Campus: Furtwangen
Room: B 1.09

Further information

Seit 1991 Professor an der Hochschule Furtwangen,
Leiter des Technologielabors für Mikro- und Nanosysteme,
Prorektor für Forschung der HFU (bis 29.02.2024),
Stellvertretender Sprecher des kooperativen Promotionskollegs „Generierungsmechanismen für Mikrostrukturen“ (in Kooperation mit der Universität Freiburg/IMTEK)
1985-1991 Philips Forschungslaboratorium Hamburg
1985 Dr. rer. nat an der Universität Marburg
1982 Dipl.-Phys., Festkörperphysik

Forschungsgebiete

Mikrosystemtechnik
Mikrosensoren
Mikroaktoren
Mikrooptik
Mikro- und Nanotechnologie

Autor und Mitautor von mehr als 150 Veröffentlichungen und sieben Patenten.

Autor des Lehrbuches Mikrosystemtechnik

Lehrgebiete

Optoelektronik
Werkstoffe der Elektrotechnik
Mikrotechnologie und Mikrofertigung
Photovoltaik
Sensoren und Aktuatoren

Publications

Mescheder, Ulrich

2023 | 2022 | 2021 | 2020 | 2019 | 2018 | 2017 | 2016 | 2015 | 2014 | 2013 | 2012 | 2011 | 2010 | 2009 | 2008 | 2007 | 2006 | 2005 | 2004 | 2003 | 2002 | 2001 | 2000 | 1999 | 1998 | 1997 | 1996 | 1995 | 1991 | 1990 | 1989 | 1988 | 1987 | 1986 | 1985 | 1984

2023
Sonja Müller, Ulrich Mescheder	Energy requirement and energy management for an active implant	MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany, 2023	BibTeX \| RIS
Alina Kohler, Felix Blendinger, Sonja Müller, Ulrich Mescheder, Volker Bucher	Feasibility of Parylene C for encapsulating piezoelectric actuators in active medical implants	Frontiers in Medical Technology, Vol.5.2023, 2023	BibTeX \| RIS DOI URN
Hakan Alaboz, Benjamin Sittkus, Divya D. Muley, Ulrich Mescheder	Finger position sensing on curved surfaces in braille displays	MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany, 2023	BibTeX \| RIS
Ashish Bhave, Benjamin Sittkus, Stefan J. Rupitsch, Ulrich Mescheder, Knut Möller	Finite Element Analysis of a High Compliant Balloon with Strain Sensing Segments for the Identification of Biomechanical Properties within Tubular Vessels	IFAC-PapersOnLine, 56.2023(2), pp. 8242-8247, 2023	BibTeX \| RIS DOI URN
Ashish Bhave, Benjamin Sittkus, Gerald Urban, Ulrich Mescheder, Knut Möller	Finite element analysis of the interaction between high-compliant balloon catheters and non-cylindrical vessel structures: towards tactile sensing balloon catheters	Biomechanics and Modeling in Mechanobiology, 22.2023(6), pp. 2033-2061, 2023	BibTeX \| RIS DOI URN
Isman M. Khazi, Jürgen Wilde, Gregor Neusser, Christine Kranz, Ulrich Mescheder	In situ analysis of electrochemical deposition kinetics for nanocrystalline nickel-cobalt alloys with varying bath hydrodynamics	Surface and Coatings Technology, 464.2023(July), 2023	BibTeX \| RIS DOI
Benjamin Sittkus, Ulrich Mescheder	In-situ SEM analysis tool for stretchable metal-elastomer-laminate-membranes for flexible sensors	MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany, 2023	BibTeX \| RIS
Almothana Albukhari, Ulrich Mescheder	Inchworm Motors and Beyond: A Review on Cooperative Electrostatic Actuator Systems	Actuators, 12.2023(4), p. 38, 2023	BibTeX \| RIS DOI URN
Przemyslaw Lopato, Michal Herbko, Ulrich Mescheder, Andras Kovacs	Influence of a thin dielectric layer on resonance frequencies of square SRR metasurface operating in THz band	Open Engineering, 13.2023(1), 2023	BibTeX \| RIS DOI URN
Przemyslaw Lopato, Michal Herbko, Paulina Gora, Ulrich Mescheder, Andras Kovacs, Alexander Filbert	Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality	Electronics, 12.2023(10), 2023	BibTeX \| RIS DOI URN
Sonja Müller, Stefan J. Rupitsch, Ulrich Mescheder	Study on Sensitivity and Accuracy of Piezoelectric Stack Actuators for Charge Self-Sensing	SMSI 2023 : Sensor and Measurement Science International, 8-11 May 2023, Nürnberg, Germany : Proceedings, pp. 372-373, 2023	BibTeX \| RIS 978-3-9819376-8-8, DOI
Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder	Surface Passivated Porous Silicon-Based Antireflective Coating	MikroSystemTechnik Kongress 2023, 23. - 25. Oktober 2023, Dresden, Germany, 2023	BibTeX \| RIS
2022
Sonja Müller, Stefan J. Rupitsch, Ulrich Mescheder	Experimental characterisation of a piezoelectrically actuated force amplifier using optical and self-sensing methods	ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications, June 29-30, 2022, Mannheim, Germany, pp. 274-277, 2022	BibTeX \| RIS 978-3-8007-5894-4,
Andras Kovacs, Julien Petit, Alexander Filbert, Ulrich Mescheder	Mikro- und Nanotechnologien machen Optik smart	2022	BibTeX \| RIS
Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder	Porous Silicon Based Ultra-Band infrared Antireflective and Light absorbing Coating	Porous Semiconductors - Science and Technology 2022, PSST2022, March 27th - April 1st, 2022, Lido di Camaire (Lucca), Italy, 2022	BibTeX \| RIS DOI
	The Upper-Rhine Artificial Intelligence Symposium UR-AI 2022 : AI Applications in Medicine and Manufacturing, 19 October 2022, Villingen-Schwenningen, Germany	Christoph Reich, Ulrich Mescheder (Eds.)2022	BibTeX \| RIS 978-3-00-073638-4, URN
2021
Ulrich Kallmann, Michael Lootze, Ulrich Mescheder	Charakterisierung und erste Anwendung eines MEMS-basierten adaptiven Zylinderspiegels	DGaO-Proceedings 2021 : 122. Jahrestagung der DGaO, 21. - 23. September 2021, Bremen, Germany, 2021	BibTeX \| RIS
Hakan Alaboz, Andras Kovacs, Yasser Safa, Ulrich Mescheder	Development of Cost-Effective Automated Test System for Determining Lifetime of Gold Contacts Under Mechanical Load	MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 738-741, 2021	BibTeX \| RIS 978-3-8007-5656-8,
Isman M. Khazi, Andras Kovacs, Ulrich Mescheder	Effect of Surface Roughness on the Adhesion of PECVD coated Silicon-Carbide Thin-films on (110) monocrystalline-Silicon wafer	MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 415-418, 2021	BibTeX \| RIS 978-3-8007-5656-8,
Ulrich Mescheder, Michael Lootze, Khaled Aljasem	Evaluation and Optimization of a MOEMS Active Focusing Device	Micromachines, 12.2021(2), 2021	BibTeX \| RIS DOI
Isman M. Khazi, Andras Kovacs, Ulrich Mescheder, Ali Zahedi, Bahman Azarhoushang	Fusion of Optical and Microfabricated Eddy-Current Sensors for the Non-Destructive Detection of Grinding Burn	Advances in Science, Technology and Engineering Systems Journal, 6.2021(1), pp. 1414-1421, 2021	BibTeX \| RIS DOI URN
Isman M. Khazi, Ulrich Mescheder, Jürgen Wilde	In situ Electroanalytical Modelling of the Influence of Bath Hydrodynamics on Nucleation Kinetics for Electrodeposition of Nickel-Cobalt Alloy System	SICT 2021, 7 - 9 April, 2021, Paris, France, Virtual Joint Conference, 2021	BibTeX \| RIS DOI
Isman M. Khazi, Andras Kovacs, Ulrich Mescheder	Inductive Transducers with 2D Microcoils in Reflection Differential Transmitter-Receiver Mode for the Micro Non-Destructive Testing of Grinding Burn	The 21st International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2021, 20 - 25 June 2021, online virtual conference, pp. 1202-1205, 2021	BibTeX \| RIS 978-1-6654-1267-4, DOI
Isman M. Khazi, Ulrich Mescheder, Jürgen Wilde	Influence of bath hydrodynamics on the micromechanical properties of electrodeposited nickel-cobalt alloys	Materials, 14.2021(14), 2021	BibTeX \| RIS DOI
Rui Zhu, Ulrike Wallrabe, Peter Woias, Matthias C. Wapler, Ulrich Mescheder	Influence of electrode design on actuation characteristics of cooperative DEAP actuators	ACTUATOR 21 : International Conference and Exhibition on New Actuator Systems and Applications, 17-19 February 2021, Online Conference, Germany, pp. 357-360, 2021	BibTeX \| RIS 978-3-8007-5454-0,
Almothana Albukhari, Ulrich Mescheder	Investigation of the Dynamics of a 2-DoF Actuation Unit Cell for a Cooperative Electrostatic Actuation System	Actuators, 10.2021(10), 2021	BibTeX \| RIS DOI URN
