microfluidics Applications
Alexander Bejan, Frederico Lima, Ulrike Lindwedel-Reime, Almothana Albukhari, Rui Zhu, Maab Inayah, Christophe Kunze, Ulrich MeschederDesign und Evaluation eines low-cost Ambient-Assisted-Living-Sensorsystems zur ballistokardiografischen Messung der Vitalfunktionen und Aktivitäten älterer Bewohner
Rui Zhu, Lennart Rubbert, Pierre Renaud, Ulrich MeschederDetermination of a tactile feedback strategy for use in robotized percutaneous procedures
Frederico Lima, Mohammed I. Khazi, Ulrich Mescheder, Alok C. Tungal, Uma MuthiahFabrication of 3D microstructures using grayscale lithography
Benjamin Sittkus, Andras Kovacs, Ulrich MeschederFabrication of a microfluidic system with columnar structures using DRIE for blood brain barrier applications
Benjamin Sittkus, Rui Zhu, Ulrich MeschederFlexible piezoresistive PDMS metal-thin-film sensor-concept for stiffness evaluation of soft tissues
Frederico Lima, Ulrich Mescheder, Harald Leiste, Müller ClaasInfluence of current density on the adhesion of seedless electrodeposited copper layers on silicon
Mohammed I. Khazi, Ulrich MeschederInfluence of electrochemical operating conditions on the microme-chanical properties of electrodeposited Nickel-Cobalt alloys for fabrication of microtools
Volker BucherLasermarkierbare matte kratzfeste Oberflächen
Frederico Lima, Almothana Albukhari, Ulrich MeschederMachine Learning for Contactless Low-Cost Vital Signs Monitoring Systems
Mohammed I. Khazi, Andras Kovacs, Vaibhav Kumar, Pranav Dhumal, Ulrich MeschederMicrofabricated 2D planar eddy-current microcoils for the non-destructive testing of grinding burn marks
Shervin Keshavarzi, Andras Kovacs, Mohammad Abdo, Vlad Badilita, Jan G. Korvink, Ulrich MeschederMiniaturized porous silicon rugate filter wheel for multispectral imaging applications
Shervin Keshavarzi, Andras Kovacs, Mohammad Abdo, Vlad Badilita, Rui Zhu, Jan G. Korvink, Ulrich MeschederPorous Silicon Based Rugate Filter Wheel for Multispectral Imaging Applications
Shervin Keshavarzi, Andras Kovacs, Ulrich MeschederPorous silicon based antireflection coating for the MWIR range
Rui Zhu, Ulrike Wallrabe, Peter Woias, Matthias C. Wapler, Ulrich MeschederSemi-rigid ring-shaped electrode dielectric electroactive polymer membrane as buckling actuator
Shervin KeshavarziSilicon Needle-like Surfaces for Room Temperature Silicon-Silicon Bonding Applications
Andreas Heid, Marcio Camoleze de Andrade, Lena Bleck, Rene P. von Metzen, Dieter Kern, Jürgen Giehl, Volker BucherTransfer, Assembly and Embedding of Small CMOS-Die Arrays for the Build-up of Flexible Smart Implants

2018

Mohammed I. Khazi, Ulrich Mescheder, Uma Muthiah3D free forms in c-Si via grayscale lithography and RIE
Andreas Heid, Lena Bleck, Rene von Metzen, Volker BucherA demonstrator for a flexible active microelectrode array with high electrode number
Felix BlendingerBioaktive Beschichtung für orthopädische Implantate im ALD
Frederico Lima, Almothana Albukhari, Rui Zhu, Ulrich MeschederContactless Sleep Monitoring Measurement Setup
Frederico Lima, Almothana Albukhari, Rui Zhu, Ulrich MeschederContactless Sleep Monitoring Measurement Setup
Frederico Lima, Ulrich Mescheder, C. Müller, Holger ReineckeCopper electrodeposition on silicon electrodes
Andreas Heid, Marcio C. de Andrade, Rene von Metzen, Jürgen Giehl, Volker BucherFabrication of a large area flexible active microelectrode array with more than 1000 recording electrodes
Shervin Keshavarzi, Ulrich Mescheder, Holger ReineckeFormation Mechanisms of Self-Organized Needles in Porous Silicon Based Needle-Like Surfaces
Felix Blendinger, Michael Metzger, Daniel Hähnel, Monika Fleischer, Volker BucherIn situ Prozess-Visualisierung/Optimierung und Anwendung der Atomlagenabscheidung
Frederico Lima, Ulrich Mescheder, Gabor L. Katona, Harald Leiste, Emre Özel, Claas Müller, Holger ReineckeInfluence of silicon doping type on the adhesion of seedless electrodeposited copper layers
Michael Metzger, Alexander Konrad, Felix Blendinger, Andreas Modler, Alfred J. Meixner, Volker Bucher, Marc BrechtLow-Cost GRIN-Lens-Based Nephelometric Turbidity Sensing in the Range of 0.1–1000 NTU
Andreas HeidNeuroflexarray - ein neues flexibles Mikroelektrodenarray durch Chip-in-Foil Technolgie
Ulrich Mescheder, Shervin Keshavarzi, Surjitsinh ChauhanNew concepts for miniaturized MEMS based power systems
Shervin Keshavarzi, Frederico Lima, Wolfgang Kronast, Ulrich MeschederSequential Nano-Explosion Using Patterned Porous Silicon
Andras Kovacs, Ulrich MeschederThin Photonic Crystals for Optical Characterization of Ultrathin Hafnium Dioxide in Mesoporous Layers
Andras Kovacs, Shervin Keshavarzi, A. O. Perez, Stefan Palzer, Ulrich MeschederTunable Light Source for Photoacoustic Sensing Applications
Michael Engel, Denis Horn, Felix Blendinger, Michael Metzger, Markus Westerhausen, Volker BucherWirtschaftliches Testverfahren zur Bestimmung der Wasserdampf-Durchlässigkeit von Kunststoff-Folien

