Publications

Institut für Mikrosystemtechnik

2017 | 2016 | 2015 | 2014 | 2013 | 2012 | 2011 | 2010 | 2009 | 2008 | 2007 | 2006 | 2004 | 2003 | 2000

2017

Uma Muthiah, Isman Khazi, Ulrich Mescheder 3D Strukturierung von Silizium mittels Grauwert-Technologie
Shervin Keshavarzi, Frederico Lima, Wolfgang Kronast, Ulrich Mescheder Energieversorgung für mobile miniaturisierte Systeme
Frederico Lima, Alok Tungal, Isman Khazi, Ulrich Mescheder Galvanisch aus 3D-Fotolack-Strukturen abgeformte metallische 3D-Freiformen
Michael Metzger, Volker Bucher Kompaktes optisches Diagnosesystem für die Medizin und Umweltanalytik
Dirk Benyoucef, Vera Kallfaß, Andras Kovacs, Ulrich Mescheder, Stefan Palzer Mikrosystemtechnische Geruchssensorik und ihre Anwendungen in AAL
Andras Kovacs, Alexey Ivanov, Ulrich Mescheder Schmalbandige photonische Kristalle für Multispektral-Analyse

2016

Alexey Ivanov, Andras Kovacs, Ulrich Mescheder Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments
Rui Zhu, Ulrike Wallrabe, Matthias C. Wapler, Peter Woias, Ulrich Mescheder Dielectric electroactive polymer membrane actuator with ring-type electrode as driving component of a tactile actuator
Victor V. Lyubimov, Vladimir M. Volgin, Ulrich Mescheder, Inna V. Gnidina, Alexey Ivanov Investigation of plastic electrode tools for electrochemical machining of silicon
Alvaro O. Pérez, Vera Kallfaß-de Frenes, Alexander Filbert, Janosch Kneer, Benedikt Bierer, Pirmin Held, Philipp Klein, Jürgen Wöllenstein, Dirk Benyoucef, Sigrid Kallfaß, Ulrich Mescheder, Stefan Palzer Odor-Sensing System to Support Social Participation of People Suffering from Incontinence
Andras Kovacs, Ulrich Mescheder PSi-based Diffusion Membranes
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke Room Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces
Alexey Ivanov, Ulrich Mescheder Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices

2015

Ulrich Mescheder, Andras Kovacs, Wolfgang Kronast, Bernhard Müller, Alexey Ivanov Adaptiver optischer Filter bzw. spektral einstellbare Lichtquelle
Frederico Lima, Holger Reinecke, Ulrich Mescheder Adhesion of Continuous and Homogeneous Electrodeposited Copper Layers on Silicon
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke Bonding Mechanism in the Velcro Concept Si-Si Low Temperature Direct Bonding Technique
Isman Khazi, Ulrich Mescheder, Zohaib Siddiqui Characterization of the influence of Sodium-Lauryl-Sulfate on the surface quality of electrodeposited Nickel-Cobalt alloys
Ulrich Mescheder, Isman Khazi Corner rounding of sharp silicon punching tool edges by local oxidation of silicon
Paul Walden, Janosch Kneer, Stefan Knobelspies, Wolfgang Kronast, Ulrich Mescheder, Stefan Palzer Micromachined Hotplate Platform for the Investigation of Ink-Jet Printed, Functionalized Metal Oxide Nanoparticles
Wolfgang Kronast, Volker Lange, Rolf Huster, Ulrich Mescheder Optische Charakterisierung von Stress-relaxierten aktiven MOEMS-Membranspiegeln mit großer Apertur
Alexey Ivanov, Ulrich Mescheder Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening
Andras Kovacs, Alexey Ivanov, Ulrich Mescheder Refractometer Using Photonic Crystals for Fermentation Process Characterization
Isman Khazi, Ulrich Mescheder Self-aligning micro punch-die tool-system for high precision blanking of thin metal foils
Surjitsinh Chauhan, Bernhard Müller, Ulrich Mescheder Simulation, Fabrication and Characterization of Robust Vibrational Energy Harvester
Isman Khazi, Ulrich Mescheder Surface polishing of rough (110) silicon plane by HNA etching resulting from wet anisotropic KOH etching
Andras Kovacs, Philipp Maurer, Ulrich Mescheder Temperatureinfluss auf die Peakposition bei verschiedenen Umgebungsmedien in Porösen Silizium Multilayerschichten
Andras Kovacs, Alexey Ivanov, Ulrich Mescheder Tunable Narrow Band Porous Photonic Crystals for MOEMS Based Scanning Systems