Benjamin Sittkus, Ulrich Mescheder, Gerald Urban	Processing method of thin metal-polymer laminate membranes and transfer to cylindrically shaped substrates for flexible sensors	MikroSystemTechnik Kongress 2021, 08. - 10. November 2021, Stuttgart-Ludwigsburg, Germany, pp. 430-433, 2021	BibTeX \| RIS 978-3-8007-5656-8,
Ulrich Kallmann, Michael Lootze, Ulrich Mescheder	Simulative and Experimental Characterization of an Adaptive Astigmatic Membrane Mirror	Micromachines, 12.2021(2), 2021	BibTeX \| RIS DOI URN
2020
Andras Kovacs, Isman M. Khazi, Ali Zahedi, Ulrich Mescheder, Bahman Azarhoushang	Development of an Optical Sensor for the Non-Destructive Testing of Grinding Burn	IEEE Sensors 2020, October 25-28, 2020, Rotterdam, Netherlands, 2020	BibTeX \| RIS
Isman M. Khazi, Andras Kovacs, Ali Zahedi, Christian Reser, Ulrich Mescheder, Bahman Azarhoushang, Christoph Reich	In situ Qualitätsbeurteilung von Schleifprozessen mittels Mikrosystemtechnik basierter Sensorfusion	ZfP heute : Wissenschaftliche Beiträge zur zerstörungsfreien Prüfung heute; Sonderband 2020, pp. 99-101, 2020	BibTeX \| RIS 978-3-947971-10-7,
Isman M. Khazi, Andras Kovacs, Ulrich Mescheder, Benjamin Sittkus, Rui Zhu	Kleiner, flexibler, leistungsfähiger	2020	BibTeX \| RIS
Isman M. Khazi, Andras Kovacs, Ali Zahedi, Ulrich Mescheder, Bahman Azarhoushang	Microfabricated Eddy-Current Sensors for Non-Destructive Testing of the Micro Grinding Burn	IEEE Sensors 2020, October 25-28, 2020, Rotterdam, Netherlands, 2020	BibTeX \| RIS
Isman M. Khazi, Andras Kovacs, Ulrich Mescheder	Microfabrication of 3D Free-Forms with Textured Surface Morphology in Monocrystalline Silicon using Grayscale Technology	Journal of Applied Material Science & Engineering Research, 4.2020(4), pp. 150-154, 2020	BibTeX \| RIS DOI
Isman M. Khazi, Andras Kovacs, Rui Zhu, Ulrich Mescheder	Optimization of Microfabricated 2D Planar Spiral Microcoils for the Micro NDT of Grinding Burn	Comsol Conference 2020 Europe, October 14–15, 2020	BibTeX \| RIS
Isman M. Khazi, Andras Kovacs, Ali Zahedi, Christian Reser, Ulrich Mescheder, Bahman Azarhoushang, Christoph Reich	Real time In-Situ Quality Monitoring of Grinding Process using Microtechnology based Sensor Fusion	2020 IEEE International Conference on Semiconductor Electronics (ICSE), Kuala Lumpur, Malaysia, 2020, pp. 180-184, 2020	BibTeX \| RIS DOI 978-1-7281-5968-3,
Andras Kovacs, Dagmar Martin, Alexander Filbert, Volker Bucher, Ulrich Mescheder	Single and Multilayer Atomic Layer Deposition on and into Mesoporous Silicon Layers	ECS Transactions, 98.2020(2), pp. 121-130, 2020	BibTeX \| RIS DOI
2019
Almothana Albukhari, Frederico Lima, Ulrich Mescheder	Bed-Embedded Heart and Respiration Rates Detection by Longitudinal Ballistocardiography and Pattern Recognition	Sensors, 19.2019(6), 2019	BibTeX \| RIS DOI URN
Rui Zhu, Ulrich Mescheder	Deap Based Actuator for Tactile and Microfluidics Applications	20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 23-27 June 2019, Berlin, Germany, pp. 2432-2435, 2019	BibTeX \| RIS 978-1-5386-8104-6, DOI
Alexander Bejan, Frederico Lima, Ulrike Lindwedel, Almothana Albukhari, Rui Zhu, Maab Inayah, Christophe Kunze, Ulrich Mescheder	Design und Evaluation eines low-cost Ambient-Assisted-Living-Sensorsystems zur ballistokardiografischen Messung der Vitalfunktionen und Aktivitäten älterer Bewohner	6. Ambient Medicine® Forum „Assistive Technik für selbstbestimmtes Wohnen", 19.-20. Februar 2019, pp. 15-22, 2019	BibTeX \| RIS 978-3-7369-9961-9,
Rui Zhu, Lennart Rubbert, Pierre Renaud, Ulrich Mescheder	Determination of a tactile feedback strategy for use in robotized percutaneous procedures	41st Annual International Conference of the IEEE Engineering in Medicine and Biology Society (EMBC), July 23 - 27, 2019, Berlin, Germany, pp. 5846-5850, 2019	BibTeX \| RIS 978-1-5386-1311-5, DOI
Frederico Lima, Isman M. Khazi, Ulrich Mescheder, Alok C. Tungal, Uma Muthiah	Fabrication of 3D microstructures using grayscale lithography	Advanced Optical Technologies, 8.2019(3-4), pp. 181-193, 2019	BibTeX \| RIS DOI
Benjamin Sittkus, Andras Kovacs, Ulrich Mescheder	Fabrication of a microfluidic system with columnar structures using DRIE for blood brain barrier applications	MikroSystemTechnik Kongress 2019 : Mikroelektronik \| MEMS-MOEMS \| Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 750-753, 2019	BibTeX \| RIS 978-3-8007-5090-0,
Benjamin Sittkus, Rui Zhu, Ulrich Mescheder	Flexible piezoresistive PDMS metal-thin-film sensor-concept for stiffness evaluation of soft tissues	IEEE International Conference on Flexible and Printable Sensors and Systems : FLEPS 2019, July 7 - 10, 2019, Glasgow, United Kindom, 2019	BibTeX \| RIS 978-1-5386-9304-9, DOI
Frederico Lima, Ulrich Mescheder, Harald Leiste, Müller Claas	Influence of current density on the adhesion of seedless electrodeposited copper layers on silicon	Surface and Coatings Technology, 375.2019(October), pp. 554-564, 2019	BibTeX \| RIS DOI
Isman M. Khazi, Ulrich Mescheder	Influence of electrochemical operating conditions on the microme-chanical properties of electrodeposited Nickel-Cobalt alloys for fabrication of microtools	MikroSystemTechnik Kongress 2019 : Mikroelektronik \| MEMS-MOEMS \| Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 599-602, 2019	BibTeX \| RIS 978-3-8007-5090-0,
Frederico Lima, Almothana Albukhari, Ulrich Mescheder	Machine Learning for Contactless Low-Cost Vital Signs Monitoring Systems	Artificial Intelligence: From Research to Application: The Upper-Rhine Artificial Intelligence Symposium UR-AI 2019, March 13th, 2019, Offenburg, Germany, pp. 95-99, 2019	BibTeX \| RIS 978-3-9820756-0-0,
Isman M. Khazi, Andras Kovacs, Vaibhav Kumar, Pranav Dhumal, Ulrich Mescheder	Microfabricated 2D planar eddy-current microcoils for the non-destructive testing of grinding burn marks	Non-destructive Testing and Diagnostics, pp. 29-35, 2019	BibTeX \| RIS DOI
Isman M. Khazi, Ulrich Mescheder	Micromechanical properties of anomalously electrodeposited nanocrystalline Nickel-Cobalt alloys: a review	Materials Research Express, 6.2019(8), pp. 1-25, 2019	BibTeX \| RIS DOI
Shervin Keshavarzi, Andras Kovacs, Mohammad Abdo, Vlad Badilita, Jan G. Korvink, Ulrich Mescheder	Miniaturized porous silicon rugate filter wheel for multispectral imaging applications	MikroSystemTechnik Kongress 2019 : Mikroelektronik \| MEMS-MOEMS \| Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 464-467, 2019	BibTeX \| RIS 978-3-8007-5090-0,
Shervin Keshavarzi, Andras Kovacs, Mohammad Abdo, Vlad Badilita, Rui Zhu, Jan G. Korvink, Ulrich Mescheder	Porous Silicon Based Rugate Filter Wheel for Multispectral Imaging Applications	ECS Journal of Solid State Science and Technology, 8.2019(3), pp. Q43-Q49, 2019	BibTeX \| RIS DOI URN
Shervin Keshavarzi, Andras Kovacs, Ulrich Mescheder	Porous silicon based antireflection coating for the MWIR range	MikroSystemTechnik Kongress 2019 : Mikroelektronik \| MEMS-MOEMS \| Systemintegration – Säulen der Digitalisierung und künstlichen Intelligenz 28. – 30. Oktober 2019 in Berlin, pp. 487-490, 2019	BibTeX \| RIS 978-3-8007-5090-0,
Rui Zhu, Ulrike Wallrabe, Peter Woias, Matthias C. Wapler, Ulrich Mescheder	Semi-rigid ring-shaped electrode dielectric electroactive polymer membrane as buckling actuator	Journal of Micromechanics and Microengineering, 29.2019(5 Aufsatz 055001), 2019	BibTeX \| RIS DOI
2018
Isman M. Khazi, Ulrich Mescheder, Uma Muthiah	3D free forms in c-Si via grayscale lithography and RIE	Microelectronic Engineering, 193.2018(June), pp. 34-40, 2018	BibTeX \| RIS DOI
Frederico Lima, Almothana Albukhari, Rui Zhu, Ulrich Mescheder	Contactless Sleep Monitoring Measurement Setup	XXXII Eurosensors 2018, September 9-12, 2018, Graz, Austria, 2018	BibTeX \| RIS