2017

Uma Muthiah, Mohammed I. Khazi, Ulrich Mescheder3D Strukturierung von Silizium mittels Grauwert-Technologie
Shervin Keshavarzi, Wolfgang Kronast, Frederico Lima, Ulrich MeschederControlled energy release based on explosive porous silicon
Shervin Keshavarzi, Ulrich Mescheder, Holger ReineckeEffect of Capillary Forces in Room Temperature Si-Si Direct Bonding Technique Using Velcrolike Surfaces
Frederico Lima, Alok Tungal, Mohammed I. Khazi, Ulrich MeschederGalvanisch aus 3D-Fotolack-Strukturen abgeformte metallische 3D-Freiformen
Dirk Benyoucef, Vera Kallfaß, Andras Kovacs, Ulrich Mescheder, Stefan PalzerMikrosystemtechnische Geruchssensorik und ihre Anwendungen in AAL
Andreas Heid, Lukas Scheuble, Rene von Metzen, Volker BucherProzess zum Transfer und zur Einbettung von kleinen Dies in ein flexibles Foliensystem bei niedrigen Temperaturen
Andras Kovacs, Alexey Ivanov, Ulrich MeschederSchmalbandige photonische Kristalle für Multispektral-Analyse

2016

Andreas Heid, Marcio C. de Andrade, Rene P. von Metzen, Volker Bucher, Jürgen GiehlA New Active Flexible High Resolution Micro Electrode Array
Alexey Ivanov, Andras Kovacs, Ulrich MeschederApplication of local backside contacts for structuring Of silicon with anodization: simulation and experiments
Rui Zhu, Ulrike Wallrabe, Matthias C. Wapler, Peter Woias, Ulrich MeschederDielectric electroactive polymer membrane actuator with ring-type electrode as driving component of a tactile actuator
Ulrich Mescheder, Alok Tungal, Frederico LimaElectroplated 3D metal free forms casted from 3D photoresist molds
Andreas Heid, Rene P. von Metzen, Alfred Stett, Volker BucherExamination of dielectric strength of thin Parylene C films under various conditions
Michael Banghard, Romy Hartmann, Kamel Silmy, Wilfried Nisch, Rene P. von Metzen, Alfred Stett, Volker BucherHigh voltage insulation properties of DLC-Parylene multilayer films for microsurgery instruments
Victor V. Lyubimov, Vladimir M. Volgin, Ulrich Mescheder, Inna V. Gnidina, Alexey IvanovInvestigation of plastic electrode tools for electrochemical machining of silicon
Michael Metzger, Vanessa Schenk, Alexander Konrad, Jan Brunner, Victoria Radun, Sabrina Hajek, Alfred J. Meixner, Andreas Modler, Dieter Stoll, Volker Bucher, Marc BrechtKompakter optischer Hybridsensor für Brechungsindexmessungen
Vera Rech, Ramona Draxler, Volker Bucher, Boris HofmannNeurotransmitterdetektion in vivo – Anwendung elektrochemischer Messverfahren
Vera Rech, Ramona Draxler, Volker Bucher, Boris HofmannNeurotransmitterdetektion in vivo – Anwendung elektrochemischer Messverfahren: Teil 2
Vera Rech, Ramona Draxler, Volker Bucher, Boris HofmannNeurotransmitterdetektion in vivo – Anwendung elektrochemischer Messverfahren: Teil 3
Vera Rech, Ramona Draxler, Volker Bucher, Boris HofmannNeurotransmitterdetektion in vivo – Anwendung elektrochemischer Messverfahren: Teil 4
Alvaro O. Pérez, Vera Kallfaß-de Frenes, Alexander Filbert, Janosch Kneer, Benedikt Bierer, Pirmin Held, Philipp Klein, Jürgen Wöllenstein, Dirk Benyoucef, Sigrid Kallfaß, Ulrich Mescheder, Stefan PalzerOdor-Sensing System to Support Social Participation of People Suffering from Incontinence
Johannes Maisch, Farhad Jafarli, Thomas Chassé, Felix Blendinger, Alexander Konrad, Michael Metzger, Alfred J. Meixner, Marc Brecht, L. Dähne, Hermann A. MayerOne-pot synthesis of micron partly hollow anisotropic dumbbell shaped silica core–shell particles
Andras Kovacs, Ulrich MeschederPSi-based Diffusion Membranes
Michael Banghard, Christian Freudigmann, Kamel Silmy, Alfred Stett, Volker BucherPlasma treatment on novel carbon fiber reinforced PEEK cages to enhance bioactivity
Shervin Keshavarzi, Ulrich Mescheder, Holger ReineckeRoom Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces
Alexey Ivanov, Ulrich MeschederSurface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices

2015

Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Bernhard Müller, Alexey IvanovAdaptiver optischer Filter bzw. spektral einstellbare Lichtquelle
Frederico Lima, Holger Reinecke, Ulrich MeschederAdhesion of Continuous and Homogeneous Electrodeposited Copper Layers on Silicon
Christine Härtel, Dorothee Maier, Astrid Wagner, Volker BucherAtmosphärendruckplasma in der Medizintechnik Teil 2
Christine Härtel, Dorothee Maier, Astrid Wagner, Volker BucherAtmosphärendruckplasma in der Medizintechnik Teil 3
Christine Härtel, Dorothee Maier, Astrid Wagner, Volker BucherAtmosphärendruckplasma in der Medizintechnik Teil 4
Christine Härtel, Dorothee Maier, Astrid Wagner, Volker BucherAtmosphärendruckplasma in der Medizintechnik Teil 5
Christine Härtel, Dorothee Maier, Astrid Wagner, Volker BucherAtmosphärendruckplasma in der Medizintechnik Teil 6
Shervin Keshavarzi, Ulrich Mescheder, Holger ReineckeBonding Mechanism in the Velcro Concept Si-Si Low Temperature Direct Bonding Technique
Mohammed I. Khazi, Ulrich Mescheder, Zohaib SiddiquiCharacterization of the influence of Sodium-Lauryl-Sulfate on the surface quality of electrodeposited Nickel-Cobalt alloys
Ulrich Mescheder, Mohammed I. KhaziCorner rounding of sharp silicon punching tool edges by local oxidation of silicon
Victoria Radun, Rene P. von Metzen, T. Stieglitz, Volker Bucher, Alfred StettEvaluation of adhesion promoters for Parylene C on gold metallization
Michael Banghard, Kamel Silmy, Rene P. von Metzen, Volker BucherKorrosionsschutz von Edelstahl mit neuartigem Schichtdesign
Paul Walden, Janosch Kneer, Stefan Knobelspies, Wolfgang Kronast, Ulrich Mescheder, Stefan PalzerMicromachined Hotplate Platform for the Investigation of Ink-Jet Printed, Functionalized Metal Oxide Nanoparticles
Wolfgang Kronast, Volker Lange, Rolf Huster, Ulrich MeschederOptische Charakterisierung von Stress-relaxierten aktiven MOEMS-Membranspiegeln mit großer Apertur
Alexey Ivanov, Ulrich MeschederPrimary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening
Andras Kovacs, Alexey Ivanov, Ulrich MeschederRefractometer Using Photonic Crystals for Fermentation Process Characterization
Mohammed I. Khazi, Ulrich MeschederSelf-aligning micro punch-die tool-system for high precision blanking of thin metal foils
Surjitsinh Chauhan, Bernhard Müller, Ulrich MeschederSimulation, Fabrication and Characterization of Robust Vibrational Energy Harvester
Mohammed I. Khazi, Ulrich MeschederSurface polishing of rough (110) silicon plane by HNA etching resulting from wet anisotropic KOH etching
Andras Kovacs, Philipp Maurer, Ulrich MeschederTemperatureinfluss auf die Peakposition bei verschiedenen Umgebungsmedien in Porösen Silizium Multilayerschichten
Andras Kovacs, Alexey Ivanov, Ulrich MeschederTunable Narrow Band Porous Photonic Crystals for MOEMS Based Scanning Systems
Astrid Wagner, Dagmar Martin, Volker BucherUntersuchung des Einflusses der Reinigung und Oberflächenvorbehandlung von Edelstahloberflächen auf die Haftung von Silikonspritzgussmassen