2014

Rui Zhu, Ulrich Mescheder, Frederico Lima Actuation concept for miniaturized tactile systems
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke Characterisation and simulation of low temperature Si-Si direct bonding through velcro-like surfaces based on porous silicon
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster Development of a focusing micromirror device with an in-plane stress relief structure in silicon-on-insulator technology
Frederico Lima, Ulrich Mescheder, Holger Reinecke Electrochemical Impedance Spectroscopy of n-Si(100) Pre-etched by KOH or BHF
Alexey Ivanov, Ulrich Mescheder, Peter Woias Finite-Elements Simulation of Etch Front Propagation in Silicon Electropolishing Process
Ulrich Mescheder Forschungsgebiet Mikrosystemtechnik im Forschungsschwerpunkt Smart Systems
Ulrich Mescheder, Isman Khazi, Andras Kovacs, Alexey Ivanov MOEMS based concept for miniaturized monochromators, spectrometers and tunable light sources
Frederico Lima, Ulrich Mescheder, Holger Reinecke Maskless Selective Electrodeposition on Silicon
Laszlo Becsi, Thomas Bier, Wolfgang Kronast, Ulrich Mescheder, Dirk Benyoucef Miniaturisiertes Impulslärm-Dosimeter zur Untersuchung und Vermeidung von Gehörschädigungen bei Menschen
Nigol Kaste, Alexander Filbert, Ulrich Mescheder, Toomas Rang, Galina Rang Process Development For 3D Laser Lithography
Ulrich Mescheder, Isman Khazi, Andras Kovacs, Alexey Ivanov Tunable optical filters with wide wavelength range based on porous multilayers

2013

Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller Developement of stress relief suspensions for micro-machined silicon membranes
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology
Andras Kovacs, Aina Malisauskaite, Ulrich Mescheder Einfluss der Morphologie auf die Sensitivität eines photonischen Biosensors
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Rolf Huster Entwicklung einer Stressausgleichsstruktur für spannungsarme aktive Membranspiegel in SOI Technologie
Laszlo Becsi, Dirk Benyoucef, Thomas Bier, Wolfgang Kronast, Ulrich Mescheder Entwicklung eines Impulslärm-Dosimeters zur Untersuchung von Gehörschädigungen bei Menschen
Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke Modeling the adhesion between nanoneedle surfaces bonded based on Velcro or Gecko principle
Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder, Rainer Wittig Optical sensing and analysis system based on porous layers
Andras Kovacs, Aina Malisauskaite, Alexey Ivanov, Ulrich Mescheder Portable Optical Sensor Using Tunable Optical Multilayers
Ulrich Mescheder, Qingyun Gu, Bernhard Müller Preiswerter und robuster Harvester für Vibrationsenergie
Rui Zhu, Aina Malisauskaite, Ulrich Mescheder, Ulrike Wallrabe Proof of Concept and Properties of Micro Hydraulic Displacement Amplifier
Andras Kovacs, Wolfgang Kronast, Alexander Filbert, Ulrich Mescheder Transport in Surface Passivated Porous Silicon Membranes