Frederico Lima, Almothana Albukhari, Rui Zhu, Ulrich Mescheder	Contactless Sleep Monitoring Measurement Setup	Eurosensors 2018: Graz, Austria, 9-12 September 2018, Proceedings, Volume 2, 2018	BibTeX \| RIS DOI
Frederico Lima, Ulrich Mescheder, C. Müller, Holger Reinecke	Copper electrodeposition on silicon electrodes	International Journal of Surface Science and Engineering, 12.2018(2), pp. 99-118, 2018	BibTeX \| RIS DOI
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke	Formation Mechanisms of Self-Organized Needles in Porous Silicon Based Needle-Like Surfaces	Journal of The Electrochemical Society, 165.2018(3), pp. E108-E114, 2018	BibTeX \| RIS DOI URN
Frederico Lima, Ulrich Mescheder, Gabor L. Katona, Harald Leiste, Emre Özel, Claas Müller, Holger Reinecke	Influence of silicon doping type on the adhesion of seedless electrodeposited copper layers	Surface and Coatings Technology, 349.2018(September), pp. 208-216, 2018	BibTeX \| RIS DOI
Ulrich Mescheder, Shervin Keshavarzi, Surjitsinh Chauhan	New concepts for miniaturized MEMS based power systems	IEEE CANDO-EPE 2018 proceedings : IEEE International Conference and Workshop in Óbuda on Electrical and Power Engineering : November 20-21, 2018, Budapest, Hungary, pp. 000033-000038, 2018	BibTeX \| RIS 978-1-7281-1154-4, DOI
Shervin Keshavarzi, Frederico Lima, Wolfgang Kronast, Ulrich Mescheder	Sequential Nano-Explosion Using Patterned Porous Silicon	Journal of Microelectromechanical Systems, 27.2018(2), pp. 250-258, 2018	BibTeX \| RIS DOI
Andras Kovacs, Ulrich Mescheder	Thin Photonic Crystals for Optical Characterization of Ultrathin Hafnium Dioxide in Mesoporous Layers	IEEE Sensors 2018, October 28 - 31, 2018, New Dehli, India, Conference Proceedings, 2018	BibTeX \| RIS DOI 978-1-5386-4707-3,
Andras Kovacs, Shervin Keshavarzi, A. O. Perez, Stefan Palzer, Ulrich Mescheder	Tunable Light Source for Photoacoustic Sensing Applications	IEEE Sensors 2018, October 28 - 31, 2018, New Dehli, India, Conference Proceedings, 2018	BibTeX \| RIS 978-1-5386-4707-3, DOI
2017
Uma Muthiah, Isman M. Khazi, Ulrich Mescheder	3D Strukturierung von Silizium mittels Grauwert-Technologie	MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München, pp. 692-695, 2017	BibTeX \| RIS 978-3-8007-4491-6,
Shervin Keshavarzi, Wolfgang Kronast, Frederico Lima, Ulrich Mescheder	Controlled energy release based on explosive porous silicon	MEMS 2017: The 30th IEEE International Conference on Micro Electro Mechanical Systems, January 22 - 26, 2017, Las Vegas, USA, pp. 712-715, 2017	BibTeX \| RIS 978-1-5090-5079-6, DOI
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke	Effect of Capillary Forces in Room Temperature Si-Si Direct Bonding Technique Using Velcrolike Surfaces	Journal of Microelectromechanical Systems, 26.2017(2), pp. 385-395, 2017	BibTeX \| RIS DOI
Shervin Keshavarzi, Frederico Lima, Wolfgang Kronast, Ulrich Mescheder	Energieversorgung für mobile miniaturisierte Systeme	2017	BibTeX \| RIS
Frederico Lima, Alok Tungal, Isman M. Khazi, Ulrich Mescheder	Galvanisch aus 3D-Fotolack-Strukturen abgeformte metallische 3D-Freiformen	MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München, pp. 375-378, 2017	BibTeX \| RIS 978-3-8007-4491-6,
Dirk Benyoucef, Vera Kallfaß, Andras Kovacs, Ulrich Mescheder, Stefan Palzer	Mikrosystemtechnische Geruchssensorik und ihre Anwendungen in AAL	Assistive Systeme und Technologien zur Förderung der Teilhabe für Menschen mit Hilfebedarf : Ergebnisse aus dem Projektverbund ZAFH-AAL, Pabst Science Publisher: Lengerich, pp. 51-66, 2017	BibTeX \| RIS 978-3-95853-362-2,
Andras Kovacs, Alexey Ivanov, Ulrich Mescheder	Schmalbandige photonische Kristalle für Multispektral-Analyse	MikroSystemTechnik Kongress 2017: MEMS, Mikroelektronik, Systeme, 23. – 25. Oktober 2017 in München, pp. 836-839, 2017	BibTeX \| RIS 978-3-8007-4491-6,
2016
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder	Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments	Procedia Engineering, Vol.168.2016, pp. 1180-1183, 2016	BibTeX \| RIS DOI
Rui Zhu, Ulrike Wallrabe, Matthias C. Wapler, Peter Woias, Ulrich Mescheder	Dielectric electroactive polymer membrane actuator with ring-type electrode as driving component of a tactile actuator	Procedia Engineering, pp. 1537-1540, 2016	BibTeX \| RIS DOI
Ulrich Mescheder, Alok Tungal, Frederico Lima	Electroplated 3D metal free forms casted from 3D photoresist molds	42nd International Conference on Micro and Nano Engineering, September 19-23, 2016, Vienna, Austria, 2016	BibTeX \| RIS DOI
Isman M. Khazi, Ulrich Mescheder	Influence of Anode to Cathode Distance on the Alloy Composition in Anomalously Electrodeposited Nickel-Cobalt Alloys	Electrochemistry from sense to sustainability: the 67th Annual Meeting of the International Society of Electrochemistry, 21-26 August, 2016, The Hague, The Netherlands, 2016	BibTeX \| RIS
Victor V. Lyubimov, Vladimir M. Volgin, Ulrich Mescheder, Inna V. Gnidina, Alexey Ivanov	Investigation of plastic electrode tools for electrochemical machining of silicon	Precision Engineering, Vol.47.2016, pp. 546-556, 2016	BibTeX \| RIS DOI
Alvaro O. Pérez, Vera Kallfaß-de Frenes, Alexander Filbert, Janosch Kneer, Benedikt Bierer, Pirmin Held, Philipp Klein, Jürgen Wöllenstein, Dirk Benyoucef, Sigrid Kallfaß, Ulrich Mescheder, Stefan Palzer	Odor-Sensing System to Support Social Participation of People Suffering from Incontinence	Sensors, 17.2017(1), 2016	BibTeX \| RIS DOI URN
Andras Kovacs, Ulrich Mescheder	PSi-based Diffusion Membranes	Porous Silicon: Biomedical and Sensor Applications, Volume Two, Ghenadii Korotcenkov (Ed.)CRC Press: Boca Raton, pp. 279-298, 2016	BibTeX \| RIS 978-1-4822-6456-2,
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke	Room Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces	Journal of Microelectromechanical Systems, 25.2016(2), pp. 371-379, 2016	BibTeX \| RIS DOI
Alexey Ivanov, Ulrich Mescheder	Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices	Porous Silicon: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three, Ghenadii Korotcenkov (Ed.)CRC Press: Boca Raton, pp. 129-141, 2016	BibTeX \| RIS 978-1-4822-6458-6,
2015
Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Bernhard Müller, Alexey Ivanov	Adaptiver optischer Filter bzw. spektral einstellbare Lichtquelle	2015	BibTeX \| RIS
Frederico Lima, Holger Reinecke, Ulrich Mescheder	Adhesion of Continuous and Homogeneous Electrodeposited Copper Layers on Silicon	MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 409-412, 2015	BibTeX \| RIS 978-3-8007-4100-7,
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke	Bonding Mechanism in the Velcro Concept Si-Si Low Temperature Direct Bonding Technique	28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Estoril, 2015, pp. 413-416, 2015	BibTeX \| RIS DOI 978-1-4799-7955-4,
Isman M. Khazi, Ulrich Mescheder, Zohaib Siddiqui	Characterization of the influence of Sodium-Lauryl-Sulfate on the surface quality of electrodeposited Nickel-Cobalt alloys	MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 436-439, 2015	BibTeX \| RIS 978-3-8007-4100-7,
Ulrich Mescheder, Isman M. Khazi	Corner rounding of sharp silicon punching tool edges by local oxidation of silicon	Microelectronic Engineering, 141.2015(2), pp. 178-183, 2015	BibTeX \| RIS DOI
Thomas Bier, Dirk Benyoucef, Wolfgang Kronast, Ulrich Mescheder	MEMS-Geruchssensorik zur Unterstützung von Pflege und diskretem Leben	2015	BibTeX \| RIS
Paul Walden, Janosch Kneer, Stefan Knobelspies, Wolfgang Kronast, Ulrich Mescheder, Stefan Palzer	Micromachined Hotplate Platform for the Investigation of Ink-Jet Printed, Functionalized Metal Oxide Nanoparticles	Journal of Microelectromechanical Systems, 24.2015(5), pp. 1384-1390, 2015	BibTeX \| RIS DOI
Alexey Ivanov, Isman M. Khazi, Andras Kovacs, Ulrich Mescheder	Miniaturisiertes Spektrometer für neue Ansätze in der Analytik	2015	BibTeX \| RIS