2014

Rui Zhu, Ulrich Mescheder, Frederico LimaActuation concept for miniaturized tactile systems
Shervin Keshavarzi, Ulrich Mescheder, Holger ReineckeCharacterisation and simulation of low temperature Si-Si direct bonding through velcro-like surfaces based on porous silicon
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf HusterDevelopment of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology
Frederico Lima, Ulrich Mescheder, Holger ReineckeElectrochemical Impedance Spectroscopy of n-Si(100) Pre-etched by KOH or BHF
Alexey Ivanov, Ulrich Mescheder, Peter WoiasFinite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process
Ulrich MeschederForschungsgebiet Mikrosystemtechnik im Forschungsschwerpunkt Smart Systems
Ulrich Mescheder, Mohammed I. Khazi, Andras Kovacs, Alexey IvanovMOEMS based concept for miniaturized monochromators, spectrometers and tunable light sources
Frederico Lima, Ulrich Mescheder, Holger ReineckeMaskless Selective Electrodeposition on Silicon
Laszlo Becsi, Thomas Bier, Wolfgang Kronast, Ulrich Mescheder, Dirk BenyoucefMiniaturisiertes Impulslärm-Dosimeter zur Untersuchung und Vermeidung von Gehörschädigungen bei Menschen
Nigol Kaste, Alexander Filbert, Ulrich Mescheder, Toomas Rang, Galina RangProcess Development For 3D Laser Lithography
Ulrich Mescheder, Mohammed I. Khazi, Andras Kovacs, Alexey IvanovTunable optical filters with wide wavelength range based on porous multilayers
Volker BucherWohin geht für die Medizintechnik die Reise?

2013

Wolfgang Kronast, Ulrich Mescheder, Bernhard MüllerDevelopement of stress relief suspensions for micro-machined silicon membranes
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf HusterDevelopment of a focusing micromirror device with an in-plane stress relief structure in SOI technology
Andras Kovacs, Aina Malisauskaite, Ulrich MeschederEinfluss der Morphologie auf die Sensitivität eines photonischen Biosensors
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf HusterEntwicklung einer Stressausgleichsstruktur für spannungsarme aktive Membranspiegel in SOI Technologie
Laszlo Becsi, Dirk Benyoucef, Thomas Bier, Wolfgang Kronast, Ulrich MeschederEntwicklung eines Impulslärm-Dosimeters zur Untersuchung von Gehörschädigungen bei Menschen
Shervin Keshavarzi, Ulrich Mescheder, Holger ReineckeModeling the adhesion between nanoneedle surfaces bonded based on Velcro or Gecko principle
Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder, Rainer WittigOptical sensing and analysis system based on porous layers
Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich MeschederPortable Optical Sensor Using Tunable Optical Multilayers
Ulrich Mescheder, Qingyun Gu, Bernhard MüllerPreiswerter und robuster Harvester für Vibrationsenergie
Rui Zhu, Aina Malisauskaite, Ulrich Mescheder, Ulrike WallrabeProof of Concept and Properties of Micro Hydraulic Displacement Amplifier
Andras Kovacs, Wolfgang Kronast, Alexander Filbert, Ulrich MeschederTransport in Surface Passivated Porous Silicon Membranes