2012

Shervin Keshavarzi, Ulrich Mescheder, Holger Reinecke, Andras Kovacs Contact Mechanics and Needle Like Surfaces for Micro-Nano Integration
Alexey Ivanov, Ulrich Mescheder Dynamic Simulation of Electrochemical Etching of Silicon with COMSOL
S. Hildering, Laszlo Becsi, U. Engel, M. Merklein, Ulrich Mescheder Experimental investigations on high-precision microcutting of copper foils with microfabricated silicon punches
Ulrich Mescheder, Antwi Nimo, Bernhard Müller, Awad Saad Abou Elkeir Micro harvester using isotropic charging of electrets deposited on vertical sidewalls for conversion of 3D vibrational energy
Thomas Bruns, Laszlo Becsi, Ulrich Mescheder, Herbert Schneckenburger Microfluidic system for single cell sorting based on deflection by optical tweezers
Andras Kovacs, Alexey Ivanov, Aina Malisauskaite, Ulrich Mescheder Oberflächenstabilisierung nanostrukturierter poröser Siliziumschichten für sensorische Anwendungen
Frederico Lima, Ulrich Mescheder, Holger Reinecke Simulation of Current Density for Electroplating on Silicon Using a Hull Cell
Andras Kovacs, Ulrich Mescheder Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications

2011

Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad S. Abou Elkeir 3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls
Antwi Nimo, Ulrich Mescheder, Bernhard Müller, Awad S. Abou Elkeir A device for 3D energy harvesting
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder High quality 3D shapes by silicon anodization
Prasad Jonnalagadda, Ulrich Mescheder, Andras Kovacs, Antwi Nimo Nanoneedles based on porous silicon for chip bonding with self assembly capability
Ting Yuan, Ulrich Mescheder, Wolfgang Kronast, Changlong Wang Optimization of Deformation Shape of an Active Electro-Optical Focusing Device
Andras Kovacs, Prasad Jonnalagadda, Ulrich Mescheder Optoelectrical detection system using porous silicon-based optical multilayers
Alexey Ivanov, Ulrich Mescheder Silicon Electrochemical Etching for 3D Microforms with High Quality Surfaces

2010

Antwi Nimo, Ulrich Mescheder 3-D capacitive vibrational harvester for autonomous low power sensors
Wolfgang Kronast, Ulrich Mescheder, Bernhard Müller, Antwi Nimo, Claus Braxmaier, Thilo Schuldt Development of a tilt actuated micromirror for applications in laser interferometry
Awad Saad, Ulrich Mescheder, Bernhard Müller, Antwi Nimo High eficient, low cost electret charging set-up for mems based energy harvesting systems
Thomas Bruns, Laszlo Becsi, Marc Talkenberg, Michael Wagner, Petra Weber, Ulrich Mescheder, Herbert Schneckenburger Microfluidic system for single cell sorting with optical tweezers
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder Nasschemisches Ätzen von nahezu beliebigen 3D-Strukturen in Silizium
Ulrich Mescheder, Prasad Jonnalagadda, Andras Kovacs, X. Meng Optischer Biosensor mittels selbstorganisierter nanostrukturierte Multilayerschichten
Andras Kovacs, Ulrich Mescheder, Prasad Jonnalagadda, X. Meng Optisches Messsystem für biosensorische Anwendungen
Simon Ressel, Martin Gohlke, Dominik Rauen, Thilo Schuldt, Wolfgang Kronast, Ulrich Mescheder, Ulrich Johann, Dennis Weise, Claus Braxmaier Ultrastable assembly and integration technology for ground- and space-based optical systems