Ulrich Mescheder, Rui Zhu	Miniaturisiertes taktiles Mensch-Maschine-Interface	2015	BibTeX \| RIS
Wolfgang Kronast, Volker Lange, Rolf Huster, Ulrich Mescheder	Optische Charakterisierung von Stress-relaxierten aktiven MOEMS-Membranspiegeln mit großer Apertur	MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 523-526, 2015	BibTeX \| RIS 978-3-8007-4100-7,
Alexey Ivanov, Ulrich Mescheder	Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening	Proceedings of the 2015 COMSOL Conference, Grenoble, 2015	BibTeX \| RIS 978-0-9910001-2-8,
Andras Kovacs, Alexey Ivanov, Ulrich Mescheder	Refractometer Using Photonic Crystals for Fermentation Process Characterization	IEEE SENSORS, Busan, 2015, pp. 1363-1366, 2015	BibTeX \| RIS DOI
Isman M. Khazi, Ulrich Mescheder	Self-aligning micro punch-die tool-system for high precision blanking of thin metal foils	MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 429-432, 2015	BibTeX \| RIS 978-3-8007-4100-7,
Surjitsinh Chauhan, Bernhard Müller, Ulrich Mescheder	Simulation, Fabrication and Characterization of Robust Vibrational Energy Harvester	Procedia Engineering, pp. 349-354, 2015	BibTeX \| RIS DOI
Isman M. Khazi, Ulrich Mescheder	Surface polishing of rough (110) silicon plane by HNA etching resulting from wet anisotropic KOH etching	MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 417-420, 2015	BibTeX \| RIS 978-3-8007-4100-7,
Andras Kovacs, Philipp Maurer, Ulrich Mescheder	Temperatureinfluss auf die Peakposition bei verschiedenen Umgebungsmedien in Porösen Silizium Multilayerschichten	MEMS, Mikroelektronik, Systeme : proceedings ; MikroSystemTechnik Kongress 2015, 26.-28. Oktober 2015 in Karlsruhe, pp. 547-550, 2015	BibTeX \| RIS 978-3-8007-4100-7,
Andras Kovacs, Alexey Ivanov, Ulrich Mescheder	Tunable Narrow Band Porous Photonic Crystals for MOEMS Based Scanning Systems	Procedia Engineering, pp. 811-815, 2015	BibTeX \| RIS DOI
Ulrich Mescheder	Zentrum für Angewandte Forschung: Assistive Systeme und Technologien zur Sicherung sozialer Beziehungen und Teilhabe für Menschen mit Hilfebedarf: Teilprojekt 2: µ - AAL - Entwicklung eines miniaturisierten Körpergeruchssensors	2015	BibTeX \| RIS
2014
Rui Zhu, Ulrich Mescheder, Frederico Lima	Actuation concept for miniaturized tactile systems	1. Baden-Württemberg Center of Applied Research Symposium on Information and Communication Systems: SInCom 2014; 12. December 2014 in Furtwangen, pp. 44-49, 2014	BibTeX \| RIS 978-3-00-048182-6,
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke	Characterisation and simulation of low temperature Si-Si direct bonding through velcro-like surfaces based on porous silicon	MEMS 2014: The 27th IEEE International Conference on Micro Electro Mechanical Systems, January 26-30, 2014, San Francisco, pp. 1119-1122, 2014	BibTeX \| RIS 978-1-4799-3509-3, DOI
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster	Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology	Journal of Micro/Nanolithography, MEMS, and MOEMS, 13.2014(1), 2014	BibTeX \| RIS DOI
Frederico Lima, Ulrich Mescheder, Holger Reinecke	Electrochemical Impedance Spectroscopy of n-Si(100) Pre-etched by KOH or BHF	10th International Symposium on Electrochemical Impedance Analysis, June 1-5, 2014, Borovets, Bulgaria, 2014	BibTeX \| RIS
Alexey Ivanov, Ulrich Mescheder, Peter Woias	Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process	ECS Transactions, 58.2014(46), pp. 15-24, 2014	BibTeX \| RIS
Ulrich Mescheder	Forschungsgebiet Mikrosystemtechnik im Forschungsschwerpunkt Smart Systems	Forschungsreport ... für die Elektrotechnik in Baden-Württemberg, pp. 48-51, 2014	BibTeX \| RIS
Ulrich Mescheder, Isman M. Khazi, Andras Kovacs, Alexey Ivanov	MOEMS based concept for miniaturized monochromators, spectrometers and tunable light sources	1. Baden-Württemberg Center of Applied Research Symposium on Information and Communication Systems: SInCom 2014; 12. December 2014 in Furtwangen, pp. 38-43, 2014	BibTeX \| RIS 978-3-00-048182-6,
Frederico Lima, Ulrich Mescheder, Holger Reinecke	Maskless Selective Electrodeposition on Silicon	The 65th Annual Meeting of the International Society of Electrochemistry: Ubiquitous Electrochemistry; 31 August-5 September 2014, Lausanne, Switzerland, 2014	BibTeX \| RIS
Laszlo Becsi, Thomas Bier, Wolfgang Kronast, Ulrich Mescheder, Dirk Benyoucef	Miniaturisiertes Impulslärm-Dosimeter zur Untersuchung und Vermeidung von Gehörschädigungen bei Menschen	SENSOREN UND MESSSYSTEME: 17. ITG/GMA-Fachtagung, 3.-4. Juni 2014, Nürnberg, Convention Center, 2014	BibTeX \| RIS
Nigol Kaste, Alexander Filbert, Ulrich Mescheder, Toomas Rang, Galina Rang	Process Development For 3D Laser Lithography	WIT Transactions on The Built Environment, Vol.137.2014, pp. 139-150, 2014	BibTeX \| RIS DOI URN
Ulrich Mescheder, Isman M. Khazi, Andras Kovacs, Alexey Ivanov	Tunable optical filters with wide wavelength range based on porous multilayers	Nanoscale Research Letters, p. 427, 2014	BibTeX \| RIS DOI URN
2013
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller	Developement of stress relief suspensions for micro-machined silicon membranes	COMSOL Conference 2013, 23–25 October 2013, Rotterdam, Netherlands, 2013	BibTeX \| RIS
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster	Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology	Proceedings of SPIE: Volume 8616; MOEMS and Miniaturized Systems XII, 2-6 Februar 2013, San Francisco, California, United States, 2013	BibTeX \| RIS DOI
Andras Kovacs, Aina Malisauskaite, Ulrich Mescheder	Einfluss der Morphologie auf die Sensitivität eines photonischen Biosensors	Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 818-821, 2013	BibTeX \| RIS 978-3-8007-3555-6,
Ulrich Mescheder, Bernhard Müller, Antwi Nimo, Awad S. Abou Elkeir	Energy Harvesting: Silizium-Chip zum Ernten von Energie aus Vibration	2013	BibTeX \| RIS
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster	Entwicklung einer Stressausgleichsstruktur für spannungsarme aktive Membranspiegel in SOI Technologie	Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 432-435, 2013	BibTeX \| RIS 978-3-8007-3555-6,
Laszlo Becsi, Dirk Benyoucef, Thomas Bier, Wolfgang Kronast, Ulrich Mescheder	Entwicklung eines Impulslärm-Dosimeters zur Untersuchung von Gehörschädigungen bei Menschen	Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 578-581, 2013	BibTeX \| RIS 978-3-8007-3555-6,
Laszlo Becsi, Wolfgang Kronast, Ulrich Mescheder, Thomas Bier, Dirk Benyoucef	Miniaturisiertes Impulslärm-Dosimeter zur Untersuchung und Vermeidung von Gehörschädigungen	2013	BibTeX \| RIS
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke	Modeling the adhesion between nanoneedle surfaces bonded based on Velcro or Gecko principle	Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 864-867, 2013	BibTeX \| RIS 978-3-8007-3555-6,
Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder, Rainer Wittig	Optical sensing and analysis system based on porous layers	17th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS), 27-31 October 2013, Freiburg, Germany, pp. 275-277, 2013	BibTeX \| RIS 978-1-63266-624-6,
Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder	Portable Optical Sensor Using Tunable Optical Multilayers	Sensors 2013, November 4-6, 2013, Baltimore, Maryland, USA: IEEE; Proceedings, pp. 1691-1694, 2013	BibTeX \| RIS 978-1-4673-4642-9, DOI
Ulrich Mescheder, Qingyun Gu, Bernhard Müller	Preiswerter und robuster Harvester für Vibrationsenergie	Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 107-110, 2013	BibTeX \| RIS 978-3-8007-3555-6,
Rui Zhu, Aina Malisauskaite, Ulrich Mescheder, Ulrike Wallrabe	Proof of Concept and Properties of Micro Hydraulic Displacement Amplifier	COMSOL Conference 2013, 23–25 October 2013, Rotterdam, Netherlands, 2013	BibTeX \| RIS
Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder	Steuerung der Peaklage und der Sensitivität von siliziumbasierten porösen optischen Multischichten	Von Bauelementen zu Systemen : proceedings / Mikrosystemtechnik-Kongress 2013, 14. - 16. Oktober 2013 in Aachen, pp. 185-188, 2013	BibTeX \| RIS 978-3-8007-3555-6,
Ulrich Mescheder, Rolf Huster, Rui Zhu	Technische Unterstützung für Blinde zur sicheren Bewegung in unbekanntem Umfeld 2. Mikrosystemtechnischer taktiler Informationsgeber für ein Blindennavigationssystem	2013	BibTeX \| RIS
Andras Kovacs, Wolfgang Kronast, Alexander Filbert, Ulrich Mescheder	Transport in Surface Passivated Porous Silicon Membranes	ECS Transactions, 50.2013(37), pp. 207-216, 2013	BibTeX \| RIS
2012
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke, Andras Kovacs	Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration	23rd Micromechanics and Microsystems Europe Workshop: MME 2012, September 9 - 12, Ilmenau, Germany, 2012	BibTeX \| RIS
Alexey Ivanov, Ulrich Mescheder	Dynamic Simulation of Electrochemical Etching of Silicon with COMSOL	Proceedings COMSOL Conference, Milan, Italy, 10.-12.10.2012, 2012	BibTeX \| RIS
S. Hildering, Laszlo Becsi, U. Engel, M. Merklein, Ulrich Mescheder	Experimental investigations on high-precision microcutting of copper foils with microfabricated silicon punches	Proceedings of the 12th international conference of the european society for precision engineering and nanotechnology, June 4th - 7th 2012, Stockholm, Sweden, Volume II, pp. 177-180, 2012	BibTeX \| RIS 978-0-9566790-0-0,
Ulrich Mescheder, Antwi Nimo, Bernhard Müller, Awad S. Abou Elkeir	Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy	Microsystem Technologies, 18.2012(7-8), pp. 931-943, 2012	BibTeX \| RIS DOI
Thomas Bruns, Laszlo Becsi, Ulrich Mescheder, Herbert Schneckenburger	Microfluidic system for single cell sorting based on deflection by optical tweezers	Focus on Microscopy 2012, Singapore, April 1 - April 4, 2012, 2012	BibTeX \| RIS
Andras Kovacs, Alexey Ivanov, Aina Malisauskaite, Ulrich Mescheder	Oberflächenstabilisierung nanostrukturierter poröser Siliziumschichten für sensorische Anwendungen	74. Mikro-Nano-Integration : Beiträge des 4. GMM-Workshops, 12. - 13. November 2012 in Berlin, 2012	BibTeX \| RIS 978-3-8007-3473-3,
Frederico Lima, Ulrich Mescheder, Holger Reinecke	Simulation of Current Density for Electroplating on Silicon Using a Hull Cell	Proceedings COMSOL Conference, Milan, Italy, 10.-12.10.2012, 2012	BibTeX \| RIS
S. Hildering, Laszlo Becsi, M. Merklein, Ulrich Mescheder	Tranciatura ad alta precisione con punzoni in silicio	Lamiera, pp. 44-48, 2012	BibTeX \| RIS
Andras Kovacs, Ulrich Mescheder	Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications	Sensors and Actuators B: Chemical, 175.2012(December), pp. 179-185, 2012	BibTeX \| RIS DOI
2011
Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad S. Abou Elkeir	3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls	Proceedings of SPIE: Volume 8066; Smart Sensors, Actuators, and MEMS V, 18-20 April 2011, Prague, Czech Republic, 2011	BibTeX \| RIS 978-0-8194-8655-4, DOI
Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad S. Abou Elkeir	A device for 3D energy harvesting	SPIE Newsroom, 2011	BibTeX \| RIS DOI
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Antwi Nimo, Claus Braxmaier	Entwicklung eines quasistatischen Mikrodrehspiegels für Laserinterferometrie	2011	BibTeX \| RIS
Andras Kovacs, Ulrich Mescheder	Herstellung und Charakterisierung perforierter und poröser Membranmodulen für Mikro- und Nanofiltration	MikroSystemTechnik - Kongress 2011: 10. - 12. Oktober 2011, Darmstadt, 2011	BibTeX \| RIS 978-3-8007-3367-5,
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder	High quality 3D shapes by silicon anodization	physica status solidi (a), 208.2011(6), pp. 1383-1388, 2011	BibTeX \| RIS DOI
Prasad Jonnalagadda, Ulrich Mescheder, Andras Kovacs, Antwi Nimo	Nanoneedles based on porous silicon for chip bonding with self assembly capability	physica status solidi (c), 8.2011(6: Special Issue: 7th International Conference on Porous Semiconductors – Science and Technology (PSST 2010) • EnFI 2010 Conference – Engineering of Functional Interfaces), pp. 1841-1846, 2011	BibTeX \| RIS DOI
Ting Yuan, Ulrich Mescheder, Wolfgang Kronast, Changlong Wang	Optimization of Deformation Shape of an Active Electro-Optical Focusing Device	Advanced Materials Research, pp. 3116-3120, 2011	BibTeX \| RIS DOI
Ulrich Mescheder, Prasad Jonnalagadda, Andras Kovacs, X. Meng	Optischer Biosensor mittels selbstorganisierter nanostrukturierte Multilayerschichten	2011	BibTeX \| RIS
Andras Kovacs, Prasad Jonnalagadda, Ulrich Mescheder	Optoelectrical detection system using porous silicon-based optical multilayers	IEEE Sensors Journal, 11.2011(10), pp. 2413-2420, 2011	BibTeX \| RIS DOI
Alexey Ivanov, Ulrich Mescheder	Silicon Electrochemical Etching for 3D Microforms with High Quality Surfaces	Advanced Materials Research, Vol.325.2011, pp. 666-671, 2011	BibTeX \| RIS DOI
2010
Antwi Nimo, Ulrich Mescheder	3-D capacitive vibrational harvester for autonomous low power sensors	Proceedings of PowerMEMS 2010, Nov 30-Dec 3, Leuven, Belgium, pp. 49-52, 2010	BibTeX \| RIS
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Antwi Nimo, Claus Braxmaier, Thilo Schuldt	Development of a tilt actuated micromirror for applications in laser interferometry	Proceedings of SPIE: Volume 7594; SPIE MOEMS-MEMS, 2010, San Francisco, California, United States, 2010	BibTeX \| RIS 978-0-8194-7990-7, DOI
Awad Saad, Ulrich Mescheder, Bernhard Müller, Antwi Nimo	High eficient, low cost electret charging set-up for mems based energy harvesting systems	Proceedings of PowerMEMS 2010, Nov 30-Dec 3, Leuven, Belgium, pp. 61-64, 2010	BibTeX \| RIS
Thomas Bruns, Laszlo Becsi, Marc Talkenberg, Michael Wagner, Petra Weber, Ulrich Mescheder, Herbert Schneckenburger	Microfluidic system for single cell sorting with optical tweezers	Proceedings of SPIE: Volume 7376; Laser Applications in Life Sciences 2010, Oulu, Finland, 2010	BibTeX \| RIS DOI 9780819476524,
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder	Nasschemisches Ätzen von nahezu beliebigen 3D-Strukturen in Silizium	63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany, 2010	BibTeX \| RIS 978-3-8007-3216-6,
Ulrich Mescheder, Prasad Jonnalagadda, Andras Kovacs, X. Meng	Optischer Biosensor mittels selbstorganisierter nanostrukturierte Multilayerschichten	63. Mikro-Nano-Integration - 2. GMM-Workshops 03.03.2010 - 04.03.2010 in Erfurt, Germany, pp. 105-110, 2010	BibTeX \| RIS 978-3-8007-3216-6,
Andras Kovacs, Ulrich Mescheder, Prasad Jonnalagadda, X. Meng	Optisches Messsystem für biosensorische Anwendungen	Sensoren und Messsysteme 2010 : Vorträge der 15. ITG-GMA-Fachtagung vom 18. bis 19. Mai 2010 in Nürnberg, 2010	BibTeX \| RIS 978-3-8007-3260-9,
Simon Ressel, Martin Gohlke, Dominik Rauen, Thilo Schuldt, Wolfgang Kronast, Ulrich Mescheder, Ulrich Johann, Dennis Weise, Claus Braxmaier	Ultrastable assembly and integration technology for ground- and space-based optical systems	Applied Optics, 49.2010(22), pp. 4296-4303, 2010	BibTeX \| RIS
2009
Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich Mescheder	Characterization of porous silicon based optical sensor system for biosensor applications	IEEE Sensors 2009 Conference, New Zealand, 25-28 October, 2009, Christchurch, New Zealand, pp. 21-26, 2009	BibTeX \| RIS 978-1-4244-4548-6, DOI
Herbert Schneckenburger, Rainer Börret, Claus Braxmaier, Rudolf Kessler, Petra Kioschis, Dietrich Kühlke, Ulrich Mescheder, Werner Schröder, Christoph Nachtigall	Dem Energiestoffwechsel von Tumorzellen und Bioreagenzien auf der Spur	BioPhotonik, pp. 26-28, 2009	BibTeX \| RIS
Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich Mescheder	Entwicklung und Charakterisierung von photonischen Multischichten aus porösem Silizium für biosensorische Anwendungen	MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009	BibTeX \| RIS 978-3-8007-3183-1,
Alexey Ivanov, Ulrich Mescheder, Peter Woias, Michael Kröner	Formation of arbitrarily shaped 3D-forms in silicon by electrochemical wet-etching	2009	BibTeX \| RIS
Andras Kovacs, Dirk Meister, Ulrich Mescheder	Investigation of humidity adsorption in porous silicon layers	physica status solidi (a), 206.2009(6), pp. 1343-1347, 2009	BibTeX \| RIS DOI
Ulrich Mescheder, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Christoph Ament, Andreas Peter	Mikrostrukturierter Sensorarray zur Luftqualitätsmessung (MOSEL)	Dokumentation zum Forschungstag 2009 "Hochtechnologieforschung": 7. Juli 2009, Kultur- und Kongresszentrum, Liederhalle Stuttgart, p. 169, 2009	BibTeX \| RIS
Thomas Link, Ulrich Mescheder	Mikrotechniken für den wirtschaftlichen Erfolg	2009	BibTeX \| RIS
Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo	Nanostrukturierte Siliziumoberflächen für Mikro-Nano-Integration	MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009	BibTeX \| RIS 978-3-8007-3183-1,
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder, S. Kuhn, M. Kübler, A. Burr	Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements	MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009	BibTeX \| RIS 978-3-8007-3183-1,
Ulrich Mescheder, Bernhard Müller, Safi Baborie, P. Urbanovic	Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems	Journal of Micromechanics and Microengineering, 19.2009(9), 2009	BibTeX \| RIS DOI
Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo	Selbstjustierendes Bondverfahren unter Verwendung nanostrukturierter Oberflächen	2009	BibTeX \| RIS
Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo, David Kauzlaric, Jan Lienemann, Andreas Greiner, Jan Korvink, Markus Freudenreich	Skalierbare Verbindungstechnik mittels anpassbarer nanoskaliger Verbindungsstrukturen (NanoBond)	2009	BibTeX \| RIS
Ulrich Mescheder, Safi Barborie, Bernhard Müller	Smart Energy: Miniaturisierte Energieversorung für autarke mikroelektronische und Mikro-Systeme	2009	BibTeX \| RIS
Wolfgang Kronast, Ulrich Mescheder, Rolf Huster	Stressuntersuchung und Optimierung von SOI basierten Membranen	MikroSystemTechnik - KONGRESS 2009: 12.10.2009 - 14.10.2009 in Berlin, Germany, 2009	BibTeX \| RIS 978-3-8007-3183-1,
Ulrich Mescheder, Dietrich Kühlke	Zentrum für Angewandte Forschung Photon hoch n: Photonische Verfahren in neuen Dimensionen	2009	BibTeX \| RIS
2008
Ulrich Mescheder, P. Urbanovic, Bernhard Müller, Safi Baborie	Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems	Proceedings of PowerMEMS 2008 + microEMS2008, Sendai, Japan, November 9-12, (2008), pp. 501-504, 2008	BibTeX \| RIS
Adam Kovacs, Andras Kovacs, Ulrich Mescheder	Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations	Computational Materials Science, 43.2008(1), pp. 59-64, 2008	BibTeX \| RIS DOI
Alexey Ivanov, Ulrich Mescheder, M. Kröner, Peter Woias	Formation of Arbitrarily Shaped 3D-Forms in Silicon by 315 Electrochemical Wet-Etching	Technical digest / MME 2008, 19th MicroMechanics Europe Workshop, September 28 - 30, 2008, Aachen, Germany, pp. 315-318, 2008	BibTeX \| RIS 978-3-00-025529-8,
	HFU Forscher top	VS Campus: Magazin der Hochschule Furtwangen für Villingen-Schwenningen und Furtwangen, pp. 7-18, 2008	BibTeX \| RIS
T. Hellmuth, Konstantin Khrennikov, Wolfgang Kronast, Rolf Huster, Ulrich Mescheder	Optimisation and characterisation of parabolic membrane mirrors	Proceeedings of SPIE: Volume 6993; MEMS, MOEMS, and Micromachining III, 9–10 April 2008, Strasbourg, France, 2008	BibTeX \| RIS DOI 978-0-8194-7191-8,
2007
Daniela Kögler, Rolf Huster, Wolfgang Kronast, Ulrich Mescheder	Aufbau- und Verbindungstechnik für ein mikrooptisches System	Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007	BibTeX \| RIS 978-3-8007-3061-2,
Alexey Ivanov, Ulrich Mescheder, Andras Kovacs, Rolf Huster	Einfluss unterschiedlicher Passivierungsschichten auf die Bildungsrate von porösem Silizium an Strukturkanten bei der 3DFormherstellung	Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007	BibTeX \| RIS 978-3-8007-3061-2,
Ulrich Mescheder, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Andreas Peter, Christoph Ament, Sven Rademacher, Jürgen Wöllenstein	MEMS-Based Air Quality Sensor	Transducers '07 Eurosensors XXI : digest of technical papers ; the 14th International Conference on Solid-State Sensors, Actuators and Microsystems, June 10-14, 2007, Lyon, France, pp. 1417-1420, 2007	BibTeX \| RIS 1-4244-0841-5, DOI
Andras Kovacs, Adam Kovacs, M. Pogany, Ulrich Mescheder	Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications	Sensors and Actuators B: Chemical, 127.2007(1), pp. 120-125, 2007	BibTeX \| RIS DOI
Ulrich Mescheder	Mikrosystemtechnik: Ergebnisse aus dem Forschungsnetzwerk ZeMiS (Zentrum für Mikrotechnik und Systemintegration)	2007	BibTeX \| RIS
Andras Kovacs, Adam Kovacs, Marton Pogany, Ulrich Mescheder	Mikrosystemtechnik: Herstellung perforierter und poröser Membranmodule für die Mikro- und Nanofiltration	2007	BibTeX \| RIS
Jutaphorn Kritwattanakhorn, Andras Kovacs, Ulrich Mescheder, Bernd Müller, Christoph Ament, Andreas Peter, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein	Mikrosystemtechnik: Sensorarray zur Lufqualitätsmessung	2007	BibTeX \| RIS
Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Jutaphorn Kritwattanakhorn, Andras Kovacs, Bernhard Müller, Ulrich Mescheder	Modellbasierte Verfahren zur Bestimmung der Luftgüte	Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007	BibTeX \| RIS 978-3-8007-3061-2,
Ulrich Mescheder, Rolf Huster, Wolfgang Kronast, Thomas Hellmuth, Konstantin Khrennikov	Optimierung und Charakterisierung eines Membranspiegels zur dynamischen Fokussierung	Mikrosystemtechnik-Kongress 2007 : 15. - 17. Oktober 2007, Dresden, 2007	BibTeX \| RIS 978-3-8007-3061-2,
Jutaphorn Kritwattanakhorn, Marie-Luise Bauersfeld, Andras Kovacs, Bernhard Müller, Ulrich Mescheder, Sven Rademacher, Jürgen Wöllenstein	Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems	Sensors and Actuators B: Chemical, 127.2007(1), pp. 126-131, 2007	BibTeX \| RIS DOI
Andras Kovacs, Bernhard Müller, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Andreas Peter, Christoph Ament, Jürgen Wöllenstein, Marie-Luise Bauersfeld, Sven Rademacher	Sensor system for air quality measurement	Smart system integration 2007 : Paris, France 27. - 28.03.2007, pp. 519-522, 2007	BibTeX \| RIS 978-3-8007-3009-4,
2006
Rolf Huster, Andras Kovacs, Ulrich Mescheder	3-D Micro Free-Form Manufacturing in Silicon: Micro Free- Form Production for Plastics Moulding Technology	Galvanotechnik, 97.2006(2), pp. 442-447, 2006	BibTeX \| RIS
Ulrich Mescheder, Zoltan Torok, Wolfgang Kronast	Active focusing device based on MOEMS technology	Proceedings of SPIE: Volume 8168; MEMS, MOEMS, and Micromachining II, 2006, Strasbourg, France, 2006	BibTeX \| RIS 978-0-8194-6242-8,
Ulrich Mescheder, Carlos Estan, Gergoe Somogyi, Markus Freudenreich	Distortion optimized focusing mirror device with large aperture	Sensors and Actuators A: Physical, 130-131/2006(August), pp. 20-27, 2006	BibTeX \| RIS DOI
Adam Kovacs, Zsolt Vizvary, Andras Kovacs, Ulrich Mescheder	Large Defection Analysis of Perforated Silicon Nitride Membranes	6th European Solid Mechanics Conference: ESMC 2006; 28 August – 1 September, 2006 Budapest, Hungary, 2006	BibTeX \| RIS
Jutaphorn Kritwattanakhorn, Andras Kovacs, Ulrich Mescheder, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein	Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems	XX Eurosensors: 20th Anniversary; Göteborg, Sweden, 17-20 September 2006, pp. 376-377, 2006	BibTeX \| RIS 978-91-631-9280-7,