2012

Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke, Andras KovacsContact Mechanics and Needle Like Surfaces for Micro-Nano Integration
Alexey Ivanov, Ulrich MeschederDynamic Simulation of Electrochemical Etching of Silicon with COMSOL
S. Hildering, Laszlo Becsi, U. Engel, M. Merklein, Ulrich MeschederExperimental investigations on high-precision microcutting of copper foils with microfabricated silicon punches
Michael Weinmann, Wilfried Nisch, Alfred Stett, Volker BucherFlexible Verkapselungsschichten für elektrisch aktive Mikroimplantate
Michael Weinmann, Wilfried Nisch, Alfred Stett, Volker BucherLangzeitstabile Verkapselungsschichten mit integriertem Feuchtesensor für aktive Mikroimplantate
Volker BucherMechatronik: Medizintechnik an den Grenzen des Möglichen; Blinde sehen, Lahme gehen
Ulrich Mescheder, Antwi Nimo, Bernhard Müller, Awad S. Abou ElkeirMicro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy
Thomas Bruns, Laszlo Becsi, Ulrich Mescheder, Herbert SchneckenburgerMicrofluidic system for single cell sorting based on deflection by optical tweezers
Volker BucherNMI Reutlingen - anwendungsoptimierte Oberflächen für die Medizintechnik
Andras Kovacs, Alexey Ivanov, Aina Malisauskaite, Ulrich MeschederOberflächenstabilisierung nanostrukturierter poröser Siliziumschichten für sensorische Anwendungen
Frederico Lima, Ulrich Mescheder, Holger ReineckeSimulation of Current Density for Electroplating on Silicon Using a Hull Cell
S. Hildering, Laszlo Becsi, M. Merklein, Ulrich MeschederTranciatura ad alta precisione con punzoni in silicio
Andras Kovacs, Ulrich MeschederTransport mechanisms in nanostructured porous silicon layers for sensor and filter applications

2011

Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad S. Abou Elkeir3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls
Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad S. Abou ElkeirA device for 3D energy harvesting
Andras Kovacs, Ulrich MeschederHerstellung und Charakterisierung perforierter und poröser Membranmodulen für Mikro- und Nanofiltration
Alexey Ivanov, Andras Kovacs, Ulrich MeschederHigh quality 3D shapes by silicon anodization
Volker Lange, Frederico Lima, Dietrich KühlkeMulticolour LED in luminescence sensing application
Prasad Jonnalagadda, Ulrich Mescheder, Andras Kovacs, Antwi NimoNanoneedles based on porous silicon for chip bonding with self assembly capability
Ting Yuan, Ulrich Mescheder, Wolfgang Kronast, Changlong WangOptimization of Deformation Shape of an Active Electro-Optical Focusing Device
Andras Kovacs, Prasad Jonnalagadda, Ulrich MeschederOptoelectrical detection system using porous silicon-based optical multilayers
Alexey Ivanov, Ulrich MeschederSilicon Electrochemical Etching for 3D Microforms with High Quality Surfaces

2010

Antwi Nimo, Ulrich Mescheder3-D capacitive vibrational harvester for autonomous low power sensors
Volker Bucher, Wilfried NischBeschichtungen für Life Science: Vakuumbeschichtungstechnik und Plasmabehandlung von Mikrosystemen in Medizintechnik, Pharmaforschung und Biologie
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Antwi Nimo, Claus Braxmaier, Thilo SchuldtDevelopment of a tilt actuated micromirror for applications in laser interferometry
Awad Saad, Ulrich Mescheder, Bernhard Müller, Antwi NimoHigh eficient, low cost electret charging set-up for mems based energy harvesting systems
Thomas Bruns, Laszlo Becsi, Marc Talkenberg, Michael Wagner, Petra Weber, Ulrich Mescheder, Herbert SchneckenburgerMicrofluidic system for single cell sorting with optical tweezers
Frederico Lima, Volker Lange, Sergey Borisov, Dietrich KühlkeMulticolor LED-based temperature and O2-pressure sensor
Alexey Ivanov, Andras Kovacs, Ulrich MeschederNasschemisches Ätzen von nahezu beliebigen 3D-Strukturen in Silizium
Ulrich Mescheder, Prasad Jonnalagadda, Andras Kovacs, X. MengOptischer Biosensor mittels selbstorganisierter nanostrukturierte Multilayerschichten
Andras Kovacs, Ulrich Mescheder, Prasad Jonnalagadda, X. MengOptisches Messsystem für biosensorische Anwendungen
Volker BucherPlasmaunterstützte chemische Dampfphasenabscheidung
Volker BucherSubstratwerkstoffe für die dekorative vakuumtechnische Beschichtung
Simon Ressel, Martin Gohlke, Dominik Rauen, Thilo Schuldt, Wolfgang Kronast, Ulrich Mescheder, Ulrich Johann, Dennis Weise, Claus BraxmaierUltrastable assembly and integration technology for ground- and space-based optical systems

