Technical equipment

Coating equipment

  • Atomic layer deposition ALD (Myplas III, Plasma Electronic GmbH)
  • Plasma Enhanced Chemical Vapor Deposition PECVD (Plasma Flecto 30, Plasma Technology GmbH)
  • Plasma Enhanced Chemical Vapor Deposition PECVD (MiniFlecto, Plasma Technology GmbH)
  • Parylene coating unit (Labcoater 300, Plasma Parylene Systems GmbH)
  • Atmospheric plasma unit (Openair Plasma, Plasmatreat GmbH)
  • Atmospheric plasma "pen" (Control Kin Pen 11, neoplas GmbH)
  • Sputter coater (SC7620 Mini, Quorum Technologies Ltd)

Analysis

  • Digital microscope up to 200x magnification (Keyence VHX700F, Keyence Deutschland GmbH)
  • Wafer inspection microscope up to 1000x magnification (Ultraplan FS 110, Mitutoyo Deutschland GmbH)
  • Surface profiler (Alpha Step 500, KLA Corporation)
  • Contact angle measuring system (Contact angle measuring system G 10, A.Krüss Optronic GmbH)
  • Atomic force microscope AFM (Topometrix Explorer, Topometrix)
  • Scanning electron microscope SEM (XL30 ESEM with EDX, Philips)
  • Transmission electron microscope TEM (JEM 2000-FX II, Jeol Germany GmbH)
  • Tribometer pin disc machine (Revetest, CSem SA)
  • Mass spectrometer (Prisma Pro & HiCUBE Eco, Pfeiffer Vakuum)
  • Tensile testing machine/universal testing machine, 50N ( FMT 310, Alluris GmbH)
  • Ion Mill (Model 600, Gatan USA)
  • UV-VIS spectrometer thin film measurement system (thickness/refraction index) (NanoCalc-XR, Ocean Optics Deutschland GmbH)
  • High-voltage failure measurement (ST9201CX AC HIPOT Tester, Sourcetronic GmbH)
  • Impedance spectrometer (Solartron EnergyLab XM potentiostat galvanostat, Ametek Scientific Instruments)
  • DC measurements (Keithley 6517B, electrometer/high resistance meter, Tektronix GmbH)

Mechanical engineering / Robotics

  • 6-axis articulated industrial robot (2000iB-170CF, Fanuc Deutschland GmbH)
  • 6-axis delta robot (M-3iA-6A ( SN: E-61360, Fanuc Deutschland GmbH)
  • Mixed signal oscilloscope (MS070404C, Tektronix GmbH)
  • Dual channel arbitrary/function generator (AFG3022C, Tektronix GmbH)

Other equipment

  • 3D printer (i3MK3, Prusa Research s.r.o)
  • 3D printer (Geeetech A20M, Shenzhen Getech Technology Co. Ltd)
  • High temperature oven (HAT 64/17, Nabertherm GmbH)
  • Corrosion test salt spray unit (SSC 450, Weiss Umwelttechnik GmbH)
  • Climatic chamber (APT.line MKF115 (E3.1), Binder GmbH)
  • Glove box with gas purification (PGB 20k, Sylatech GmbH)
  • Vacuum leak detector (Ultratest M2, helium, Leybold Heraeus GmbH)
  • Table dispensing robot (JR 3303, Janome Industrial Equipment Europe GmbH)
  • Laser milling and cutting line (Sabko 460, Sabko GmbH)
  • CO₂ snow jet cleaning unit (CO₂ Cleaning, acp GmbH)
  • CO₂ dry ice blasting device (DIS Mini, DIS Dry Ice Solution GmbH)