Andras Kovacs, M. Pogany, Ulrich Mescheder, Adam Kovacs	Realization and mechanical investigation of perforated and porous membranes for filter applications	XX Eurosensors: 20th Anniversary; Göteborg, Sweden, 17-20 September 2006, pp. 392-393, 2006	BibTeX \| RIS 978-91-631-9280-7,
Ulrich Mescheder, Andras Kovacs	Verfahren zur Bildung einer Ausnehmung in der Oberfläche eines Werkstücks, insbesondere zur Herstellung von Mikroformen	2006	BibTeX \| RIS
2005
Christoph Ament, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Bernhard Müller	"Single chip"-Sensorarray zu Luftqualitätsmessung	Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg, 2005	BibTeX \| RIS 978-3-8007-2926-5,
Rolf Huster, Andras Kovacs, Ulrich Mescheder	3-D Micro Free-Form Manufacturing in Silicon Micro-Free- Form Production for Plastics Moulding Technology	Micro system technologies 2005 : International Conference & Exhibition on Micro-, Electro-Mechanical, Opto & Nano Systems, München, October 5 - 6, 2005, 2005	BibTeX \| RIS 3-7723-7040-3,
Ulrich Mescheder, Andras Kovacs	3D-Mikrostrukturierungsverfahren: von kristallinem Silizium mit lokal einstellbarem Anisotropiefaktor	MikroSystemTechnik, pp. 7-9, 2005	BibTeX \| RIS
Ulrich Mescheder, Markus Freudenreich	Charakterisierung eines bi-stabilen Schalters mit großem Schaltweg und einstellbaren Haltekräften	Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg, 2005	BibTeX \| RIS 978-3-8007-2926-5,
Ulrich Mescheder, Carlos Estan, Gergoe Somogyi, Markus Freudenreich	MOEMS focusing device with ideal parabolic deflection shape	Transducers '05 : Seoul, Korea, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, pp. 1000-1005, 2005	BibTeX \| RIS 0-7803-8994-8, DOI
Ulrich Mescheder, Gergoe Somogyi, Markus Freudenreich, Carlos Estan, Zoltan Török	Mikrosystemtechnik: Mikrotechnische hergestelltes aktiv-optisches System für Fokussieraufgaben	2005	BibTeX \| RIS
Ulrich Mescheder, Andras Kovacs, Roland Schneider	Mikrosystemtechnik: Optische Penmaus mit Bluetooth	2005	BibTeX \| RIS
Ulrich Mescheder, Gergoe Somogyi, Markus Freudenreich, Carlos Estan	Mikrotechnisch hergestellter Membranspiegel für aktive Fokussierung	Horizonte, pp. 16-20, 2005	BibTeX \| RIS
Rolf Huster, Ulrich Mescheder, R. Valero	Mikrotechnologie: Mikrofreiformerzeugung in Silizium	2005	BibTeX \| RIS
Wolfgang Kronast, Ulrich Mescheder	Nanotechnologie: Das Rasterkraftmikroskop (AFM) - Strukturierung und Charakterisierung im Nanometerbereich	2005	BibTeX \| RIS
Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Ulrich Mescheder	Neuartiger Mikrosensor zur Luftgütemessung mit kombiniertem Feuchte- und Gassensor	50. Internationales Wissenschaftliches Kolloquium, Technische Universität Ilmenau, 19.-23. September 2005, pp. 273-274, 2005	BibTeX \| RIS 978-3-932633-98-0,
Ulrich Mescheder, Andras Kovacs, Roland Schneider	Optische Penmaus mit Bluetooth	Horizonte, pp. 8-11, 2005	BibTeX \| RIS
2004
Mark Herding, Gergoe Somogyi, Ulrich Mescheder, Peter Woias	A new micromachined optical fiber switch for instrumentation purposes	Proceedings of SPIE: Volume 5455; MEMS, MOEMS, and Micromachining, Photonics Europe, 26-30 April 2004, Strasbourg, France, 2004	BibTeX \| RIS 0-8194-5378-1,
Wolfgang Kronast, Aritz J. Laskurain, Ulrich Mescheder	Das Rasterkraftmikroskop (AFM) zur Charakterisierung und Strukturierung im Nanometerbereich	Horizonte, pp. 3-8, 2004	BibTeX \| RIS
Ulrich Mescheder	Mikrosystemtechnik : Konzepte und Anwendungen	Vieweg + Teubner: Stuttgart, 978-3-519-16256-8, 2004	BibTeX \| RIS 978-3-519-16256-8,
Christoph Nachtigall, Ulrich Mescheder	Movement giver having body with after-glowing surface	2004	BibTeX \| RIS
Ulrich Mescheder	Nanoporous Silicon: Multifunctional Material for Microsystems	Novel vehicle concepts and emerging vehicle technologies : papers presented at the RTO Applied Vehicle Technology Panel (AVT) symposium held in Brussels, Belgium, 7 - 10 April 2003, 2004	BibTeX \| RIS
Ulrich Mescheder, Wolfgang Kronast, N. Naychuk	Reliability investigations in micromechanical devices	Sensors and Actuators A: Physical, 110.2004(1-3), pp. 150-156, 2004	BibTeX \| RIS DOI
Markus Freudenreich, Ulrich Mescheder, Gergoe Somogyi	Simulation and realization of a novel micromechanical bi-stable switch	Sensors and Actuators A: Physical, 114.2004(2-3), pp. 451-459, 2004	BibTeX \| RIS DOI
2003
Markus Freudenreich, Ulrich Mescheder, Gergoe Somogyi	Design Consideration and Realization of a Novel Micromechanical Bi-Stable Switch	Transducers '03: The 12th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers, Volume 2, pp. 1096-1099, 2003	BibTeX \| RIS 0-7803-7731-1,
Ulrich Mescheder	Modern Silicon-based MEMS Technology	Smart Sensors and MEMS, Kluwer Academic Publishers: Dordrecht, pp. 255-272, 2003	BibTeX \| RIS 1-4020-2928-4,
Ulrich Mescheder	Porous Silicon: Technology and Applications for Micromachining and MEMS	Smart Sensors and MEMS, Kluwer Academic Publishers: Dordrecht, pp. 273-288, 2003	BibTeX \| RIS 1-4020-2928-4,
P. Fürjes, Andras Kovacs, Cs. Dücsö, Maria Adam, Bernhard Müller, Ulrich Mescheder	Porous silicon-based humidity sensor with interdigital electrodes and internal heaters	Sensors and Actuators B: Chemical, 95.2003(1-3), pp. 140-144, 2003	BibTeX \| RIS DOI
2002
Ulrich Mescheder, Andras Kovacs, A. Fahad, Rolf Huster	3D structuring of c-Si using porous silicon as sacrificial material	Proceedings of the 2002 2nd IEEE Conference on Nanotechnology: IEEE-NAN0 2002; August 26-28, Washington D.C., pp. 33-36, 2002	BibTeX \| RIS 0-7803-7538-6, DOI
Ulrich Mescheder, M. Alavi, K. Hiltmann, Ch. Lietzau, Christoph Nachtigall, H. Sandmaier	Local laser bonding for low temperature budget	Sensors and Actuators A: Physical, 97-98.2002(April), pp. 422-427, 2002	BibTeX \| RIS DOI
Ulrich Mescheder, Wolfgang Kronast	Mikrotechnologie: Lebensdaueruntersuchungen an mikromechanischen Bauelementen	2002	BibTeX \| RIS
Ulrich Mescheder	Mikrotechnologie: Zentrum für Mikrotechnik und Systemintegration (ZeMiS)	2002	BibTeX \| RIS
Ulrich Mescheder, Wolfgang Kronast, N. Naychuk	Reliability Investigations in Micromechanical Devices	Eurosensors XVI, The 16th European Conference on Solid-State Transducers, September 15-18, 2002 Prague, Czech Republic, pp. 145-146, 2002	BibTeX \| RIS 80-01-02576-4,
Ulrich Mescheder	Sensorik: Optische Bewegungserkennung	2002	BibTeX \| RIS
Ulrich Mescheder, Andras Kovacs, Bernhard Müller	Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters	2002	BibTeX \| RIS
Ulrich Mescheder, Andras Kovacs, Bernhard Müller, Maria Adam, Istvan Barsony, Csaba Dücsö, Peter Fürjes	Verfahren zur Herstellung von Feuchtesensoren	2002	BibTeX \| RIS
2001
Christoph Nachtigall, Ulrich Mescheder	Bewegungsgeber	2001	BibTeX \| RIS
Ulrich Mescheder, M. Alavi, K. Hiltmann, Ch. Lizeau, Christoph Nachtigall, H. Sandmaier	Local Laser Bonding for Low Temperature Budget	Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany, pp. 218-221, 2001	BibTeX \| RIS 978-3-540-42150-4,
Christoph Nachtigall, Ulrich Mescheder	Movement giver	2001	BibTeX \| RIS
Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Istvan Barsony, Maria Adam, Cs. Dücsö	Porous silicon as multifunctional material in MEMS	Proceedings of the 2001 1st IEEE Conference on Nanotechnology : IEEE-NANO 2001 : October 28-30, 2001, Maui, Hawaii, pp. 483-488, 2001	BibTeX \| RIS 0-7803-7215-8, DOI
Andras Kovacs, Ulrich Mescheder	Surface Micromachining Process for C-Si as Active Material	Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany, pp. 620-623, 2001	BibTeX \| RIS 978-3-540-42150-4,
2000
Ulrich Mescheder	Aktorik: Nanomotor	2000	BibTeX \| RIS
Christoph Nachtigall, Ulrich Mescheder	Bewegungsgeber	2000	BibTeX \| RIS