2009

Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich MeschederCharacterization of porous silicon based optical sensor system for biosensor applications
Herbert Schneckenburger, Rainer Börret, Claus Braxmaier, Rudolf Kessler, Petra Kioschis, Dietrich Kühlke, Ulrich Mescheder, Werner Schröder, Christoph NachtigallDem Energiestoffwechsel von Tumorzellen und Bioreagenzien auf der Spur
Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich MeschederEntwicklung und Charakterisierung von photonischen Multischichten aus porösem Silizium für biosensorische Anwendungen
Andras Kovacs, Dirk Meister, Ulrich MeschederInvestigation of humidity adsorption in porous silicon layers
Ulrich Mescheder, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Christoph Ament, Andreas PeterMikrostrukturierter Sensorarray zur Luftqualitätsmessung (MOSEL)
Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi NimoNanostrukturierte Siliziumoberflächen für Mikro-Nano-Integration
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder, S. Kuhn, M. Kübler, A. BurrOptimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements
Ulrich Mescheder, Bernhard Müller, Safi Baborie, P. UrbanovicProperties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems
Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi NimoSelbstjustierendes Bondverfahren unter Verwendung nanostrukturierter Oberflächen
Wolfgang Kronast, Ulrich Mescheder, Rolf HusterStressuntersuchung und Optimierung von SOI basierten Membranen

2008

Ulrich Mescheder, P. Urbanovic, Bernhard Müller, Safi BaborieCharging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems
Adam Kovacs, Andras Kovacs, Ulrich MeschederEstimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations
Alexey Ivanov, Ulrich Mescheder, M. Kröner, Peter WoiasFormation of Arbitrarily Shaped 3D-Forms in Silicon by 315 Electrochemical Wet-Etching
HFU Forscher top
Volker Bucher, Diethard Kapp-SchwoererMikrostrukturierte Diamond-Like-Carbon-Schichten (DLC) in Kombination mit Galvanikschichten
T. Hellmuth, Konstantin Khrennikov, Wolfgang Kronast, Rolf Huster, Ulrich MeschederOptimisation and characterisation of parabolic membrane mirrors
Volker BucherPlasma-Beschichtungen für die Medizin-Technik und den Life-Science-Bereich
Volker Bucher, Diethard Kapp-SchwoererPlasmabeschichtung in der Mikrotechnik

2007

Daniela Kögler, Rolf Huster, Wolfgang Kronast, Ulrich MeschederAufbau- und Verbindungstechnik für ein mikrooptisches System
Alexey Ivanov, Ulrich Mescheder, Andras Kovacs, Rolf HusterEinfluss unterschiedlicher Passivierungsschichten auf die Bildungsrate von porösem Silizium an Strukturkanten bei der 3DFormherstellung
Ulrich Mescheder, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Andreas Peter, Christoph Ament, Sven Rademacher, Jürgen WöllensteinMEMS-Based Air Quality Sensor
Andras Kovacs, Adam Kovacs, M. Pogany, Ulrich MeschederMechanical investigation of perforated and porous membranes for micro- and nanofilter applications
Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Jutaphorn Kritwattanakhorn, Andras Kovacs, Bernhard Müller, Ulrich MeschederModellbasierte Verfahren zur Bestimmung der Luftgüte
Volker BucherNovel Decorative Color Coatings Using Plasma Deposition
Ulrich Mescheder, Rolf Huster, Wolfgang Kronast, Thomas Hellmuth, Konstantin KhrennikovOptimierung und Charakterisierung eines Membranspiegels zur dynamischen Fokussierung
Jutaphorn Kritwattanakhorn, Marie-Luise Bauersfeld, Andras Kovacs, Bernhard Müller, Ulrich Mescheder, Sven Rademacher, Jürgen WöllensteinOptimization of platinum adhesion in electrochemical etching process for multi-sensor systems
Andras Kovacs, Bernhard Müller, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Andreas Peter, Christoph Ament, Jürgen Wöllenstein, Marie-Luise Bauersfeld, Sven RademacherSensor system for air quality measurement

2006

Rolf Huster, Andras Kovacs, Ulrich Mescheder3-D Micro Free-Form Manufacturing in Silicon: Micro Free- Form Production for Plastics Moulding Technology
Ulrich Mescheder, Zoltan Torok, Wolfgang KronastActive focusing device based on MOEMS technology
Volker BucherDLC-Schichten als Ersatz für Chromschichten
Ulrich Mescheder, Carlos Estan, Gergoe Somogyi, Markus FreudenreichDistortion optimized focusing mirror device with large aperture
Adam Kovacs, Zsolt Vizvary, Andras Kovacs, Ulrich MeschederLarge Defection Analysis of Perforated Silicon Nitride Membranes
Volker BucherNeuartige dekorative Farbschichten durch Plasma-Beschichtung
Jutaphorn Kritwattanakhorn, Andras Kovacs, Ulrich Mescheder, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen WöllensteinOptimization of platinum adhesion in electrochemical etching process for multi-sensor systems
Andras Kovacs, M. Pogany, Ulrich Mescheder, Adam KovacsRealization and mechanical investigation of perforated and porous membranes for filter applications