2009

Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich Mescheder Characterization of porous silicon based optical sensor system for biosensor applications
Herbert Schneckenburger, Rainer Börret, Claus Braxmaier, Rudolf Kessler, Petra Kioschis, Dietrich Kühlke, Ulrich Mescheder, Werner Schröder, Christoph Nachtigall Dem Energiestoffwechsel von Tumorzellen und Bioreagenzien auf der Spur
Andras Kovacs, Prasad Jonnalagadda, X. Meng, Ulrich Mescheder Entwicklung und Charakterisierung von photonischen Multischichten aus porösem Silizium für biosensorische Anwendungen
Andreas Kovacs, Dirk Meister, Ulrich Mescheder Investigation of humidity adsorption in porous silicon layers
Ulrich Mescheder, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Christoph Ament, Andreas Peter Mikrostrukturierter Sensorarray zur Luftqualitätsmessung (MOSEL)
Ulrich Mescheder, Andras Kovacs, Prasad Jonnalagadda, Antwi Nimo Nanostrukturierte Siliziumoberflächen für Mikro-Nano-Integration
Alexey Ivanov, Andras Kovacs, Ulrich Mescheder, S. Kuhn, M. Kübler, A. Burr Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements
Ulrich Mescheder, Bernhard Müller, Safi Baborie, P. Urbanovic Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems
Wolfgang Kronast, Ulrich Mescheder, Rolf Huster Stressuntersuchung und Optimierung von SOI basierten Membranen

2008

Ulrich Mescheder, P. Urbanovic, Bernhard Müller, Safi Baborie Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems
Adam Kovacs, Andras Kovacs, Ulrich Mescheder Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations
Alexey Ivanov, Ulrich Mescheder, M. Kröner, Peter Woias Formation of Arbitrarily Shaped 3D-Forms in Silicon by 315 Electrochemical Wet-Etching
HFU Forscher top
T. Hellmuth, Konstantin Khrennikov, Wolfgang Kronast, Rolf Huster, Ulrich Mescheder Optimisation and characterisation of parabolic membrane mirrors

2007

Daniela Kögler, Rolf Huster, Wolfgang Kronast, Ulrich Mescheder Aufbau- und Verbindungstechnik für ein mikrooptisches System
Alexey Ivanov, Ulrich Mescheder, Andras Kovacs, Rolf Huster Einfluss unterschiedlicher Passivierungsschichten auf die Bildungsrate von porösem Silizium an Strukturkanten bei der 3DFormherstellung
Ulrich Mescheder, Marie-Luise Bauersfeld, Andras Kovacs, Jutaphorn Kritwattanakhorn, Bernhard Müller, Andreas Peter, Christoph Ament, Sven Rademacher, Jürgen Wöllenstein MEMS-Based Air Quality Sensor
Andras Kovacs, Adam Kovacs, M. Pogany, Ulrich Mescheder Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications
Andreas Peter, Christoph Ament, Marie-Luise Bauersfeld, Sven Rademacher, Jürgen Wöllenstein, Jutaphorn Kritwattanakhorn, Andras Kovacs, Bernhard Müller, Ulrich Mescheder Modellbasierte Verfahren zur Bestimmung der Luftgüte
Ulrich Mescheder, Rolf Huster, Wolfgang Kronast, Thomas Hellmuth, Konstantin Khrennikov Optimierung und Charakterisierung eines Membranspiegels zur dynamischen Fokussierung
Jutaphorn Kritwattanakhorn, Marie-Luise Bauersfeld, Andras Kovacs, Bernhard Müller, Ulrich Mescheder, Sven Rademacher, Jürgen Wöllenstein Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
Andras Kovacs, Bernhard Müller, Jutaphorn Kritwattanakhorn, Ulrich Mescheder, Andreas Peter, Christoph Ament, Jürgen Wöllenstein, Marie-Luise Bauersfeld, Sven Rademacher Sensor system for air quality measurement

2006

Rolf Huster, Andras Kovacs, Ulrich Mescheder 3-D Micro Free-Form Manufacturing in Silicon: Micro Free- Form Production for Plastics Moulding Technology
Ulrich Mescheder, Carlos Estan, Gergoe Somogyi, Markus Freudenreich Distortion optimized focusing mirror device with large aperture

2004

Ulrich Mescheder Mikrosystemtechnik : Konzepte und Anwendungen

2003

Ulrich Mescheder Modern Silicon-based MEMS Technology
Ulrich Mescheder Porous Silicon: Technology and Applications for Micromachining and MEMS

2000

Ulrich Mescheder Mikrosystemtechnik : Konzepte und Anwendungen