Ulrich Mescheder	Mikrosystemtechnik : Konzepte und Anwendungen	Teubner: Stuttgart, 3-519-06256-9, 2000	BibTeX \| RIS 3-519-06256-9,
Ulrich Mescheder, Andras Kovacs	Mikrotechnologie: Herstellung von porösem Silizium und seine Anwendungsmöglichkeit in der Sensortechnologie	2000	BibTeX \| RIS
Ulrich Mescheder	Mikrotechnologie: Laserbearbeitung in der Mikrotechnik	2000	BibTeX \| RIS
Ulrich Mescheder	Sensorik: Chip im Reifen - Oberflächenmikromechanik	2000	BibTeX \| RIS
Ulrich Mescheder	Sensorik: Mikromechanischer Neigungssensor	2000	BibTeX \| RIS
M. Reichardt, Ulrich Mescheder, Nagy Nosseir	Simulation of a Micro-Fabricated Inclinometer	Proceedings of the International Conference on Mathematics and Engineering Techniques in Medicine and Biological Sciences, METMBS '00; Las Vegas, Nevada, June 26 - 29, 2000, pp. 309-314, 2000	BibTeX \| RIS 1-892512-60-2,
1999
Ulrich Mescheder, Christiane Kötter	Optical monitoring and control of Si wet etching	Sensors and Actuators A: Physical, 76.1999(1-3), pp. 425-430, 1999	BibTeX \| RIS DOI
1998
Ulrich Mescheder, Christiane Kötter	Optical monitoring and control of Si wet etching	Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998, pp. 51-54, 1998	BibTeX \| RIS 0-7503-0536-3,
Ulrich Mescheder, C. Kötter, E. Kolguin, A. Oukhov	Optische Insitu-Prozesskontrolle beim anisotropen Ätzen von Si-Membranen	Sensoren und Meßtechnik: Vorträge der ITG-Fachtagung vom 9. bis 11. März 1998 in Bad Nauheim, pp. 365-372, 1998	BibTeX \| RIS 3-8007-2330-1,
Ulrich Mescheder, Christiane Kötter, B. Katzenstein	Piezoelectric Inch Worm Motor with Monolithically Integrated Driving Block	Actuator 98, 6th International Conference on New Actuators with accompanying exhibition : 17 - 19 June, 1998, Bremen, Germany, pp. 327-331, 1998	BibTeX \| RIS 3-933339-00-6,
Ulrich Mescheder, Christiane Kötter, B. Katzenstein, T. Lang	Piezoelectric inch worm motor with monolithically integrated driving block	1998	BibTeX \| RIS
Ulrich Mescheder, Christiane Kötter	Verfahren und Vorrichtung zur photoinduzierten Kontrolle des anisotropen Ätzens von kristallinem Silizium	1998	BibTeX \| RIS
1997
Ulrich Mescheder, S. Majer	Micromechanical inclinometer	Sensors and Actuators A: Physical, 60.1997(1-3), pp. 134-138, 1997	BibTeX \| RIS DOI
1996
Ulrich Mescheder, S. Majer, R. Keller	2-Achsen Si-Neigungssensor: Simulation und Realisierung	Sensoren und Messysteme : Tagung Bad Nauheim, 11. bis 13. März 1996 / VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik, pp. 83-93, 1996	BibTeX \| RIS 3-18-091255-3,
Ulrich Mescheder, S. Majer	Mikromechanischer Neigungssensor für industrielle Anwendungen	41. Internationales Wissenschaftliches Kolloquium 23. - 26.09.1996, Technische Universität Ilmenau, Thüringen, Band 1 Vortragsreihen, pp. 507-514, 1996	BibTeX \| RIS
E. A. Kolgin, I. A. Tumanov, A. A. Ukhov, Ulrich Mescheder	Photometric device for control of micromechanical elements manufacturing	Proceedings of third international scientific technical Conference of Actual Problems of electronic instrument engineering, APEIE-96, Vol. 2, pp. 75-76, 1996	BibTeX \| RIS
1995
S. Majer, Ulrich Mescheder	Konzept eines planaren 2-Achsen Silizium Neigungssensors	Mikro-System-Technik : Mikromechanik & Mikroelektronik ; Chemnitz '95 ; 16. - 17. Oktober 1995, Chemnitz, pp. 112-120, 1995	BibTeX \| RIS
S. Majer, Ulrich Mescheder	Simulation supported design of micromechanical sensors	Simulation and design of microsystems and microstructures : [papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, which was held in Southampton, UK, in September 1995, pp. 329-337, 1995	BibTeX \| RIS 1-85312-390-0,
S. Majer, Ulrich Mescheder	Simulation supported design of micromechanical sensors	Transactions on the Built Environment, Vol.12.1995, 1995	BibTeX \| RIS
1991
L.-M. Buchmann, Ulrich Mescheder, M. Torkler	Characterization of silicon open stencil masks in an ion projection lithography machine	Microelectronic Engineering, 13.1991(1-4), pp. 353-356, 1991	BibTeX \| RIS DOI
M. Zander, Ulrich Mescheder	Maskenmetrologie: Anforderungen und Trends	Maskentechnik für Mikroelektronik-Bausteine : Tagungsbericht ; Tagung München, 14. November 1991, pp. 7-40, 1991	BibTeX \| RIS 3-18-090935-8,
1990
Ulrich Mescheder, U. Mackens, H. Lifka, R. Dammel, G. Pawloski, J. Theis	Application of positive and negative tone x-ray resist for 0.5μm CMOS device fabrication	Microelectronic Engineering, 11.1990(1-4), pp. 481-485, 1990	BibTeX \| RIS DOI
H. Schaffer, Ulrich Mescheder, U. Weigmann, H.-C. Petzold	Influence of X-ray mask repair on pattern placement accuracy	Microelectronic Engineering, 11.1990(1-4), pp. 251-254, 1990	BibTeX \| RIS DOI
H. Lüthje, A. Bruns, H. Harms, I. Köhler, Ulrich Mescheder, U. Mackens, T. Stuck	X-ray mask technology: Precise etching of sub-half-micron tungsten absorber features	Microelectronic Engineering, 11.1990(1-4), pp. 255-258, 1990	BibTeX \| RIS DOI
1989
U. Mackens, Ulrich Mescheder, F. Mund, H. Lüthje, H. Lifka, C.A.H. Juffermans, P.H. Woerlee, A.J. Walker	Fabrication of 0.5 μm NMOS-devices by all level X-ray lithography	Microelectronic Engineering, 09.1989(1-4), pp. 89-92, 1989	BibTeX \| RIS DOI
Ulrich Mescheder, U. Mackens, F. Mund	Investigation Of Linewidth Uniformity In X-Ray Lithography	Proceedings of SPIE: Volume 1087; Integrated Circuit Metrology, Inspection, and Process Control III, Santa Clara Symposium on Microlithography, 1989, San Jose, CA, United States, pp. 396-406, 1989	BibTeX \| RIS 0-8194-0122-6,
U. Mackens, Ulrich Mescheder, H. Lüthje	Röntgenstrahllithographie: Herstellung einer 0.5 μm Schaltung und Overlayuntersuchungen	Mikroelektronik: Vorträge der GME-Fachtagung vom 13. bis 15. März 1989 in Baden-Baden, pp. 115-126, 1989	BibTeX \| RIS 3-8007-1624-0,
S. Pongratz, Ulrich Mescheder, Ch. Ehrlich, H.-L. Huber, K. Kohlmann, W. Windbracke	State of the art of pattern placement accuracy of silicon X-ray master masks	Microelectronic Engineering, 09.1989(1-4), pp. 117-120, 1989	BibTeX \| RIS DOI
Ulrich Mescheder, K. Werner	Submikrometer Linienbreitenmetrologie hoher Genauigkeit	Maskentechnik für Mikroelektronik-Bausteine: Tagungsbericht, München, 09. November 1989; VDI-Berichte, 795, pp. 155-190, 1989	BibTeX \| RIS 3-18-090795-9,
1988
U. Mackens, H. Lüthje, Ulrich Mescheder, F. Mund, S. Pongratz	Application Of Sic-X-Ray Masks For Fabricating Sub-Micron Devices	Proceedings of SPIE: Volume 0923; Electron-Beam, X-Ray, and Ion Beam Technology: Submicrometer Lithographies VII, 1988	BibTeX \| RIS 9780892529582,
H.-L. Huber, S. Pongratz, J. Trube, W. Windbracke, Ulrich Mescheder, F. Mund	Sub‐half‐micron critical dimension control in x‐ray lithography mask technology	Journal of Vacuum Science & Technology B: Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, 06.1988(6), pp. 2184-2189, 1988	BibTeX \| RIS
1987
Ulrich Mescheder, F. Mund, H.-L. Huber	Linewidth metrology for x-ray masks with subhalfmicron feature size	Microelectronic Engineering, 06.1987(1-4), pp. 653-659, 1987	BibTeX \| RIS DOI
1986
H. Betz, H.-L. Huber, S. Pongratz, W. Rohrmoser, W. Windbracke, Ulrich Mescheder	Silicon X-ray masks: Pattern placement and overlay accuracy	Microelectronic Engineering, 05.1986(1-4), pp. 41-49, 1986	BibTeX \| RIS DOI
H. Lüthje, U. Mackens, Ulrich Mescheder, B. Matthießen	Stability of SiC-masks for high resolution synchrotron X-ray lithography	Microelectronic Engineering, 05.1986(1-4), p. 39, 1986	BibTeX \| RIS DOI
1985
Ulrich Mescheder, G. Weiser	Optical study of space charge injection in plasma deposited a-Si:H	Journal of Non-Crystalline Solids, Vol.77-78.1985 Part 1, pp. 571-574, 1985	BibTeX \| RIS DOI
1984
Ulrich Mescheder, G. Weiser	Electro‐optical effects on the absorption edge of a‐Si:H	AIP Conference Proceedings, pp. 356-363, 1984	BibTeX \| RIS 0-88318-319-6,

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