2005

Christoph Ament, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Bernhard Müller"Single chip"-Sensorarray zu Luftqualitätsmessung
Rolf Huster, Andras Kovacs, Ulrich Mescheder3-D Micro Free-Form Manufacturing in Silicon Micro-Free- Form Production for Plastics Moulding Technology
Ulrich Mescheder, Andras Kovacs3D-Mikrostrukturierungsverfahren: von kristallinem Silizium mit lokal einstellbarem Anisotropiefaktor
Ulrich Mescheder, Markus FreudenreichCharakterisierung eines bi-stabilen Schalters mit großem Schaltweg und einstellbaren Haltekräften
Ulrich Mescheder, Carlos Estan, Gergoe Somogyi, Markus FreudenreichMOEMS focusing device with ideal parabolic deflection shape
Ulrich Mescheder, Gergoe Somogyi, Markus Freudenreich, Carlos EstanMikrotechnisch hergestellter Membranspiegel für aktive Fokussierung
Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Ulrich MeschederNeuartiger Mikrosensor zur Luftgütemessung mit kombiniertem Feuchte- und Gassensor
Ulrich Mescheder, Andras Kovacs, Roland SchneiderOptische Penmaus mit Bluetooth

2004

Mark Herding, Gergoe Somogyi, Ulrich Mescheder, Peter WoiasA new micromachined optical fiber switch for instrumentation purposes
Wolfgang Kronast, Aritz J. Laskurain, Ulrich MeschederDas Rasterkraftmikroskop (AFM) zur Charakterisierung und Strukturierung im Nanometerbereich
Ulrich MeschederMikrosystemtechnik : Konzepte und Anwendungen
Christoph Nachtigall, Ulrich MeschederMovement giver having body with after-glowing surface
Ulrich MeschederNanoporous Silicon: Multifunctional Material for Microsystems
Ulrich Mescheder, Wolfgang Kronast, N. NaychukReliability investigations in micromechanical devices
Markus Freudenreich, Ulrich Mescheder, Gergoe SomogyiSimulation and realization of a novel micromechanical bi-stable switch

2003

Markus Freudenreich, Ulrich Mescheder, Gergoe SomogyiDesign Consideration and Realization of a Novel Micromechanical Bi-Stable Switch
S. Bauerdick, Claus J. Burkhardt, R. Rudorf, W. Barth, Volker Bucher, Wilfried NischIn-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope
Ulrich MeschederModern Silicon-based MEMS Technology
Alfred Stett, Volker Bucher, Claus J. Burkhardt, U. Weber, Wilfried NischPatch-clamping of primary cardiac cells with micro-openings in polyimide films
Ulrich MeschederPorous Silicon: Technology and Applications for Micromachining and MEMS
P. Fürjes, Andras Kovacs, Cs. Dücsö, Maria Adam, Bernhard Müller, Ulrich MeschederPorous silicon-based humidity sensor with interdigital electrodes and internal heaters

2002

Ulrich Mescheder, Andras Kovacs, A. Fahad, Rolf Huster3D structuring of c-Si using porous silicon as sacrificial material
Volker Bucher, Jürgen Brugger, Dieter Kern, Gyu M. Kim, Markus Schubert, Wilfried NischElectrical properties of light-addressed sub-μm electrodes fabricated by use of nanostencil technology
Ulrich Mescheder, M. Alavi, K. Hiltmann, Ch. Lietzau, Christoph Nachtigall, H. SandmaierLocal laser bonding for low temperature budget
Ulrich Mescheder, Wolfgang Kronast, N. NaychukReliability Investigations in Micromechanical Devices
Volker BucherUntersuchungen zur Realisierung einer lichtadressierten elektrischen Kontaktierung elektrogener Zellen mit in sub-μm-Dimension frei wählbarem Ort

2001

Volker Bucher, Bernhard Brunner, Cornelia Leibrock, Markus Schubert, Wilfried NischElectrical properties of a light addressable microelectrode chip with high electrode density for extracellular stimulation and recording of excitable cells
Volker Bucher, Markus Schubert, Dieter Kern, Wilfried NischLight-addressed sub-μm electrodes for extracellular recording and stimulation of excitable cells
Ulrich Mescheder, M. Alavi, K. Hiltmann, Ch. Lizeau, Christoph Nachtigall, H. SandmaierLocal Laser Bonding for Low Temperature Budget
Christoph Nachtigall, Ulrich MeschederMovement giver
Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Istvan Barsony, Maria Adam, Cs. DücsöPorous silicon as multifunctional material in MEMS
Andras Kovacs, Ulrich MeschederSurface Micromachining Process for C-Si as Active Material

2000

Christoph Nachtigall, Ulrich MeschederBewegungsgeber
Ulrich MeschederMikrosystemtechnik : Konzepte und Anwendungen
M. Reichardt, Ulrich Mescheder, Nagy NosseirSimulation of a Micro-Fabricated Inclinometer

1999

Volker Bucher, Michael Graf, Martin Stelzle, Wilfried NischLow-impedance thin-film polycrystalline silicon microelectrodes for extracellular stimulation and recording
Ulrich Mescheder, Christiane KötterOptical monitoring and control of Si wet etching

1998

Ulrich Mescheder, Christiane KötterOptical monitoring and control of Si wet etching
Ulrich Mescheder, C. Kötter, E. Kolguin, A. OukhovOptische Insitu-Prozesskontrolle beim anisotropen Ätzen von Si-Membranen
Ulrich Mescheder, Christiane Kötter, B. KatzensteinPiezoelectric Inch Worm Motor with Monolithically Integrated Driving Block

1997

Volker BucherHerstellung und Charakterisierung von Dünnschicht-Mikroelektroden mit herkömmlichem und porösem Polysilizium
Ulrich Mescheder, S. MajerMicromechanical inclinometer

1996

Ulrich Mescheder, S. Majer, R. Keller2-Achsen Si-Neigungssensor: Simulation und Realisierung
Ulrich Mescheder, S. MajerMikromechanischer Neigungssensor für industrielle Anwendungen
E. A. Kolgin, I. A. Tumanov, A. A. Ukhov, Ulrich MeschederPhotometric device for control of micromechanical elements manufacturing

1995

S. Majer, Ulrich MeschederKonzept eines planaren 2-Achsen Silizium Neigungssensors
S. Majer, Ulrich MeschederSimulation supported design of micromechanical sensors
S. Majer, Ulrich MeschederSimulation supported design of micromechanical sensors

1991

L.-M. Buchmann, Ulrich Mescheder, M. TorklerCharacterization of silicon open stencil masks in an ion projection lithography machine
M. Zander, Ulrich MeschederMaskenmetrologie: Anforderungen und Trends

1990

Ulrich Mescheder, U. Mackens, H. Lifka, R. Dammel, G. Pawloski, J. TheisApplication of positive and negative tone x-ray resist for 0.5μm CMOS device fabrication
H. Schaffer, Ulrich Mescheder, U. Weigmann, H.-C. PetzoldInfluence of X-ray mask repair on pattern placement accuracy
H. Lüthje, A. Bruns, H. Harms, I. Köhler, Ulrich Mescheder, U. Mackens, T. StuckX-ray mask technology: Precise etching of sub-half-micron tungsten absorber features

1989

U. Mackens, Ulrich Mescheder, F. Mund, H. Lüthje, H. Lifka, C.A.H. Juffermans, P.H. Woerlee, A.J. WalkerFabrication of 0.5 μm NMOS-devices by all level X-ray lithography
Ulrich Mescheder, U. Mackens, F. MundInvestigation Of Linewidth Uniformity In X-Ray Lithography
U. Mackens, Ulrich Mescheder, H. LüthjeRöntgenstrahllithographie: Herstellung einer 0.5 μm Schaltung und Overlayuntersuchungen
S. Pongratz, Ulrich Mescheder, Ch. Ehrlich, H.-L. Huber, K. Kohlmann, W. WindbrackeState of the art of pattern placement accuracy of silicon X-ray master masks
Ulrich Mescheder, K. WernerSubmikrometer Linienbreitenmetrologie hoher Genauigkeit

1988

U. Mackens, H. Lüthje, Ulrich Mescheder, F. Mund, S. PongratzApplication Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices
H.-L. Huber, S. Pongratz, J. Trube, W. Windbracke, Ulrich Mescheder, F. MundSub‐half‐micron critical dimension control in x‐ray lithography mask technology

1987

Ulrich Mescheder, F. Mund, H.-L. HuberLinewidth metrology for x-ray masks with subhalfmicron feature size

1986

H. Betz, H.-L. Huber, S. Pongratz, W. Rohrmoser, W. Windbracke, Ulrich MeschederSilicon X-ray masks: Pattern placement and overlay accuracy
H. Lüthje, U. Mackens, Ulrich Mescheder, B. MatthießenStability of SiC-masks for high resolution synchrotron X-ray lithography

1985

Ulrich Mescheder, G. WeiserOptical study of space charge injection in plasma deposited a-Si:H

1984

Ulrich Mescheder, G. WeiserElectro‐optical effects on the absorption edge of a‐Si:H